Antistatic One-touch Fittings Series KA

M P D L A Part No.

Booster Regulator/Air Tank

VBAT-V1 ITVH m-X104(Stainless Steel)> ITVX Model VBAT05S1-U-X104 VBAT10S1-U-X104 VBAT20S1-T-X104 VBAT38S1-T-X104 Accessory kit VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Drain valve (Order it separately.) VBAT-V1 PVQ VY1 The Accessory Kit is a Set of Nos. q to r. VBA VBAT VBA VBAT VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity No.

MHZ2/MHZJ2

Axial Port (with M5 Port) [M] Auto switch mounting groove (4 locations) (except 10) End boss assembly D2 D1 M5 x 0.8 piping port 5 B E A Auto switch mounting groove (4 locations) (10 only) Refer to the dimension table. When auto switches are used on 10, side mounting with the through holes is not possible.

CLK1

Unclamp side port Rear cushion valve Top width across flats 3 L + Stroke 3-Rc 1/4 GA 4-M6 x 1 Thread depth 12 52 171010 14 N GB W Clamp side port 3 32 45 45 BX M 3 Approx.

Air Cylinder CP Series Cylinder Positioner Assembly

M l a x 1 5 1.22 ( 3 i ) 3.86 (98) 3.39 (86) 0.45 11 5) 0.59 (15) 1105) 2.32 (59) 5 . 1 2 1130) 2.24 (56) 6.73 (171) 2.O5 (52) 11.2) 2.60 (66) 7.05 (179) 5.12 l130) 2.99 (76) 6.30 tr60) 2.80 l71l 4.07 (205) 2.56 (65) 0.49 12 s) 3.15 (80) 8.43 (214) 1.57 (40) 4.69 (1r9) a.o2 (1021 3.O7 (78) 0 9 4 (25) 2.05 (52t 0.55 (14) 0.83 l21l M10r1.75 0 4 3 ( 1 1 ) M22r1.5 i.46 (37) 0 16) 4.O2 (102)

Compact Cylinder

4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5 26 1.5 5 3.5 14 3.5 7 23 8 16 5 to 30 20.5 17 24 20.5 6 6 26 4 25 M3 x 0.5 31 1.5 5 3.5 17 3.5 8

Heavy Duty Stopper Cylinder Series RSH/RS1H

Rc 1/4 M5 x 0.8 For use in Japan Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 For use in U.S.A.

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

Digital Flow Switch

Pin name Wire color 1 DC(+) Brown 2 FUNC White 3 DC() Blue 4 OUT Black * 4-wire type lead wire and M12 connector used for the PF3A series. 13 3-Screen Display Digital Flow Monitor PFG300 Series RoHS PFG300 Function Details PF3A7 H How to Order PFG RT 0 3 0 M L Type 3 Remote type monitor unit Option 4 Operation manual Calibration certificate Nil Y K T Input specification Symbol Description

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

products. 7 3-Screen Display RoHS High-Precision Digital Pressure Switch: For General Fluids ISE70G/75G/76G/77G Series How to Order ISE70G 02 M L2 Pressure range Piping specification Symbol Description ISE70G 0 to 1 MPa ISE75G 0 to 2 MPa ISE76G 0 to 5 MPa ISE77G 0 to 10 MPa Symbol Description 02 Rc1/4 N02 NPT1/4 F02 G1/4*1 Option 3 Symbol Description Nil Operation manual Y None *1 ISO 1179

KN Series Nozzles for Blowing

tube (4, 1 m) Polyurethane 863

RLQ

13 4-11 4-6.6 Spring washer 4 pcs.

PF2D

3 x 7.2 (= 21.6) 8-M3 OUT2 NC Sensor 36 +0.5 0 8 Load 6.4 4 OUT1 Black 7 3 Load 1 2 3 4 Brown + 6 2 +0.5 0 Blue 19.4 5 1 12 to 24 VDC Series PF2D5 5 6 7 8 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit.

RSH

4 !5 !6 !7 !8 !

AR Series Modular Type Regulator

Applicable Model Model AR20-A AR25-A AR30-A AR40-A AR40-06-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 A 30 AR q X406 03 0.4 MPa setting w t e r Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

EX500-GPR1A.eng

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

ISE70/75/75H

(UL508) standards Wetted material Pressure receiving area: Stainless steel SUS630, Fittings: Stainless steel SUS430 Port size 02: Rc1/4, N02: NPT1/4, F02: G1/4 (ISO1179) Note 2) Lead wire Lead wire with M12 4-pin pre-wired connector (5 m) Mass (Weight) 210 g (excluding the lead wire with M12 4-pin pre-wired connector) Note 1) The NPN and PNP outputs function for a single setpoint.

Suction cups with flange

Caution Plate A Hexagon socket button bolt (M6x8) With gasket (M-6G) (Tightening torque 10.1Nm) Plug (M-3P) (4 pcs) Tighten by hand and give it an additional turn approx. 1/4 rotations with a wrench.