Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.042 lb

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

CATALOG

25 A I R C U S H I O N E D 32 1, 2, 3, 4, 5, 6, 8, 10, 12 40 40 1, 2, 3, 4, 5, 6, 8, 10, 12 45 50 1, 2, 3, 4, 5, 6, 8, 10, 12 55 63 1, 2, 3, 4, 5, 6, 8, 10, 12 55 Courtesy of Steven Engineering, Inc. !

Table of Contents

B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 6 1/4, 3/8 8 1/4, 3/8 10 1/4, 3/8 10 1/4 Maximum

5 Port Solenoid Valve Series SY3000/5000/7000/9000

10 5 L 5 2 40 Clean series Series Port size Thread type 3 10-SY3000 5 10-SY5000 Nil Rc Port size Without sub-plate Symbol Applicable series Nil G F 7 10-SY7000 9 10-SY9000 1 8 With sub-plate N NPT 01 10-SY3000 NPTF T 1 4 Actuation 02 10-SY5000 10-SY7000 With sub-plate 2 position single 3 8 With sub-plate 10-SY7000 10-SY9000 03 1 1 2 With sub-plate 04 10-SY9000 2 position double Manual override

Electric Actuators

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

A

25 A I R C U S H I O N E D 32 1, 2, 3, 4, 5, 6, 8, 10, 12 40 40 1, 2, 3, 4, 5, 6, 8, 10, 12 45 50 1, 2, 3, 4, 5, 6, 8, 10, 12 55 63 1, 2, 3, 4, 5, 6, 8, 10, 12 55 Courtesy of Steven Engineering, Inc. !

Table of Contents

Burst Pressure Characteristics Curve and Operating Pressure Specifications 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores 10-TFU 10-TFU Model Tubing O.D. (mm) No. of cores 2 cores 4 6 4 8 5 2.5 Tubing I.D.

Table of Contents

17H9 21H9 26H9 12-7-10 10 2 Finger Parallel Style Air Gripper Series MHS2 MHS2-32D, 40D 2-SA, counterbore dia.

Table of Contents

3.4 through 2-6.5 counterbore depth 3.3 2-M4 x 0.7 4-M3 x 0.5 2-M3 x 0.5 thread depth 5 M3 x 0.5 x 10l CXS10 7.5 8 46 17 44 15 2-M4 x 0.7 35 20 4 20 6 33.6 8.5 7 M5 x 0.8 x 5l 30 thread depth 7 thread depth 4.5 2-4.3 through 2-8 counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Applicable solenoid valves: Series 10-SY3 0, 10-SY5 0, 10-SY7 0, 10-SY9 0 2 4 6 2 4 6 2 4 6 2 4 20 40 45 60 3 5 7 9 X90 10 SY Model no. Entry is the same as standard products. Specifications and performance are the same as standard products.

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

smcmaintenancepartslist

G27-10-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only

ZP

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring