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Light / Surge Voltage Suppressor Used as 3 Port Valve Plug-in type Non plug-in type (VFR6 00) (VFR6 10) Plug-in type, Non plug-in type (VFR6 00 VFR6 10) Plugging one of the cylinder ports (A or B) enables use as a normally closed (N.C.) or normally open (N.O.) 3 port valve.

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

) (P2) (5) (4) (11) (4) (13) DCAC (7) 14 No.VEX-OMY0001 o. (1) (2) (3) (4) (5) 1 ISO VG 32 (6) (7) (8) (9) (10) (11) (12) () (13) (14) ()() 15 No.VEX-OMY0001 C 2020.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output CC-Link status

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved 1st printing QT printing QT 8100SZ Printed in Japan. D-DN Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Precautions on Selection 3 9 10. Precautions on Design 3 10 11. Mounting Methods 4 11 12. Piping 5 13 13. Operating Environment 6 15 14. Speed Control 15 15. Troubleshooting 7 16 16. How to exchange seals 8 17 17. Construction 21 18. Auto Switch 25 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Link, No Activity (10 Mbps) Specification Str Frunzei 29, Sector 2, Bucharest, Romania Orange LED flashes. Link, Activity (10 Mbps) LINK/ACT2 100 Mbps: Green 10 Mbps: Orange Red LED is ON. IP address has been duplicated. EtherNet/IPTM is not connected.

The connection parts of the unit are firmly joined with seals and injury can result. -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range 1 Input data + System diagnosis 4 byte OFF ON -20 to 60 oC Storage temperature range ON OFF 2 Input data + System diagnosis + Unit diagnosis (Up to 10 units) 6 byte For use in Pollution Degree 3 Environment (UL508) Pollution

(It is recommended to ground with resistance of 100 ohms or less) M12 M12 10 14.9 Operation, Storage: 35 to 85%RH (No condensation) Operating humidity range : Seal cap is provided.

[H_1] Hysteresis of OUT1 10 25 50 100 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 PFMB7501 [P_2] Set value of OUT2 100 250 500 1000 Accessory PFMB7102 0.5 to 0.7 Nm M4 screws (4 pcs.)

If using the product to detect very small flow rates, warm up the product for 10 to 15 minutes first. There will be a drift on the analogue output of approximate 2 to 30% immediately after supply is turn on. Within 10 minutes. Check regulators and flow adjustment valves before introducing the fluid. Pay attention to the response speed.

L/min,L Non-Reverse output Reverse output CFM x 10-2, CFM x 10-1, ft3 x 10-1, gal(US)/min, gal(US) 4 The mode in which the flow is detected and displayed, and the switch function is operating. This is the basic operating mode; and other modes should be selected for setting changes and other function settings.

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 14 Working Principle 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3.

(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) Air operated Solenoid Port VNC02 12 (P1) External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa 0.97MPa ,MPa ,MPa m/s

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

No.IP80-OM00019-B / / * 3-4 5 1. 5 2. 6-7 2-1 IP8000 6 2-2 IP8100 7 3. 8-9 3-1 IP8000 8 3-2 IP8100 9 4. 10-12 5. 13 5-1 13 5-2 13 6. 14 7. 15-17 7-1 16 7-2 17 7-3 17 8. 18 9. 18-20 10. 20-22 11. 23-25 11-1 23 11-2 IP8100 23 11-3 IP8000 24 11-4 24 11-5 25 12. 26 13. 27-33 2 A (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

If a load that exceeds the allowable values is applied to the product, it could lead to equipment malfunction, a hazard to humans, and damage to the machinery and equipment. (10) Place an external stopper in a position away from the rotating shaft.

Decreased power-supply voltage -40- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved