Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 3 Non-rotating Double Power Cylinder Series MGZ Dimensions with Mounting Brackets Transaxial foot type (L) 4-LD through LY LH LT X/2 X X LS + Stroke Y LX ZZ + Stroke LZ (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY LZ 40 50 63 138 148 165 190 210 236 9 11 13 34 40 47 19 22 24 80 96 110 100 120 140 0 1 3 24 32 36 63.5 75.5

Information

4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

4.

VQ4000

specications VQ 1/2 Type of actuation Nil Q CE-compliant 2-position single 3-position closed center Nil Side ported B Bottom ported VQ 4/5 VQ 4/5 (A) 4 (B) 2 (A) 4 (B) 2 1 3 Note) CE-compliant: For DC only.

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

HRX-OM-R028

specification.3-1 3.3 Connected explanation .3-2 Chapter 4 MODBUS communication function. 4-1 4.1 Precautions for communication .4-1 4.1.1 Precautions after wiring and before communication . 4-1 4.1.2 Precautions for communicating . 4-2 4.2 Communication specification.4-2 4.3 Setting and checking.4-3 4.3.1 Setting and checking items. 4-3 4.3.2 Setting and checking . 4-4 4.4 Communication

LZ-OM004xx

M N L S R T L[]ZC[]3[] 45 53 86.5+st 20 32 4 L[]ZC[]5[] 64 76 111.5+st 30 49 4 Model no. D E F G H J L[]ZC[]5[] 38 58 22 27.5 L[][]ZC[]3[] 24 38 14 17 Model Model no. A B C D 41 Directly mounts onto the rod cover Tightening torque of accessories (foot) Fix with 4 holes "D" as shown below. Fix with 4 holes "H" as shown below. 42 Foot m ounting 4.

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

0.4 J 0.65 J 1.2 J CM3 Rubber bumper Female thread 0.11 J 0.18 J 0.29 J 0.52 J Allowable kinetic energy CG1 Male thread 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion (Effective cushion Female thread 0.11 J 0.18 J 0.29 J 0.52 J Refer to pages 262 to 266 for cylinders with auto switches length (mm)) CG3 *Operatethecylinderwithintheallowablekineticenergy.

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

384) Cable for M12 connector V100 200 1 4 Specification 1 2 For DC For AC Cable length (L) 4 8 9 1000 [mm] 3000 [mm] 5000 [mm] 1 2 4 3 VNA VNB SGC VNC VNH VND VCC 379

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications

LA-OMP0023

Specifications . 8 3. 1 Card Motor . 8 3. 2 Card Motor Return to Origin . 15 3. 3 Card Motor Controller . 16 3. 4 Actuator cable . 18 3. 5 I/O cable . 19 4. Card Motor / Specific Product Precautions . 20 4. 1 Design / Selection . 20 4. 2 Handling Precautions . 22 4. 3 Mounting . 24 4. 4 Operating environment . 26 4. 5 Maintenance . 27 5. Common Precautions for wiring and cables . 28 6.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

LEY25: 200 mm or less LEY32: 100 mm or less 3 Rod ange is not available for the LEY25/32 with stroke 50 mm or less and motor option With lock. 4 Head ange is not available for the LEY32. Nil Ends tapped/ Body bottom tapped 2 L Foot F Rod ange 2 3 G Head ange 2 4 Applicable Stroke Table : Standard For auto switches, refer to page 507.

Exhaust Cleaner Series AMC

B' B C Drain cock Drain guide R, NPT, G Operating Pressure: 0.5 (MPa) Operating pressure: 0.5 (MPa) Mounting bracket Port size Model E M3 x 0.5 Depth 8 Drain piping D C B A F G H J K B' 3 8 AMC310 75 140.5 138.5 150.5 24 50 15 55 2.3 141.5 AMC510 M4 x 0.7 Depth 8 102 193.5 196.5 203.5 40 70 20 70 3.2 199.5 3 4 Air consumption (l/min (ANR)) AMC610 M4 x 0.5 Depth 10 118 219.5 224.5 229.5