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The proof pressure is double the operating pressure range. -69No.LV50***-OMQ0002-G Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -70No.LV50***-OMQ0002-G Dimensions Note) The electrical

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14)

P23 -1- *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1.

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 *3) *3)1 1 () 3 - 2

4-dN through I-dO countelbore Widlh across llals: K B + Stroke With cancel cap/RSlODtl-:f f C ' Dimensions ol lhe model wilh a cancel cap are the same as those shown in the above drawings. s u ' Dirnensons lof lhe matimum energy absoption Fixed mounting l'reishtS9fieS RSQ ' D mere ons ohff than lhose sfswr in lli lab e beNalhe same 6lhedawinss below mm With locking mechanism M o d e l B

B is applied to approx 180cm3-capacity actuator. Note 4) Standard lever is not attached. Note 5) It is to be used together with A or B when tending to overshoot by the use of A or B. It is mounted to the body as a replacement of the standard compensation spring. Note 6) With terminal box, Non-explosion proof. Select 1 for the construction.

B L1,L2,L3: A L,N: PE A PE IDF60-20-T IDF70-20-T IDF80-20-T IDF90-20-T M3.5 M4.0 8.5mm 9.5mm IDF60-30-T, IDF70-30-T,IDF80-30-T, IDF90-30-T M3.5 8.5mm [3.2.5 ] IDF60/70/80/90 Series 12-3 IDX-OM-W093 T 12.5 IDF60/70-20-T A B AC 200/200,220V 50/60Hz CM OLR FM MC MC2 PRS PRS2 ILS THR C01 C11 TB CN GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/

8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2- / 1 1.5 *3) *3) 1 1 () 3- IR3000 (1) 0.2%F.S (IR3000:F.S.=0.2MPa,IR3010:F.S.=0.4MPa,IR3020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa IR3000 IR3010 IR3020 [MPa] MAX. 1.0 [MPa] () 0.1 [MPa] 0.010.2 0.010.4 0.010.8 0.2% 0.5% 11.5l /min(ANR) [1.0MPa ] -560 Rc1/4,3/8,1/2 Rc1/8 [2 ] 0.64 (1

(2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03 3 position pressure center 1.2 1 8 VFRA4511-04 1 2 67 (3.7) [PA, B: 30.6 (1.7)] ( ): in case of normal position.

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60/70/80/90 Series 12-3 IDX-OM-W094 T 12.5 IDFA60/70-23-T A B AC 230V50Hz CM OLR FM MC MC2 PRS PRS2 ILS THR C01 C11 TB CN GFCI EDV PE TDR BK WH IDFA80/90-23-T A B A B GR A B AC 230V50Hz SY BU BR YE OR G/Y / IDFA60/70/80/90 Series 12-4 IDX-OM-W094 V 13 V V 13.1 0 () 13.2

(New Jersey) 3434 US Highway 22 West Suite 110 Somerville, NJ 08876 Tel: (908) 253 3241 Fax: (908) 253 3452 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895 9765 Fax: (614) 895 9780 EUROPE CHILE SMC Pneumatics (Chile) Ltda. TAIWAN SMC Pneumatics (Taiwan) Co Ltd.

rod 3A'.%', Stainless Sieel 1%'.1t4 .1Yz' Cabon Steel Hard Chrorne Plated o Alshing sjnted BR Reblriru drE Spdng Sleel o Eanper Uretnane o Rod seal NBR o Piston s6al NBR enrtrk* NBR Dimensions (inch ZB+(2Stroke) B-DIA Pilot B-OIA Pilot Bore (inch) MM KK B u E K LB N HN YE za o75 l%l 0.250 Ya-24 0.50 o.624 0.86 3.00 0.75 %-B 0.s0 0.45 4.00 088 l%l 0.250 %-28 0.50 o.624 0.93 2.91 0.75 Ve-18

Furthermore, when mounting supply/exhaust block assemblies on both sides of type B with a 2 to 10 station manifold, calculate the weight W using the formula for 11 to 16 stations.

4.5 1.5 2 x Port size S U T (35.5) 42 H OUT IN 2 x M3 x 0.5 depth 5 L K N Symbol Model Port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead

To ensure safety, be sure to observe ISO 4414 Note 1), JIS B 8370 Note 2) and other safety practices. Caution : Operator error could result in injury or equipment damage.