Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

PSE200.eng

ON = A (A B)/4 A = Max. pressure OFF = B + (A B)/4 B = Min. pressure Perform zero clear operation again after restoring the applied pressure to an atmospheric pressure condition. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

XL-OMY0001

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11 16 25 40 50 XLA16-30-1-2 XLA25

MHS

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

MH-OMY0004

. / . 20 2 180 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

IDX-OM-Y002

(b) Moisture in the refrigerant circuit (colour of the indicator) Green (DRY) ---Good Yellow (WET) ---Moisture is present in the refrigerant.

ZSE30/ISE30

10.4 12.8 13.2 B A 20 22.4 22.8 C B 14.4 11.2 B Straight Elbow With One-touch fitting With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 16-2-10 11 Series ZSE30/ISE30 High Precision, 2-color Display Digital Pressure Switch Dimensions Panel mount ZSE ISE PSE Z I SE3 8 17.8 7.2 9.5 34.5 47.8 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

NCX2 seies

'Special order only Standard Stroke List Pi ston Speed AirHg dro T y pe * Plate Vpe in lo,v passure lrydraulic operation allo ,s lo^/ sped pislon sped only due b iolemal flow sticlion.

Booster Relay Series IL100

t Exhaust flow path OUT SUP y Inner valve Signal pressure enters the input chamber q and diaphragm A w and exerts a downward force on diaphragm B e.

CG1-OM0227

) JIS B 8433-1: --1 *2) 1. 2. 3. 1. 2. 3. 4

ARJ310

To ensure safety, be sure to observe ISO 4414 Note 1), JIS B 8370 Note 2) and other safety practices. Caution: Operator error could result in injury or equipment damage. Warning: Operator error could result in serious injury or loss of life. Danger: In extreme conditions, there is a possible result of serious injury or loss of life.

Pneumatic Purification

(New Jersey) 3434 US Highway 22 West Suite 110 Somerville, NJ 08876 Tel: (908) 253 3241 Fax: (908) 253 3452 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895 9765 Fax: (614) 895 9780 EUROPE CHILE SMC Pneumatics (Chile) Ltda. TAIWAN SMC Pneumatics (Taiwan) Co Ltd.

HAA

8 B 3 8 B 1 2 Thermometer for outlet air temp.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Description Panel mounting adapter A, B ZS-22-E Front protective cover + Panel mounting adapter ZS-26-B ZS-26-C With mounting bracket Panel mounting adapter With waterproof seal, mounting screw With waterproof seal, mounting screw Panel Front protective cover PF2D30 Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter Panel mounting adapter B Mounting bracket

Clean Rodless Cylinder Series CYP

c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Electric Actuator with Integrated Guide Series LTF

Motor/switch entry direction Proximity switch (B contact) 2 pcs., Proximity switch rail 1 pc. Without motor, switch and switch rail Proximity switch (A contact) 1 pc., (B contact) 2 pcs., Proximity switch rail 1 pc. Nil R L Motor straight, motor cable, switch and switch rail located on the right Photo micro sensor rail 1 pc.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

IDX-OM-W095

-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series 11-3 IDX-OM-W095 T 11.5 IDFC60/70-23-T A B AC 230V50Hz CM OLR FM MC MC2 PRS ILS THR C01 C11 TB CN TDR GFCI EDV PE BK WH IDFC80/90-20-T GR SY A B AC 230V50Hz BU BR YE OR G/Y / IDFC60/70/80/90 Series 11-4 IDX-OM-W095 V 12 V V 12.1 0 () 12.2 ( 10m) (12mm) IDF-S0534