High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L2 L1 K J M N t W H E LQ2P2A 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 14.5 LQ2P2B LQ2P2C 18 6 7 31 19.9 19 16 73 LQ2P5B LQ2P5A LQ2P4B LQ2P4A LQ2P3B LQ2P3A 36 83 20.5 24 6 7 26.2 22 24 42 34.5 95 82 24.5 21 30 9 7 33.1 28 30 49 40 110 93 (E) shows the approximate dimension of the inserted tubing from the end of the nut.

VCL

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50

Compact

Please reter to pages 42 and 45 ot this catalog tor more information and precautions regarding the optional origin home switch. [oln[0cl tlEclrh Acilntfl'$ $eries Ll0 lotv To lilp Sliilr S]o], mo L X P B e"tuuto, "tr"pJAuto gwitch type ' i ' , . E : Origin poinl switch Wilh (Wire length: 0.3m) : l 50mm 100mm 125mm l5Omm !?

3

Option Note ZS-40-A Lead wire and M8 connector Length: 3 m ZS-42-A Bracket Mounting screw for PFMC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket Mounting screw for PFMC7202 (M3 x 5, 2 pcs.) 4 Series PFMC For Flow Switch Precautions, refer to Handling Precautions for SMC Products on SMC website. For Specific Product Precautions, refer to the Operation Manual on SMC website.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

48 42 85.5 91 93.5 91 80 59 93.5 101.5 55.5 50 54 50 94 107 102 107 (16.5) 14.5 (18) (14.5) 21 (17) (17.5) 15.5 (19) (15.5) 22 (18) 100 69.5 104 112 63 57.5 62 57.5 104 121 112 121 (11.5) (10.5) The factors in parentheses are for long stroke and non lubrication style.

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

EX120/121/122

SS5Y3-42-02-C6 1 unit SY3140-5LOZ 2 units o Cable assembly for output entry. EX510-VW10S 1 pc. !0 Output unit . EX510-DYN3 1 unit !1 2 port solenoid valve . VX2120-02-5GS1 1 pc. Two branch connectors are attached to the manifold including the SI unit and two are attached to the input unit and the output unit respectively.

VS7-6

B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42

HAW

Refer to front matters 42 and 43 for Safety Instructions and pages 6 to 8 for Air Preparation Equipment Precautions.

Step Motor Controller

m or less NP 35 17 PULSE R + S/S NG 36 4 LA 18 PULSE R A phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42

Rotary Actuator

E(g7) F(h9) &Q2 Q3 R S T V1 V2 W X Y CRB2B=10-=S CRB2B=10-=SE CRB2B=15-== CRB2B=15-==E CRB2B=20-== CRB2B=20-==E CRB2B=30-== CRB2B=30-==E CRB2B=40-== CRB2B=40-==E M3 0.004 0.016 0 29 15 8 14 3 1 5 9 0.5 9.5 9.5 24 6 M3 14 3.6 30 37 19.8 8.5 14.5 4 9 (6) 0.036 M3 M3 0.004 0.016 0 0.043 34 20 9 18 4 1.5 6 10 0.5 14 10 29 M3 19 7.6 39.5 47 21 11 17 6 5 12 (10) (5) M4 M4 0.004 0.016 0 0.043 42

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 125 DS5125 140 37 97 6.3 24 110 6 7 10 50 20 60 20 13.5 30 30 42

Modular Type Regulators Series AR

Refer to front matters 42 and 43 for Safety Instructions and pages 287 to 291 for F.R.L. Precautions. Selection Mounting and Adjustment Warning Warning 1. Residual pressure disposal (outlet pressure removal) is not possible for the AR20 to AR60 even though the inlet pressure is exhausted.

Modular Type Air Filters Series AF

Refer to front matters 42 and 43 for Safety Instructions and pages 287 to 291 for F.R.L. Precautions. Mounting and Adjustment 1. Replace the element every 2 years or when the pressure drop becomes 0.1 MPa, whichever comes first, to prevent damage to the element.

KA

KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5 15-3-24 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Direct Operated

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 50 42 61 1.5, 2.2, 3 36 41 42 42 18 93 22 76.5 30 19 19.5 27 19.5 40 42.5 58.5 46.5 92 42.5 17.5 50 75.5 40 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 20.5 24 24 90 35 40 22 22 22.5 32 36 22.5 60 43 46 52.5 61.5 52 49.5 95 98 52.5 64 21 57 57 89 21 106.5 47 47 98 25 25.5 68.5 61 64 60.5 52 61 66.5 21 97 21 114.5 21 Series VVX31/32/33 For Air, Oil / Manifold

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 6) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. 26 42 36 52 46 62 56 72 66 82 76 92 86 102 96 112 Note 1) The above dimensions are for ZZQ104-BSB. ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E GK-00. ZQ1 3M-J1 L-F-00. ZQ1 3M-Q1 L-E -00. In case of ZQ1 3M-F -00, the overall length is 87.2.