High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Option Suck Back With flow rate adjustment With bypass With flow rate adjustment & bypass P .497 Variations [Integral fittings] P .495 Applicable tubing size Metric size Inch size Flow characteristics Av x 10 -6m 2 (Cv) Series Orifice diameter 3 4 6 8 10 12 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 2.1 (0.09) 8.4 (0.35) 2 LVD10 4 LVD20 31.2 (1.3) 45.6 (1.9) 120 (5) 8 LVD30 10 LVD40 16 LVD50 P .502

CG1

Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

2-Color Display

P Reduced setting efforts P Reduced chance of set-value input error Cop Copy Copy Master Unit 1 Slave Unit 2 Unit 10 3-step setting -step setting 3-step setting 1 2 3 Push Push Push Push Push Push Adjust to set-value with buttons. Finish setting Added vacuum range. P Rated pressure range: 0.0 to 101.0 kPa 0 101 kPa Expanded pressure range for positive-pressure type to the vacuum range.

Round Type Hydraulic Cylinder

3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

Air Cylinder CLA Series Fine Lock Model

p ClAseies Air Cylinder Fine Lock Model High Intermediate Stopping Accuracy , 3 Types of Locking Mechanisms r Locks in Either Extended or Retracted ', 5 Bore Sizes Available Auto Switch CaPable Direction 4-5 I Product Features . .6 I Ho* To order lf, .7 I Standard Specifications 8-9 ! locf Specifications. ..'

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

AC Servo Motor Driver (MECHATROLINK-III type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 5mA Servo ON 1Ry 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS 16 N-OT

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

End Lock Cylinder Series CBG1

The minimum stroke with rod boot is 20mm. 5 Series CBG1 Air Cushion Type: CBG1BA With rear lock: CBG1BA Bore size Stroke H With front lock: CBG1BA Bore size Stroke R WA WB 2-P W 10 Max.

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.

76

Air dryer model IDF100FS-30-R IDF125FS-30-R IDF150FS-30-R Breaker capacity 20 A 30 A Sensitivity current: 30 mA Corrosion is not covered under warranty. Option symbol V With a timer controlled solenoid valve type auto drain Option symbol Float type heavy duty auto drain is changed to the solenoid valve type auto drain.

Compact Guide Cylinder

D-M9 D-A9 Ports Ports Compact Guide Cylinder Variations Series Bearing Bore size [mm] Cushion Piping Standard stroke [mm] 12 16 20 25 32 40 50 Basic type MGPK Slide bearing 12, 16: 10 to 150 20, 25: 20 to 200 32 to 50: 25 to 200 Ball bushing Rubber Top/Side ported Top ported (12 and 16 only) CONTENTS How to Order p. 3 Dimensions p. 8 Specifications p. 4 Model Selection p. 10 Weight

Escapements Series MIW/MIS

Operation conditions Operation conditions Point of application L Operating pressure P (MPa) Operating pressure P (MPa) Work piece mass m (Kg) Work piece mass m (Kg) Work piece quantity x (Qty.) Work piece quantity x (Qty.)

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

-100-HN P Basic weight 0.74 P Additional weight 0.11/50 stroke P Cylinder stroke 100 stroke P Locking weight 0.08 (Locking at head end, manual release non-locking style) 0.74+0.11X100/50+0.08=1.04kg All mounting bracket 0.11 0.16 0.26 0.27 0.42 0.56 Additional weight per 50 stroke Single knuckle 0.15 0.23 0.26 0.26 0.60 0.83 Accessories Double knuckle (with pin) 0.22 0.37 0.43 0.43 0.87

IC

CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

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Air operated style fluid control valve Vacuum valve Vacuum pad 2(A) 1(P) 2(A) 1(P) 2(A) 1(P) 2(A) 3(P) 3(R) 3(R) 3(R) 1(R) Atmospheric air or micro pressure for vacuum release 22 Multi-purpose Valve Series VCA Direct Operated 2 Port Solenoid Valve for Air Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity