Digital Flow Switch (Integrated display type)

(2) Conversion formula from the flow gauge measurement value to the process data: (PD) = (Pr b) / a Pr: Flow measurement value and pressure set value PD: Flow measurement value (process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 1 L 0.00025 0 2 L 0.0005 0 5 L 0.00125 0 L/min 10 L 0.0025 0 25 L 0.00625

3 Port Air Operated Valve

VPA300/500/700 Series VPA700 Series/Base Mounted/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-103 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-13/8, 1/2 2(A) port 40 16 64 3/8, 1/2

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

Air Catch Sensor Series ISA

(O-ring: 2, Gasket: 1 enclosed) ISA11-0 For NPN output For PNP output ISA15-0 817 Series ISA Dimensions: Centralized Wiring Type (Terminal Block Box Type) Body Manifold With bracket 34 L2 40 34 L1 Deviation level indicator light Terminal block box 75 Deviation level indicator light Terminal block box 90 10 10 40 90 10 10 Rc 1/8 SUP port (94.4) 70 100 DIN rail center (94.4) 70 100 SUP 40 (

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

OMR0032

Outside Inside the controller 10k (a) 1k (a) IN0 to SVON (b) (b) COM Caution Unused input terminals should not be in an unconnected (open) state.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Auto Switch Proper Mounting Position (Detection at Stroke End) Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL B A Bore size (mm) A A B B 40 9 4 0 5 63 19.5 14.5 0 5 100 24.5 19.5 0 5 Dimensions above denote the standard strokes.

I/O Configurator (NFC version)

No.EX-OMV0017-B

VK3000

2 (A) 4 (B) 2 (A) 4 Flow Rate Characteristics/Weight 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R) Flow rate characteristics Operating pressure range (MPa) Weight (g) 4/2 5/3 (A/B R1/R2) Port size 1 4/2 (P A/B) Mounting with VK300 Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet VV061 The VK300 series can be mounted on the same manifold base VV5K3 of VK3000 series.

CEx-OMG0106

Unit 25 MY-A25L 25 MY-S25A MY-S25B 32 MY-A32L 32 MY-S25A MY-S25B 40 MY-A40L 40 MY-S32A MY-S32B 6-2 Controller Output Method None NPN Open Collector P PNP Open Collector 24 6-3 Extension Cable Length of Cable Postscript 05 5m None Extension Cable 10 10m C Extensin Cable + Connector 15 15m 20 20m Connectors Connection Symbol A B C, D E F G Core Wire Color White Yellow Brown, Blue Red Black

Vacuum Unit Ejector / Vacuum Pump System

Refer to Fig.1) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4 sec.)

DOC1001322

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

Electric Actuator Triple Axis P&P Unit

Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering

Coolant Valve

Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage

Digital Flow Switch (Remote type sensor unit)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0010-J Dimensions PF3W504

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

IR1000/2000/3000

x 1.5 NBR O-ring JIS B 2401 P3 JIS B 2401 P4 JIS B 2401 P5 NBR O-ring (1) (1) (1) P36203015 NBR Seal (A) P36203016 NBR Seal (B) KT-IRV1000 KT-IRV2000 KT-IRV3000 Repair kit no.

JXCx-OMT0001CN

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1