Dedicated Controller Series LC1 Uniaxial Type

Controller Series LC1 Dimensions LC1-1BH LC1-1BS LC1-1BM CN5 motor power line (Molex 6P) TB1 power supply terminal CN2 general-purpose input/output (Halfpitch 20P) CN4 encoder signal line (Halfpitch 20P) CN1 control terminal (Halfpitch 26P) Indicator light 23 35.5 29 42.5 SMC LINIAR ACTUATOR CONSTRUCTION SYSTEM 90 120 CONTROLLER 17 38 Interface cover 80 29 12.5 12.5 CN3 connector (D-sub 9P) 75

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

Single Axis Electric Actuator Series LJ1

LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75

Slide Tables MX Series

Cylinder and Guide Bearing 6 Styles Multiple Mounting and Porting Configurations Bore Sizes from 6mm to 25mm Wide Range of Options Q Q Table of Contents Q Q Q MX Series Features .pages 4-5 Q Safety Instructions . pages 6-22 MXH .pages 9-11 MXS.pages 12-14 MXQ.pages 15-17 MXF .page 18 MXW.page 19 MXP.pages 20-21 Q Q Q Q Q MXH Series.pages 23-39 Q MXS Series.pages 40-75

Series MXP Precision Air Slide Table

4-M50.8 Bottom hole diameter 4.2 A 19 1.5 20 220.05 W 0.50.05 B D Piping port 2-M50.8 33 32 10 J 5 12 9.5 Mounting base side B D Across AA MXP12-25 Without magnet and switch rail 2-M30.5, 3.5 deep 2-M20.4, 3 deep For magnet mounting For rail mounting 8 5.7 3.5 6-M40.7 20 20 4.5 deep L (mm) Model G H J K L M S V W Z MXP12-15 10 40 68 22 24 29 15 59 55 76 MXP12-25 30 60 98 40 42 49 25 89 75

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75

Air Pilot Operated Series NVSA

A B c D E F H J K M N o P o R s 2.95 (75) 2.52 {64) o.75 {t 9) 2.24 157't 0.91 123l 't.06 {271 1.97 {50) 0.83 {211 0.94 124) 0.16 t4) 1.34 (34) (31) 0.55 114l o.12 {3) 0.47 112't 0.73 (18.6) 0.98 125) lrillimeters in Parenthes PARTS LIST NOTES 1 Sp.ing t AXB3& O-Fim f aRp56+!

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

. : l L type plug connector (L) , M type plug connector (M) : : With indicator laght and surge voltage suppressof 6.61 7.24 (168) I (184) NVZ3OOO inch (mm) Type 47 Manifold,/ Side Ported Grommet (G) (H) Example pneumatic circuit diagram L type plug connctor (L) f l : with andicator lisht and surge voltage superesso. t.244) (m) 3.31 3.94 (84) (1oo) 5.47 (13s) 7.36 7.99 (187) (2c) (5s) (75

Process Pump Series PA3000/5000/PAX1000 Series PB1000

122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50 (1.8) 75

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Standard performance conditions Inlet air pressure MPa 0.3 to 0.85 0.3 to 1.0 Inlet air temperature C Note 1) 5 to 55 Ambient temperature C 5 to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75

Digital Flow Switch Series PFA For Air Series PFW For Water

220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Electric Actuators

High rigidity direct acting guide 100 0.03 Ball screw 50 5 100 Features 3 Simplified Selection Flow Chart Series LX Page Standard stroke (mm) and Maximum speed (mm/s) 25 50 75 100 125 150 175 200 Model Standard CE marking Low particulate generation Deflection Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase 216 282 to 200 to 30 5 phase 210 304 294 5 phase 212 to 80 to 100 5 phase 214

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note Description No. 02 C8 C10 SY760-1 Valve Includes 3pcs. of bushing assembly (SY7000-70-1A) U side Ports P, R: With 12 One-touch fitting Includes 3pcs. of bushing assembly (SY7000-70-1A) SY7000-75-1A 2 Supply/Exhaust block assembly Common for U & D sides (bushing assembly: SY7000-70-1A not included) SY7000-56-1A 3 End block assembly SY7000-70-1A 4 Bushing assembly Refer to page 7.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

2 position SZ360--M5 M5 x 0.8 79 3 position 4 position 75 5 Series SZ3000 Manifold Options SUP blocking disk Blanking block assembly SZ3000-55-1A By installing a SUP blocking disk in the pressure supply passage of a manifold valve, it is possible to supply two or more different high and low pressures to one manifold.

Clean Room Regulator/Fluoro Resin Type Series SRF30

52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 2 position SX340 78 3 position 75 83 2 position SX540 89 3 position 36 Series SX3000/5000 SX3000: Flat Cable Type/Plug-in Stations SS5X3-45GUDC4 C6 Note) L1 to L4 dimensions of SS5X345GUStations Uare the same as SS5X3-45GUStations D-. 2 Stations 3 4 5 6 7 8 9 10 135.5 125 102 16.5 148 148 160.5 150

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5 10 89.5 10 12.5 27 38.5 39 23 74.5 1.5 12 ZPT13F10-0-A10 13 Rc(PT)1/8 15 Width across flats 13 89 90 10.5 13 27.5 75