Series M Miniature Fittings M3, R(PT) 1/8, M5

32 to 140F (5 to 60C) Ambient and fluid temperature Accepts Many Types of Plastic Tubing 1 8 M3, M5, R(PT) Port size JIS B 0209 Class 2 (Metric coarse thread), JIS B 0203 (Taper pipe thread) Thread Hose nipple and hose elbow accepts nylon, soft nylon, and polyurethane tubing.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

O

Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

O

Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

KT10

P F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

Industrial Filters

ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931

Suction Guard (Produced upon receipt of order) FHG Series

Port size q Seal order no. r Seal order no. t Seal order no.

C95Series

Rod Center Mounting Basic Fool ,r ' flange , trunn~~~ 1 !

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

R.

XLAQ/XLDQ

t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

RZQ

To confirm this distance of an extra travel (overrun) in Graph 3 , Lines q to r can be selected from the following table.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 r Bumper Urethane rubber Piston rod Hard anodized Aluminum alloy !8 t Hard chromium electronplated Wear ring Resin Tube rod Carbon steel tube !

Series VQZ base mount solenoid valves combine convenience with durability and performance in a more traditional mounting style. Series VQZ Body Ported Solenoid Valves combine flexibility with high performance and long life in an inline body style. Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of

LV50-OMQ0002

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

XLDV Series

Barrel Perfluoro R is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez R is a registered trademark of Dupont Dow Elastomers. Chemraz R is a registered trademark of Greene, Tweed & Co. 3.

IP8001 Series

(740) = qo50 Quick opening 50:1 (R=50) Y=(1-R-X)1/0.98 (750) = USEr Users definition11 polygonal line settings The default value at shipping is (700) = (Lin) Linear.

K35-OMW0030

C96A2G-0294Y-R 160 200 C95A6G-471AQ-R CS1-J16-300 300 200 200 C95B0G-472AQ-R C95B0G-0304Y-R 300 250 350 C95B5G-533AQ-R C95B5G-574EQ-R 450 200 C1SC2G-1468V-R CS1-J25-200 350 C1SC2G-1470V-R CS1-J25-530 530 320 Ambient temperature specifications With rod boot of silicone rubber material and without rod boot: -20 oC to 60 oC With rod boot of nylon tarpaulin: -10 oC to 60 oC (No freezing) (7)

Rotary Table: High Precision Type

Basic moment of inertia 2 r m I m : Weight [ kg ] r : Center of gravity of load and distance of rotational axis [ m ] This shows moment of inertia of m (weight) at r distance from the axis of rotation. The calculation for the moment of inertia depends on the shape of the object. Date 2 shows formulae to find moment of inertia of various shapes.