Exhaust Cleaner for Clean Rooms AMP Series

10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

IDX-OM-W022

Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification for Option R 11 1 Safety instructions .11 1 11 2 Specifications .11 1 11 3 Power supply connection procedure .11 2 11 4 Cautions for handling the GFCI .11 3 11 5 Electric circuit .11 3 Chapter 12 Specification

Solenoid Valve

Note)With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF. Double solenoid type SQ1000/2000 3 position type SQ1000/2000 4 position dual 3 port type SQ1000/2000 Note) With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF.

Fieldbus system PROFINET compatible SI Unit

Parts and description Fig. 10-1 Allocation of parts on the EX245-EA2-1 Fig. 10-2 Allocation of parts on the EX245-EA2-2 70 No.EX-OMW0011-B Fig. 10-3 Allocation of parts on the EX245-EA2-3 Fig. 10-4 Allocation of parts on the EX245-EA2-4 71 No.EX-OMW0011-B Fig. 10-5 Allocation of parts on the EX245-EA2-5 72 No.EX-OMW0011-B 10.2.

ZL3-OM00601

1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product. 9 Doc.

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

12 16 Piston area (mm2) 0.2 6 10 16 23 40 MTS 0.7 20 35 55 79 141 0.6 17 30 47 68 121 0.5 14 25 40 57 101 0.4 11 20 32 45 80 0.3 8 15 24 34 60 28 50 79 113 201 With Shock Absorber Mass Standard Stroke (g) (mm) Body mass 80 105 100 160 130 210 210 320 640 830 Standard stroke 5, 10 10, 20 10, 20 15, 25 20, 30 Model MXP6 MXP8 MXP10 MXP12 MXP16 Model MXP6-5 MXP6-10 MXP8-10 MXP8-20 MXP10-10 MXP10

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Parallel Type Air Gripper Series MHZ

A wide variety of types and broad size variations With dust cover Compact series (without auto switch) 10 to 25 New New 6 New New 6 Standard type New New Long stroke 10 to 25 New New New New 6 32, 40 10 to 25 II Parallel Type Air Gripper Series MHZA2-6/MHZAJ2-6 Compact Series (Without Auto Switch) How to Order MHZA 2 6 D MHZAJ 2 6 D Dust cover type With dust cover Nil F S Chloroprene rubber

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F 63, 80, 100 Panel Specifications Air Fluid Panel nut 1.5 MPa Proof pressure 1 MPa Hexagon nut Max. operating pressure 0.1 MPa Min. operating pressure 5 to 60C (No freezing) (1) Ambient and fluid temperature 10 turns (8 turns) Number of needle rotations (2) Nylon, Soft nylon, Polyurethane Applicable tubing material Note 1) In the case of AS1001F

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F 63, 80, 100 Panel Specifications Air Fluid Panel nut 1.5 MPa Proof pressure 1 MPa Hexagon nut Max. operating pressure 0.1 MPa Min. operating pressure 5 to 60C (No freezing) (1) Ambient and fluid temperature 10 turns (8 turns) Number of needle rotations (2) Nylon, Soft nylon, Polyurethane Applicable tubing material Note 1) In the case of AS1001F

Air Gripper Unit for Collaborative Robots

Auto switch Auto Switch Specifications D-M9N-5(With indicator light) Auto switch model D-M9N-5 Electrical entry direction In-line Wiring 3-wire Output NPN type Applicable load IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less

RLQ

RLQ Symbol Standard Stroke MLU W MLGP Bore size (mm) Standard stroke (mm) 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 32, 40 50, 63 ML1C Manufacture of Intermediate Stroke W Retraction locking Without bypass pipe Extension locking Without bypass pipe Method Ordering Description Exclusive body Please refer to How to Order for standard part no. (page 844).

Digital Flow Switch (Integrated display type)

Flow rate at normal condition 0.927 = Flow rate of standard condition -40No.PF-OMG0010-H Dimensions (in mm) PF2A703H/706H/712H Model A B C D E F G PF2A703H 55 mm 160 mm 40 mm 92 mm 67 mm 55 mm Rc1, NPT1, G1 PF2A706H 65 mm 180 mm 45 mm 104 mm 79 mm 65 mm Rc11/2, NPT11/2, G11/2 PF2A712H 75 mm 220 mm 55 mm 114 mm 89 mm 75 mm Rc2, NPT2, G2 Model H I J PF2A703H 36 mm M5 x 0.8 8 mm PF2A706H 46

Air Gripper Unit for Collaborative Robots

Auto switch Auto Switch Specifications D-M9-5(With indicator light) Auto switch model D-M9P-5 Wiring 3-wire Output PNP type Applicable load IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) Current leakage 100 A

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

D-X 19 MXH Series Specifications Bore size (mm) 6 10 16 20 Fluid Air Action Double acting Piping port size M5 x 0.8 Minimum operating pressure 0.15 MPa 0.05 MPa 0.06 MPa Maximum operating pressure 0.7 MPa Proof pressure 1.05 MPa Without auto switch: 10 to 70C With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature Piston speed 50 to 500 mm/s Allowable kinetic energy (J) 0.0125

AMP

10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

Two Hand Control Valve

VR VR51 VR51 Supply pressure and piping length at the outlet side VHK 50 Outlet piping length (m) VH 40 VHS 30 20 VHS 10 0 0 0.2 0.4 0.6 0.8 1 Supply pressure (MPa) When the piping length is long and capacity is large due to a branch, install a speed controller (AS2051F-06, AS3001F-06, etc.) close to the A port of the VR51 in accordance with the below figure.

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Drain Cock, Semi-Standard, Body Size 30, 40, 50 & 60: Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Nylon Bowl, Semi-Standard, Body Size 30, 40, 50 & 60: Standard