I CX>erOtno PrOSSU'B Qcera,tnQ TEMPROl"IQB -1o-ecn: \oltrout rreezno Mn ooerathQ 1l'n8 1.0 ncarcl to i:i-1.0 .i to ll'dM "'1lhn looo rrrce to tre hard 150< I /rn==i: I 1 111 I I 11 :1 I 11 l i -&
Finger option 1: Side tapped mounting 2: Through-holes in open/close direction Nil: Basic Standard type Narrow type Auto switch Nil Without auto switch (Built-in magnet) 3: Flat finger N: Basic N2: Through-holes in open/close direction N1: Side tapped mounting Auto Switch Specifications (Refer to the WEB catalog for further information on auto switches.)
HEP Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 Related 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 Equipment 8.4 10.6 9.3 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q2 N2 ZA1 1 1 Q2 N2 ZA1 1 2 Q2 N2 ZA1 1 4 Q2 N2 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7
1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).
Fluoro rubber Cle6n ieguletd Fluoro rubber & Body size Fluorc resin 'l 10-32 UNF Construclion o-Non relieving (standard) 'l -Relieving {only applicable to Airor N2 gas) NoteiConsull factory ior applications ol othr tluids.
PVQ IN-233-863+G46--01M-SRB G46--01-SRB VY1 VBA VBAT Specifications AP100 M5, Rc 1/8 Connection port size Air, N2, CO2, Ar Fluid 1.5 Proof pressure MPa 1.0 Maximum operating pressure MPa Low pressure type 0.005 to 0.2 Regulating pressure High pressure type 0.01 to 0.4 range MPa Ambient and fluid temperature (C) 0 to 60 Fluid consumption L/min (ANR) Note) 0.5 or less Sensitivity 0.3% of full
Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC q w e r t y u i Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 Combinations (1) to (8) in the above table are the only possible options. 850
Pilot valve symbol 200 AC 110 AC 220 AC 12 DC 100 AC 24 DC q K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y w e Nil r Nil Y t y Nil u Nil i Nil o Nil !0 Nil Combinations q to !
Proof pressure Max. operating pressure Set pressure range Max. pilot pressure Operating fluid Pure water,N2 Ambient and fluid temperature Connection tubing O.D. (I.D.) 10cm3/min or less (Fluid: Water) Valve leakage 3
Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1
purge N2 gas 2 1 Packaging Clean gas filter Class 10,000 Class 10,000 870 Precision Clean Regulator SRP Series ARJ How to Order AR425 to 935 ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.)
1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type (Thermistor) Air N2 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 2 Flow Switch Variations/Basic Performance Table New New PFMV PFM PF2A PFMB PFMC Power supply voltage Rated flow range Setting Repeatability Hysteresis Output Display Fluid Enclosure Series IP40 IP65 IP65 IP40 IP40 Dry air, N2 Air, N2 Air
L1 = 10.5 x n1 + 135.5 + 47 x n2 L2 = 10.5 x n1 + 42 L4 = L3 10.5 L5 = (L3 L1)/2 L6 = 47 x n2 + 82 n1: Valve stations n2: I/O Unit stations L3: DIN Rail Overall Length [mm] Valve I/O stations Unit (n1) stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 185.5 198 210.5 223 223 235.5 248 260.5 273 285.5 285.5 298 310.5 323 335.5 348 348 360.5 373 385.5 398 410.5
(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5
Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).
Types of fluid This product is designed for use with air, N2, CO2 and Ar as fluids. Consult SMC if it will be used with any other fluids. Since this product uses a bleed mechanism and fluid is released from the bleed hole, poisonous or corrosive gases cannot be used. 2. Fluids containing solids cannot be used.
Types of fluid This product is designed for use with air, N2, CO2 and Ar as fluids. Consult SMC if it will be used with any other fluids. Since this product uses a bleed mechanism and fluid is released from the bleed hole, poisonous or corrosive gases cannot be used. 2. Fluids containing solids cannot be used.
Applications $ Flow control of N2 gas to prevent lead frame oxidation $ Accumulated indication shows the operating flow rate or residual amount (of N2 etc.) in a gas cylinder. $ N2 blow prevents distortion of camera image due to air turbulence.
(For AS*2Q) 9 - 7. Construction AS*2R R thread / NPT thread type G thread type Table 5 Components No.
) 0 50 100 150 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.