Related Products AC40* 72.5 75 100.5 Piston B Switching Pressure (Close to Open) AC50* 93 96 131 Model AV5000 AV2000 AV3000 AV4000 AC55* 98 96 131 Outlet pressure psi (MPa) 3/4 Port size 1/4 1 3/8 1/2 75 (0.5) AC60* 98 101 131 Proof pressure 225 psi (1.5 MPa) 60 (0.4) Operating pressure range 30 to 150 psi (0.2 to 1 MPa) A1 A2 A3 45 (0.3) Ambient and fluid temp. 32 to 140F (0 to 60C) 30 (0.2) 113 20 122 37
Vespel is a registered trademark of DuPont. 37 Single Stage Regulator for Ultra High Purity High flow Series AZ1300 For UHP gas delivery Flow capacity to 1000 slpm Body material: 316L SS Inlet pressure: Max. 300 psig (2.1 MPa) How to Order Port Number q w e r AZ13 S FV8 FV8 02 2PW Delivery pressure Code Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to
I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating
Symbol Bore size (mm) A A' B B' D E F GA GB H J MM NN R FC FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 M3 x 0.5 7 3.4 1.6 24 16 32 M10 x 1.0 10 10 12 15 17 5 13 8 6 7 20 7 M4 x 0.7 8 4.5 1.6 28 18 37 M12 x 1.0 15 12 14 20 19 6 15.5 10 6 7 24 9 M5 x 0.8 10 5.5 2.3 36 22 49 M14 x 1.0 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P
4 10 13 10 30 14 3 x Rc3/8 (Piping port) 77.5 3 x Rc3/8 (Piping port) 43 10 27 45 45 Width across flats 100 M24 x 1.5 44 112 30 Max. 65 Max. 65 50 52 Hole: 18 +0.027 0 Width across flats 24 R24 Shaft: 18 0.050 0.093 28 +0.5 +0.1 4 x M6 Thread depth 12 61 129 + Stroke 110 85 259 + Stroke Hole: 18 +0.027 0 2 x M6 Thread depth 6 Shaft: 18 0.050 0.093 Press-fit spring pin 5 x 40 L 38 17 32 37
8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37
8 C B 2 x M10 x 1.5 thread depth 12 (Mounting thread) D 28 76 7 4 x M10 x 1.5 thread depth 20 (Mounting thread) When closed E When closed J +0.030 6H9 0 depth 8 +0.062 40H9 0 depth 2.5 K cross view (Closed) Rc,G,NPT 1/8 (Finger closing port) 2 x M5 x 0.8 Vacuum port Rc,G,NPT 1/8 (Finger opening port) Auto switch mounting groove (4 locations) 98 H 11 2 x M10 x 1.5 (Rack thread) 40.2 16 1 37
AG AH AJ AK Model 1122+0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.030 0 +0.030 0 MHZ2-10D 12.4H9 M2.5 x 0.45 12 19.5 28.2 5.5 M3 x 0.5 6 M3 x 0.5 5.5 2.6 2H9 3 1.5 M3 x 0.5 6 112211221122MHZ2-16D 17.4H9 10.8 19 M3 x 0.5 29.5 6.5 M4 x 0.7 4.5 M4 x 0.7 8 3.4 3H9 3 1.5 M4 x 0.7 8 MHZ2-20D 22.4H9 12 23 M4 x 0.7 39.8 8.3 M5 x 0.8 8 M5 x 0.8 10 4.3 4H9 4 2 M5 x 0.8 10 MHZ2-25D 13 37
Standard port Relief port (mm) H G FZ FT E 2 x 7 Mounting hole F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 40 32 25 20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37
Bracket CW CT CL CX CD M CZ R mounting pivot bracket (Accessory) Without auto switch With auto switch 15.5 20 25.5 28 15.5 20 25.5 28 4.5 4.5 6.6 6.6 4.5 4.5 6.6 6.6 M4 x 10 L M4 x 10 L M6 x 12 L M4 x 10 L M4 x 10 L M4 x 10 L M6 x 12 L M 6 x 12 L 5 6.5 8 10 5 6.5 8 10 5 to 30 5 to 30 5 to 50 5 to 50 5 to 30 5 to 30 5 to 50 5 to 50 14 15 18 20 14 15 18 20 5 5 8 19 21 27 30 19 21 27 30 34.5 37
switch For 20, 30, and 40 R80 Grommet IC circuit 48 V, 100 V 24 V,48 V, 100 V 2-wire No Relay, R80C Connector Heavy-duty cord 24 V PLC Grommet T79 Solid state switch Connector T79C Yes S79 3-wire (NPN) IC circuit Grommet 5 V,12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m 3 m 5 m None Nil L Z N (Example) R73C (Example) R73CL (Example) R73CZ (Example) R73CN 11-3-2 37
with magnet 0.07 (Wilh builtin magnet and aul0 switch) For the specifications 01 cylinders with auto switch, please refer to pages 21 to 24. 0.07 0.08 Addilional weight per tOO mm 01 stroke 2.18 2.30 3.11 Minimum stroke for aula switch mounting Auto SWitch proper mounting position (detection al stroke end) and its mounting Single knuckle 0.91 1.16 1.56 Acx:essory Oouble knuck,ie jOint , 37
Stainless steel Aluminum alloy Carbon steel Stainless steel Rolled steel plate Rolled steel plate Aluminum alloy Rolled steel plate Urethane rubber Aluminum alloy Special resin Special resin Special resin Aluminum alloy Carbon steel Type C retaining ring for hole Phosphate coated (15) (10, 25) Type C retaining ring for axis 29 Chromate (Only for 25) Retaining ring 30 31 32 33 34 35 36 37
Plate B Aluminum alloy Auto switch 4 32 Cylinder tube Stainless steel Magnet for auto switch 5 33 6, 10, 15 only Hard chrome plated Guide shaft A Carbon steel Steel ball 6 34 6 only Hard chrome plated Guide shaft B Carbon steel Side cover Carbon steel Aluminum alloy Note 1) 7 35 15 or larger Chromated Piston Grease cup Carbon steel 8 36 Shaft Stainless steel Wear ring A Special resin 9 37
.: 3.5 to 7 83.9 77.6 Max.10 76.4 Pg7 Manual override (Non-locking) 13 14 13.5 37 (Pitch) 4 x Rc1/8 2 x 4.5 (Mounting hole) 4 x Rc1/8 (P,R port) (P,R port) (Lead wire length) ~ = 300 2n x Rc1/8 (A,B port) (Pitch) Solenoid is at the same side as A port: VV5K3-S42Station Built-in One-touch fitting: VV5K3-42Station -C6 (Pitch) Manual override (Non-locking) 2 x 4.5 (Mounting hole) (Pitch) (Lead
(P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120 140 77 96 113 53 60 74 26.5 30 37
10 (P2) Port size: refer to table below G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) Manual override (Non-locking push type) P2 P1 F E D B A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37
External pilot solenoid) Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P2 P1 E D 32 A K B C Main port 1(A) [Back side 2(B)] Port size: refer to table below Main port 1, 2 Pilot port 12(P1), 10(P2) A B K C D E F H J Note) Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 211.5 (213.5) 229 (231) 252 (254) 77 96 113 55 63 74 53 60 74 26.5 30 37
VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator (Option) Pilot port 12(P1), 10(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32A VND60D-40A VND70D-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37
301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37