High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.0 VX3 2.5 VXA Pressure (MPa) 2.0 VN 1.5 LVC LVA 1.0 LVH 0.5 LVD 0 20 40 60 80 100 120 140 LVQ Temperature (C) 1/8", 3/16", 1/4", 4, 6 tubing 3/8", 10 tubing 1/2", 12 tubing 3/4", 19, 1", 25 tubing LQ LVN TI/ TIL PA PAX PB 17-5-99 4 Series LQ1 Dimensions

VND

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Main port VXA VN Main port Rc Pilot port Rc A LVC B C D E F G H J Model 1 8 1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size

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Manifolds 1 Fluororesin Fittings & Tubing LQ1 Series Pressure and Heat Resistance 4.0 3.5 LQ2 Series 3.0 (PAT.) 2.5 Higher safety standard is achieved by the use of an integrated seal design. 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 1/8", 3/16", 1/4", 4, 6 tubing 1/2", 12 tubing 3/8", 10 tubing 3/4",19,1",25 tubing Pressure and Heat Resistance New PFA New PFA 4.0 material material 3.5 3.0

VQ4000

SX VK VZ Space saving 40% less VF Capacity saving 50% less (In house comparison) VFR VP7 VP4 VQ Various centralized wiring options Compact design with High speed & Long life VQ4 VQZ Large flow capacity F T kit (D-sub connector) kit (Terminal box) (Suitable for cylinders up to 140) VQD (Metal seal, with light and surge suppressor) VZS Built-in One-touch fitting for easier piping

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch P = 16 Common SUP. port 2-M5 x 0.8 Individual SUP. port Common pilot EXH. port VAC port Silencer dedicated for manifold VAC. port electrical entry (In the case of side entry/With plug at the bottom) Rc 1/8 Hexagon socket head cap plug (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 8 140

ZMA

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31

CDQ2BP series

Nomihal diameleri 3mm 41-140.F (5-60.C) Non-lube Not available Male thfead (srd.)

-fl Seies

POTiS J inch(mm) n: stations L t 4 5 7 I 'to Equation L1=1.lOxn+1.85 (L r= 28 x n +47) Lr:1.1Oxn+2,2O (L,:28 x n +56) Lr (75) 4.06 (r03) 5.16 (131) 6,26 fl59) 7.36 (187) 8.46 (2|5) 9.57 \243) 10.67 (271) 11.77 (299) 12.87 (327) Lr 3.31 (84) 4.41 (112) (140) 6.61 (r68) 7.72 (196) s.a2 \224) 9.92 (252) 1t.02 (280) 12.13 (308) 13.23 (336) Series NVFRz000:Base Mounted Tlzpe Manifold Ptug-in Type

FSQ seies

ADrrioni r6Dprarur 5+140.F 110-6O.C) .

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 250 (2 1/2"), Stroke: 250 (2 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 4.41 LPM , 4.41 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 7.4 in HgV / -250 mbar , 7.4 in HgV / -250 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 3.07 in / 78 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 3.07

Speed Controller: Standard Type In-line Type AS Series

0.94 340 1/8 90 0.7 250 0.94 340 1/4 115 2.3 810 2.3 810 1/4 130 2.3 810 2.3 810 3/8 124 0.2 4.6 1,670 4.6 1,670 1/4 221 0.35 4.6 1,670 4.6 1,670 3/8 214 4.6 1,670 4.6 1,670 1/2 205 7.9 2,840 7.9 2,840 1/4 242 11.9 4,270 11.9 4,270 3/8 233 11.9 4,270 11.9 4,270 1/2 224 Note) Flow rate values are measured at 0.5 Mpa and 20C.

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Round Type Hydraulic Cylinder

mm 250 to 800 mm +1.4 0 CHS Stroke length tolerance CH2 Basic type, Axial foot type Head flange type, Rod flange type Single clevis type Mounting type CHA Note) Refer to page 214 for definitions of terms related to pressure.

CJ2X/CUX/CQSX/CQ2X/CM2X

to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature REC Cushion Rubber bumper CX Piping 20 to 32: Rc 1/8, 40: Rc 1/4 Screw-in type Standard Stroke Lubrication Not required (Non-lube) CY Thread tolerance JIS Class 2 +1.4 0 Stroke length tolerance Bore size (mm) Standard stroke (mm) Note) MQQ M Piston Speed 20 RHC 25 25, 50, 75, 100, 125, 150 200, 250

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Model Gripping force per finger Gripping force Note 1) Open/ Close stroke (Both sides) mm Bore size mm 10 16 20 25 Note 2) Weight g Model External Internal 60 125 250 455 4 6 10 14 17 40 66 104 9.8 30 42 65 11-MHZ2-10D 11-MHZ2-16D 11-MHZ2-20D 11-MHZ2-25D In-line electrical entry Lead wire type Explanatory drawing L Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 132 132 132 142 160 193 250

XM, XY

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature types (Models/XMH, XYH; Temperature specifications/H0) 1. When a valve is to be heated, only the body section should be heated, excluding the bonnet (handle) section.