Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: J (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °F), Bracket: R (Bracket)

Series: 3 (VQZ3000), Composite Symbol: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 03 (Base Mounted w/Sub-plate Rc3/8)

Series: 3 (VQZ3000), Composite Symbol: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 03 (Base Mounted w/Sub-plate Rc3/8)

Series: 3 (VQZ3000), Composite Symbol: 8 (3 Port N.C.), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 03 (Base Mounted w/Sub-plate Rc3/8)

Series: 3 (VQZ3000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 03 (Base Mounted w/Sub-plate Rc3/8)

NARM Series

None (with plug) G1 G2 K40A-MP1.0-N01M K40A-MP1.0-N01M Body size Port size (OUT side) 2500 3000 Symbol Port size 02 03 NPT 1/4 NPT 3/8 Applicable model NARM2500 NARM3000 Number of stations 02 2 stations Piping 10 10 stations Symbol A B Type Common IN IN From end plate Below: OUT port or G port Individual IN NARM3000 Standard Specifications Proof pressure psig (MPa) 220 (1.5) Max. operating

Exhaust Cleaner Series AMC

Max. air flow (l/min(ANR)) Port size Weight (kg) Element model no. Bracket model no. ANR: 20C atmospheric pressure, relative humidity 65% 200 300 , 0.2 AMC-EL3 BE30 1,000 1 4 3 8 1 4 , 3 4 1 2 0.12 AMC-EL2 BE20 0.5 AMC-EL5 BE50 5-10-11

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: F (G), Port Size: 03 (3/8), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: F (G), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket), Calibration Certificate

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: None, Calibration Certificate: A (Calibration

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: J (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °F), Bracket: None, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: Rc, Port Size: 03 (3/8), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)