AS

Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 PBT PBT PBT Brass (1) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 PBT PBT (1) KE Brass (2) Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass Brass Brass

VZS

15 Plug-in Type VZS3000 3-7-31 Attachment plug with lead wire Non Plug-in Type VZS2000 3-7-15 Stacking type (Individual connection to each valve) VZS3000 3-7-31 3-7-1 2 Series VZS2000/3000 Precautions Be sure to read before handling.

Proposals for Energy Saving

7 !9!8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

7.5

SOL.a 20 Station 1 SOL.b 18 20 19 SOL.a 16 Station 2 SOL.b 14 18 17 SOL.a 12 Station 3 SOL.b 16 15 10 SOL.a 8 Station 4 14 13 SOL.b 6 SOL.a 19 12 11 Station 5 SOL.b 17 SOL.a 15 10 9 Station 6 SOL.b 13 8 7 SOL.a 11 Station 7 SOL.b 9 6 5 SOL.a 7 Station 8 SOL.b 5 4 3 3, 4 2 1 24 VDC Triangle mark + 1, 2 Note 1) This circuits are for the specifications with up to 8 stations of 2 position double

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.

HRX-OM-X037

. 7-1 7.2 Operation of this product when an alarm occurs . 7-1 7.3 Troubleshooting . 7-2 7.3.1 Alarm contents, causes, and troubleshooting . 7-2 7.4 Other Errors . 7-5 HRL Series HRX-OM-X037 Contents Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check

HRX-OM-W038

Instructions for Use . 1-5 1.5.2 Personal Protective Equipment . 1-6 1.6 Emergency Measures. 1-7 1.7 Waste disposal . 1-8 1.7.1 Disposal of refrigerant and compressor oil. 1-8 1.7.2 Disposal of product . 1-8 1.8 Material Safety Data Sheet (MSDS) . 1-8 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL CL1 MLGC #1 @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction $6 #2 #7 #3 #4 #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 B A CL CL1 MLGC @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

CM2

, #11 SCM225A, #11, #7 SCM225A, #11, #7, #19 CM2D32SCM232A, #11 SCM232A, #11, #7 SCM232A, #11, #7, #19 CM2D40SCM240A, #11 SCM240A, #11, #7 SCM240A, #11, #7, #19 1.4-44 Series CM2 Front Trunnion (U) CM2U Bore size Stroke S T (mm) B1 N P Bore K MM NA NN E B2 D I A TD F AL TT G TX H TY H1 TZ Z 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 15.5 13 26 5 M20 X 1.5 15 5 M8 X 1.25 24 8 28 18 8

HRX-OM-X071

pump . 6-2 6.4 Option YWith feet / Without rack mounting brackets . 6-3 6.4.1 Option YWith feet / Without rack mounting brackets . 6-3 6.4.2 Anti-quake bracket (Optional Accessories) . 6-4 6.5 Option Z . 6-5 6.5.1 Option Z. 6-5 6.5.2 Option Z1. 6-5 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1

5 Port Solenoid Valve Series VQZ1000/2000/3000

6 one-touch fitting R2 P R1 3 1 5 n... 7... 6... 5... 4... 3... 2... 1...

Air Slide Table Series MXQ

'(&& '(** '(,* '()2 $ '(1 & * ) 1 $% MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 '('&2 '('*+ '('.. '(&& '(&1 '(*) MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 '(+ MTS '(. '() '(, Caution : % *'' 8( '(* Table (3) Correction Value of Moment Center Position Distance: An (mm) " 3 *#(# .' &'' *'' ,'' .'' +'' A1, A3 # * ) . 1 *' &)(. &1(. *& *+ *-(. ,.(. $ B 8# &.' 7 7 7 7 .1(. 1) &*. 7 7 7 )*(. .. 1) &'

VFS

override Direct manual override G 1/2 electrical entry G 1/2 electrical entry 5-Rc 3/8, 1/2, 3/4 5-Rc 3/8, 1/2, 3/4 ( ): Rc 3/4 ( ): Rc 3/4 3-8-89 90 Series VFS5000 2 position single/double, 3 position closed center/exhaust center/pressure center/double check Non Plug-in 2 position single: VFS5110-E, VFS5110-D 2-7 mounting hole 5-Rc 3/8, 1/2, 3/4 Rc 3/4: 3(R2), Rc 1/2: 5(R1) G 1 2 Applicable

Electric Actuator with Integrated Guide

2 3 4 5 6 7 A B Without switch and switch rail Photo micro sensor 1 pc., Photo micro sensor rail 1 pc.

Compact Manifold Regulator Series ARM5

5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

SYJ3000/5000/7000

Refer to page 1-7-4.)

0.55

VP300-224-1 (M3 x 36) VP500-224-1 (M4 x 46) VP700-224-1 (M5 x 66) Thread type Series For valve mounting 3 5 7 VPA344 VPA544 VPA744 Nil F N T Rc G NPT NPTF Caution Tightening Torque of Mounting Screw Port size Symbol 1 2 VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm 31 Series VPA300/500/700 Air Operated Valve Base Mounted/Single Unit Series VPA300/Base Mounted