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Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

When using the "ITP" command, always place the "SYNC" command immediately before the "ITP" command. 1) Program example 1 Program Description SPN(500) STA(200) STB(300) MOV(600) SPN(100) MOVA(600) Speed (Motor speed) Acceleration time constant Deceleration time constant Absolute move command Speed (Motor speed) Continuous move command 500[r/min] 200[ms] 300[ms] 600[10STMm] 100[r/min] 600[10STMm

Up to 600 Up to 750 Up to 750 With rod boot ZZ Bore (mm) Applicable pin part no.

-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800

screw (M3 x 0.5 x 10l ) Switch spacer Switch mounting nut Data 50 25 to 600 BQ-2 63 25 to 600 Please contact SMC regarding non-standard strokes.

: ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6

Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150 200 300 500 600

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) ZSE ISE ZSP

. -65No.PS-OMX0002-A Unit specification and pressure gauge measurement value (PD) Series Unit Rated pressure range Display/settable range MPa -0.100 to 1.000 -0.105 to 1.050 kPa -100 to 1000 -105 to 1050 kgf/cm2 -1.02 to 10.197 -1.07 to 10.71 ISE20C bar -1.00 to 10.00 -1.05 to 10.50 psi -14.5 to 145.04 -15.2 to 152.3 Pressure gauge measurement value (PD) 600 to 5000 580 to 5200 MPa 0 to

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13

Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

-0.1010 0.01 to -0.105 kPa 0 to -101.00 10.0 to -105.0 kgf/cm2 0 to -1.0299 0.102 to -1.071 bar 0 to -1.0100 0.100 to -1.050 ZSE20B psi 0 to -14.649 1.45 to -15.23 inchHg 0 to -29.83 3.0 to -31.0 mmHg 0 to -757.6 75 to -788 Pressure gauge measurement value (PD) 1000 to 5040 600 to 5200 MPa -0.1000 to 0.1000 -0.105 to 0.105 kPa -100.00 to 100.00 -105.0 to 105.0 kgf/cm2 -1.0197 to 1.0197 -

] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR012 018-A-10, HRR012 018-W-10 [50 Hz] [60 Hz] 800 800 40C 32C 40C Heating capacity [W] Heating capacity [W] 600 600 32C 400

0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.7 MPa 0.01 0.01 0 0 0 600 400 200 800 1000 0 100 200 500 400 300 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 72 AFM20-D to AFM40-D Series AFD20-D to AFD40-D Series Dimensions AFM20

Inlet pressure: 60 psig (0.41 MPa) 1/2 inch Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21 600

screw (M3 x 0.5 x 10l ) Switch spacer Switch mounting nut Data 50 25 to 600 BQ-2 63 25 to 600 Please contact SMC regarding non-standard strokes.