Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.1, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power Consumption(W): Inrush

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type,

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type,

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power Consumption

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power Consumption

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-M-01 3 4 5 DIN Terminal (D): 10-SYJ5 43-D-01 3 4 5 M8 connector (WO): 10-SYJ5 43-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 MAX.10 75.4 50.1[57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2[68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 59.3 103.4[107.8] 123[127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17 17 141.2 121.2 143 6 8.5 6 6 6 48.9[51.1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111 DH121 m FVD14-8 DH-112 DH122 YF-1 E-4 YNE-38 n FVD22-8 DH-113 DH123 (Note 1)p R38-8 YPT-60-21 TD-112 TD-124 YF-1 E-4 YET-60-1 q FVD2-6 YNT-1614 Note 1.

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

HRX-OM-S004

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal trip . 6-10 6.4 Other Errors . 6-11 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

Cylinder with Lock

6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

HRX-OM-T002

Option . 6-1 6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 HRS090 Series HRX-OMT002 Contents 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric