ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

lPSMt

Linearitv Within t 1% Within t 2% Hvsteresis' Within 1% Repeatabilitv Within 0.5% Within 1% Sensitivitv Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (Max.) less than 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFM @ 20 psi 0.7 SCFM @ 70 osi 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi Supply Pressure Variation Effect (Max.)

lPSMt

Linearitv Within t 1% Within t 2% Hvsteresis' Within 1% Repeatabilitv Within 0.5% Within 1% Sensitivitv Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (Max.) less than 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFM @ 20 psi 0.7 SCFM @ 70 osi 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi Supply Pressure Variation Effect (Max.)

FSQ seies

*j::: ""."," O Note: Shaded areas in bold type-Special Order; Unshaded areas-Made to Order Fixed mountins heisht SefteS RSO Max. operaling pressure Ambient and fluid Lubrication Cushion Stroke lenoth tolerance Bolh Non lube Throuqh holet Both ends tapped Avaitabte Rod end configuration Sound bar, non"rolatjng. roller. levr Bore/standard stroke 10, 15. 20 20, 25, 30 oolble act rg Sngeactng

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Process Valve

Port 2(B) Working Principle Port 1(A) VNA01, 11 (N.C.) When the pilot solenoid valve i is not energized (or when air is exhausted from the port 12(P1) of the air operated type), the valve element r linked to the piston t is closed by the return spring u.

Gun Type Ionizer

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

T0604 How to Order T 0604 B 20 Max. operating pressure Max. operating pressure Color Length per roll Nylon tubing 20 20 m 100 m roll (Black, white only) Symbol Color B W R BU Y G Operating temperature (C) Black White Red Blue Yellow Green 100 Tube size Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio.

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

IZ-OMU0031-CN

kV 1 -20+20 kV 2 -0.4+0.4 kV 0.001 kV 0.1 kV 1050 mm 2575 mm DC24 V10( 50 mA () DC15 V(1 M) 1 (26.4 V ) NPN PNP 2 80 mA DC30 V(NPN ) 1 V (80 mA ) () 100 ms.500 ms1 s2 s 15 V( 1 k () (25 ) 1F.S. 420 mA() 600 (DC24 V) 50 () (25 ) 1F.S

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

SRP

40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow

SRP

40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow

Regulator for 2 MPa ARX 20

Dimensions Dimensions 4-R2.5 12 25 41.5 17 34 24 R16.5 Panel nut Gasket 26 11 1.5 24 44 Max. panel thickness 4.5mm 5.4 1.6 54 Install the gasket underneath the panel and bracket (bonnet side).