LEJ-OM004xx

( AN R ) 1,000 1,000 ISOclass4 ISOclass4 100 100 30/mi n( AN R ) 10 10 70/mi n( AN R ) 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particl diameter[m] Particl diameter[m] 4 - 11-LEJS63* Speed 600mm/sec Speed 1200mm/sec 100,000,000 100,000,000 ISOclass7 10,000,000 10,000,000 ISOclass8 ISOclass8 ISOclass6 1,000,000 1,000,000 ISOclass7 0/mi n(ANR) Particl concentration[Particls/m3

DOC1023126

Refer to the table below Bolt pull Model Belt Pull tension Model Bolt size Tightening [N] Part number torque [Nm] EQY25 LE-D-1-3 19.6 EQY25 M3 0.6310% EQY32 LE-D-19-4 49.0 EQY32 M4 1.510% "Pulley plate" is installed.

CYP_EN

Inner cover fixing screw tightening torque[Nm] Model Screw size Tightening torque CYP15 M3 x 0.5 0.3 CYP32 M6 x 1 2.45 Sine suction mechanism is installed as a standard specification. However, cushion effect adjustment is not available. 9/11 8. Maintenance (1) Do not disassemble the cylinder tube, linear guide, slide table and other components.

Vacuum regulator

Pressure when compression force o f set spring balances with SET. Pressure.

HRX-OM-R039

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Heat Differential temp. of 3 oC Differential temp. of 6 oC Radiated Model between inside and between inside and kW outside of installation area outside of installation area HRSE012-AApprox. 2 40 20 HRSE018-AApprox. 4 70 40 HRSE024-A-20/23 Approx. 5 90 50 3.2 Installation HRSE Series 3-4 HRX-OM-R039 Chapter

MHT2

Note 50 63 32 40 Bore size (mm) Action Double acting Reed switch D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W Solid state switch D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F78AVL D-F79F Fluid Air 0.1 to 0.6 MPa Operating pressure Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut. 5 to 60C Ambient and fluid temperature 32, 40 50, 63 BQ-2 Lubrication Not required 3 to

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

1 Stainless steel M4 x 0.7 x 8 Cross-recessed head cap screw Cross-recessed head cap screw Steel wire M4 x 0.7 x 8 M3 x 0.5 x 6 !0 !2 NBR 14284 O-ring 143021 !1 15-9-41 3 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

MHT2

Note 50 63 32 40 Bore size (mm) Action Double acting Reed switch D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W Solid state switch D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F78AVL D-F79F Fluid Air 0.1 to 0.6 MPa Operating pressure Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut. 5 to 60C Ambient and fluid temperature 32, 40 50, 63 BQ-2 Lubrication Not required 3 to

Hand Valve Series VH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Side Side Bottom Bottom Thread type Nil N F Note) Only side piping is available for VH200 and VH600 and R port is located on the bottom.

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, FLOW CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, DD, AS***F 1/4INCHSTANDARD (NPT), .09625 lb

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95