MLGP

Auto switches are shipped together, (but not assembled). 50 63 80 100 20 25 32 40 50 mm 63 mm 80 mm 100 mm 20 mm 25 mm 32 mm 40 mm Locking direction Extension locking Retraction locking F B Cylinder stroke (mm) Refer to Standard Stroke on page 9-11-21. Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10

Mist Separator

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

Micro Mist Separator

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

ARJ310

4 r Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Aluminum alloy Brass Brass POM Brass Brass Brass Brass Steel wire Stainless steel Steel band NBR NBR SS Steel band POM, Stainless steel !

“Going to

Burst prssure Min. bending radius (mm) 10 15 20 27 35 10 15 23 27 35 20 to +60C (Water: 0 to 40C) (No freezing) Polyurethane Operating temperature Material Precautions How to Order Be sure to read before handling.

MHT2

11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6

OML0002-C

Body Assembly B Manifold mounting parts IZN10 ES 2 10 A002 01 06 Number of manifold Mounting pitch ES 17mm 2 2 stations 3 3 stations 4 4 stations Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Large flow nozzle Type Energy saving charge elimination nozzle Electrode needle cleaning kit/IZS30-M2 Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PB B A B A B A N.C. N.O. Double acting Double acting With flow rate adjustment PA PA N.C. B A PB B A Double acting N.C. Double acting With by-pass PA PA N.C. PB B A B A Double acting N.C. Double acting With flow rate adjustment & by-pass PA PA N.C. PB B A B A Double acting N.C.

MIST SEPARATOR

B B Semi-standard 6 Semi-standard 6C Part no. Part no. Port thread Port thread Rc Rc G G NPT AD27-6(Z)-A NPT AD27-6C(Z)-A AD27-6-A AD27-6C-A M50.8 M50.8 11 Note 2 Option Semi-standard Semi-standard Part no. Port thread Rc G NPT AD27-2(Z)-A AD27-2-A External appearance drawing and part no. B M50.8 Note 1) B in the table shows the distance from inlet piping centreline to drain port.

MICRO MIST SEPARATOR

B B Semi-standard 6 Semi-standard 6C Part no. Part no. Port thread Port thread Rc Rc G G NPT AD27-6(Z)-A NPT AD27-6C(Z)-A AD27-6-A AD27-6C-A M50.8 M50.8 11 Note 2 Option Semi-standard Semi-standard Part no. Port thread Rc G NPT AD27-2(Z)-A AD27-2-A External appearance drawing and part no. B M50.8 Note 1) B in the table shows the distance from inlet piping centreline to drain port.

Digital Flow Switch (Remote type sensor unit)

Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W521 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 76.6 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0010

SI unit (CC-Link compatible)

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

Flow Sensor Series PFMV

DC () IN Pin no. 1 2 3 4 1 to 5 V (Sensor output) With bracket A 30 20 46 4.2 10 15 40 31.5 26.5 7.2 1.6 22 35 41 View A Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 11 34.5 24 7 Panel thickness dimension: 0.5 to 6 Panel mount adapter + Front protective cover 8.75 Panel mount adapter 960 Voltage Monitor for PFMV5 Series PFMV3 Dimensions

K35-OMX0029

For detailed description of the signals, refer to the following pages. 15 (2) Internal circuit (Numbers in brackets indicates the pin numbers) (5) PWR_DC24V LF (6) PWR_GND Output signal GND (9) CTR (10) CYL (11) VAL (16) RF (17) PWR Max.

Line filter

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AFF20 159. 6 159. 4 146. 1 142. 1 148. 6 AFF30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AFF40 263.3 265.1 265.1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

Micro Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AMD20 159. 6 159. 4 146. 1 142. 1 148. 6 AMD30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AMD40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AM20 159. 6 159. 4 146. 1 142. 1 148. 6 AM30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AM40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: September 2020 Addition

IDX-OM-W034

Specification for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11 4 How to connect the power supply and signal cable . 11 -2 11 5 How to re-start the operation . 11 -3 11 6 Electric wiring diagram . 11 -4 Chapter 12 Specification for Option V 12 1 Safety instructions . 12 -1 12 2 Specifications . 12 -1 12 3 How to perform maintenance