VT325 Air flow direction: z x, c Block Component Parts Circuit for Indicator Light AC DIN terminal with indicator light DC Neon bulb Coil Coil (DL) No. q w e Note Platinum silver Platinum silver Material Aluminum die-casted Aluminum die-casted Aluminum, NBR Description Body Cover Spool valve Conduit terminal with indicator light (TL) Neon bulb Coil Grommet type Surge voltage suppressor 3.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum (Option) Body ported Base mounted Component Parts Description Body Adapter plate End plate Retainer Spool valve Piston Spring Sub-plate Note Platinum silver Platinum silver Platinum silver No. q w e r t y u i Material Aluminium die-casted Aluminium
Material Aluminum alloy Note q Description Plate Body Platinum silver Platinum silver Aluminum alloy Aluminum alloy w e Cap r Aluminum alloy Spacer Platinum silver Platinum silver t Stainless steel/Aluminum alloy Spool y 2 position: Aluminum alloy 3 position: Brass Sleeve u 2 position: Resin 3 position: Stainless steel Piston i Resin Center sleeve o Brass, NBR Side poppet Replacement Parts
Series: SS5Y3 (SY3000 Manifold), Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢, Version A), SI Unit Common, End Plate: 5 (Negative Common, 7/8" Connector), I/O Unit Stations: 1 Station, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), P, E Port Size: ø8 One-touch Fitting, Mounting
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Block Assembly: G (Port Location U Side, External Pilot), P,E Port Size: ø8 One-touch Fitting, Mounting: D (DIN Rail Mounting w/DIN Rail)
-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.
AL800 AL900 AL800 AL900 12316 12314PA Sight dome Lubrication plug assembly Polycarbonate Aluminum casted Aluminum die-casted Aluminum die-casted Body Housing 12316 12314PA e r Platinum silver painted Platinum silver painted q w 1 4 1 2 1 1 123528A t Damper assembly 123413A-1 123413A-2 ( ) ( ) Needle stud assembly Siphon tube assembly Sight dome seal Siphon nut seal Bowl O-ring Housing O-ring
Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.
Series: SS5Y3 (SY3000 Manifold), Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢, Version A), SI Unit Common, End Plate: 5 (Negative Common, 7/8" Connector), I/O Unit Stations: None, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), P, E Port Size: ø8 One-touch Fitting, Mounting: D
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 5 Stations, Input Block Type, Common Spec: C (Positive Common, M8, 4 Inputs), Valve Stations: 8 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 1 Station, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: U (Port Location U Side, Internal Pilot), A, B Port Size: C8 (ø8 One-touch Fitting)
Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: None, Input Block Type, Common Spec: A (Positive Common, M12, 2 Inputs), Valve Stations: 12 Stations, P,E Port, SUP/EXH Block Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø5/16" One-touch Fitting)
Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)
Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 2 Stations, Input Block Type, Common Spec: B (Positive Common, M12, 4 Inputs), Valve Stations: 10 Stations, P,E Port, SUP/EXH Block Assembly: C (Port Location U Side, Internal Pilot, Built-in Silencer), P, E Port Size: N (ø3/8" One-touch Fitting)
Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
~~===rr-N"~e-_ ~~ =4It PNP, and analog output.