Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Standard stroke (mm) 10, 20, 30, 40, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75 Bore size (mm) Nil S 6 10 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 15, 20, 25, 32 Auto switch type Nil Without auto switch (built-in magnet) Note) Refer to the table below for auto switch part numbers. Applicable auto switches Load voltage Auto switch part no.

ChemicalThermo-con

0.7 0 0 0 5 10 15 20 0 5 10 15 20 Flow rate (L/min) Flow rate (L/min) Pressure Loss in FacilityWater Circuit Clear water HED003 HED005 HED007 1 0 2 3 4 gpm 1 0 2 3 4 gpm 100 kPa 100 kPa 15 psi 15 psi 80 80 12 12 Pressure loss Pressure loss 60 60 9 9 40 40 6 6 20 20 3 3 0 0 5 10 15 0 0 5 10 15 Flow rate (L/min) Flow rate (L/min) 179 Series HED Dimensions Unit: inch (mm) HED003

MRQ

Size/Standard stroke (mm) Angle of rotation 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to p.1.5-18 and 1.5-19 for middle and long strokes other than standard stroke.

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

SMC Pneumatic Clean Series

Nil S n No D With auto switch (Built-in magnet) Model Cushion Action Standard stroke (mm) Auto Switch Mounting Tube Bore size (mm) 6 10 16 6 10 16 Port size Lubrication Model Rubber Air 10-/21-CJ26 10-/21-CJ210 10-/21-CJ216 11-/22-CJ26 11-/22-CJ210 11-/22-CJ216 Relief type Vacuum suction type 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 Band mounting only Except 6 M5 x 0.8 15, 30,

Intrinsically Safe Valve

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

New

80A Steel tube 80A Steel tube Piping A Piping A 30 Series VXF2/VXFA2 RoHS Controller Dedicated For Operation/Series VXFC How to Order Controller D VXFC 06 Voltage Number of output points 06 10 D D-6 A 24 to 48 VDC 6 output points 12 VDC 10 output points 85 to 220 VAC Specifications 06 10 VXFC D 06 10 VXFC A 06 10 VXFC D-6 85 to 220 VAC 24 to 48 VDC Model Input voltage 12 VDC Output voltage

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 Size (mm) 10 X L1 Size 3 to 8 5-( 8-Y) to (Y-1) 15 10 3 to 9 6-( 9-Y) to (Y-1.5) 9-(14-X) to (X-3) 5 to 14 Y = L1 = 20 15 3 to 10 7-(10-Y) to (Y-1.5) 10-(18-X) to (X-4) 8 to 18 L2 = 30 20 5 to 13 8-(13-Y) to (Y-2) 10-(20-X) to (X-4.5) 10 to 20 X = 40 30 7 to 15 9-(15-Y) to (Y-2) 12-(22-X) to (X-5) 10 to 22 Symbol: A11 The long

LEJ-OM002xx

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 24 16 8 30 20 10 27 42 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less than stroke 1000)/ 0001(Stroke 1000 or more) Home position return type PE03 0010 3Stopper type *4 Home position

•

With 2 pes (OiHerenl surta~es, 90 % 100 D-V6~ Same sunace). With j ;le. 10 D-Y7PV 10+ 30("2 2) 95 + 301 ";: 4) 100 + 3O In ;: 4) 90+30 D-Y7OWV With n pes. I" = 2. 4. 6. 8.. ) (n = 4.8, 12. 16") (n = 4, 8, 12. 16 .. ) (n = 4, 8, '2, 16 ..) With 2 pes. (DiUerent surfaCfls 115 20 120 ' 25 Same surface), With 1 pc (n '" 2. 4. 6, 8..

LEF-OM007xx

6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

Series VQ Metal Seal/Rubber Seal Body Ported

AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 Socket only (3 pcs.) 300mm 600mm 1000mm 2000mm 3000mm Socket only (3 pcs.) 300mm 600mm 1000mm 2000mm 3000mm AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 Note) 100/110V AC for single: AXT661-31A-; for double: AXT661-32A200

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T11-R1 LQ3T11-R5 LQ3T21-R1 LQ3T21-R2 LQ3T21-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 Applicable tubing O.D. 4 3 6 6 4 3 10 10 8 6 8 6 12 10 19 12 25 19 3 4 4 3 6 6 8 6 10 10 6 8 10 12 12 19 19 25 LQ 10 4 3.5 10 9 9 9 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 4.8 10 9 16 11 16 30.5 29.5

60

Name plate For VX21: VX021N-10 For VX22: VX022N-10 For VX23: VX023N-10 P Clip Part No. (For N.O.) For VX21: ETW-7 For VX22: ETW-8 For VX23: ETW-9 P Strainer Part No.

PEEK

Unit: W LVM09/090 LVM10/100 LVM15/150 LVM20/200 Series 3.3 2.5 5.5 4 Power consumption Inrush 0.9 1 1 0.6 Holding Space-saving Unit: mm LVM090 LVM10/100 LVM150 LVM200 Series 9.5 13 16 20 Valve width 10.5 14 17 21 Manifold pitch C Refer to 10 in Design and Selection on the back of page 2, if the valve is to be energized continuously for extended periods of time, or used with a manifold.

IZx-OMR0035

No.: IZ-OMR0035 2) Static neutralization area (Air flow setting: 10, Discharge time from 1000 V to 100 V) IZF21 IZF31 300 mm 300 mm 3) Static neutralization area (Air flow setting: 1, Discharge time from 1000 V to 100 V) IZF21 IZF31 5-2.

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

CLS

] 100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum

AC Servo Motor Driver (CC-Link Type)

Travel multiplying factor 0300: 1000 0200: 100 0100: 10 0: 1 0010h Current alarm (warning) reading Reads the alarm No. or warning No. occurring currently. 0 0 Occurring alarm No.