C95

20 25 30 G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244

CNA

86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25 14 30 M14 x 1.5 27 1/4 37 to 39.5 51 10 153 37.5 16 9 8 234 244

MB1

Dimensions GC GC S + (2 x Stroke) Stroke B Stroke A ZZ + (2 x Stroke) ZZ + Stroke (A + B) S + Stroke (A + B) ZZ 262 320 320 S 200 244 244 GC 43 52 52 ZZ 231 235 262 S 180 180 200 Bore size (mm) 32 40 50 GC 36 38 41 Bore size (mm) 63 80 100 Bore size (mm) 32 40 50 63 80 100 GC 36 38 41 43 52 52 S 178 178 198 198 242 242 ZZ 272 280 314 314 386 386 NPT ports XC18 15 Dual stroke cylinder/single

Cylinder with Lock

115 1/4 1/4 64 20 40 10 102 17 65 20 18 12 15 58 11 M10 x 1.25 7 Up to 1400 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 79.5 20 23 18 17 71 13 M12 x 1.75 10 Up to 1500 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 93.5 22 25 20 19 72 16 M12 x 1.75 10 (mm) Bore size (mm) 40 50 63 80 100 KA LD LH LS LT LX LY MM N P RT RY S T V X Y Z ZZ 14 40 207 3.2 42 70 M14 x 1.5 27 1/4 153 37.5 9 27 13 24 244

Compact Manifold Regulator Series ARM5

B C D E F G H I J K L M N O P Symbol Model A IC ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 PVQ 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 VEF VEP Manifold stations Dimensions by the Number of Stations 10 Model Symbol VER 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VEA ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252

IDX-OM-W037

Reference data Units: mm IDH6 Jumper cord 7 6 5 4 3 1 PE Remote start/stop Fault-signal (N.O: Close at "Fault") Fault-signal (N.C: Open at "Fault") 1042 31 N 2 L Operation-signal (N.O) Ground Terminal screw: M3 Suitable wire: 1.25mm or more 2 244 Power supply Connector width: 6.5mm or less Detail of wiring 35 184 172 392 (Note) 15 80 223 321 3001 485 The type without built-in filter does

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 x Stroke h f Bore size [mm] Stroke range [mm] A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY E R L2 L9 H SL 32 Up to 1000 22 30 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 26 190 47 32.5 15 4 48 8 40 Up to 1000 24 35 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 5 8.9 30 213 54 38 17 4 54 8 50 Up to 1000 32 40 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 37 244

Cylinder with Lock Series MNB

102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244

MXW Series Long Stroke Slide Table

32.5 Z A N-M6 x 1 thread depth 12 (N-1) x H G Bottom through hole 5.1 GG HH H 7 depth 5.5 6H9 +0.03 NN-M6 x 1 thread depth 12 0 Bottom through hole 5.1 F E 6H9 +0.03depth 5.5 0 HH H Model E F G GG J K L N NN Z 48 MXW20-150 113 216 101 29 169 41 66 6 1 412 52 MXW20-175 140 237 128.5 50.5 194 66 91 6 1 462 48 MXW20-200 164 264 152 56 219 91 116 7 1 512 52 MXW20-225 189 288 177.5 73.5 244

5 Port Solenoid Valve Series VQZ1000/2000/3000

the same as Grommet (G). [ ]: AC Formula: L5 = 16n + 10 L3 = 16n + 20 n: Stations (Max. 20 stations) Dimensions L n 2 3 98 87.5 68 15 58 4 123 112.5 84 19.5 74 5 135.5 125 100 18 90 6 148 137.5 116 16 106 7 173 162.5 132 20.5 122 8 185.5 175 148 19 138 9 198 187.5 164 17 154 10 210.5 200 180 15.5 170 11 235.5 225 196 20 186 12 248 237.5 212 18 202 13 260.5 250 228 16.5 218 14 285.5 275 244

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 132 182 232 282 With shock absorber ZZ 176 226 276 326 Z S SS Model F G L P Q R CX2N10-25 CX2N10-50 CX2N10-75 CX2N10-100 94 144 194 244 9.5 20 25 25 19.5 30 35 35 38 63 88 113 48 52 67 92 103 153 203 253 28 32 47 72 27 52 77 102 67 92 117 142 Housing mounting style with auto switch CDBX2N10 Stroke Stroke Plate mounting style with auto switch CDPX2N10 Magnet

C95

20 25 30 G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 132 182 232 282 With shock absorber ZZ 176 226 276 326 Z S SS Model F G L P Q R CX2N10-25 CX2N10-50 CX2N10-75 CX2N10-100 94 144 194 244 9.5 20 25 25 19.5 30 35 35 38 63 88 113 48 52 67 92 103 153 203 253 28 32 47 72 27 52 77 102 67 92 117 142 Housing mounting style with auto switch CDBX2N10 Stroke Stroke Plate mounting style with auto switch CDPX2N10 Magnet

High Vacuum Angle Valve

Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244

VZ100/300/500

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Lead wire length) (Non-locking) (Non-locking) VT VP VG VP S070 VQ VKF (Pitch) (Pitch) n-Rc 1/8 (A port) (A port) VQZ VZ VS Stations n Port size 2 52 43 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

.: MT-S20 Material: Chromium molybdenum steel (Nickel plated) 11.5 Width across flats 14 With end lock 3 119.5 + Stroke 137.5 + Stroke 244 Series MTS Precision Cylinder Dimensions: 25 MTS25 Note) Spline rods width across flats have nothing to do with the position of the body mounting face.

ITV

page 849). 2 (mm) 3 4 5 6 7 8 9 10 Manifold stations n L1 L2 60 75 90 105 120 135 150 165 180 110.5 123 148 160.5 173 185.5 198 223 235.5 Weight of DIN rail (g) 20 22 27 29 31 34 36 41 43 813 Electro-Pneumatic Regulator Series ITV1000/2000/3000 RoHS How to Order ITV 3 0 1 0 S 0 1 2 Model 1 2 3 1000 type 2000 type 3000 type Pressure range Made to Order Specifications Refer to pages 816, 832

ARM10/11

B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592

ARM10/11

B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592

Stopper Cylinder

Dimensions Rod end configuration: Lever (Adjustable absorber type) Mounting: Through-hole Workpiece transfer direction RSQB32-DBZ (Double acting) Bore size: 32 Stroke Width across flats 32 20 36 0 0.1 53 10.52 14 6 Adjustment bolt 2 x (Rc, NPT, G) 1/8 15 7.5 20 4.5 R25 244 301 34 45 10.5 20 34 48 + Stroke 4 x 5.5 through 8 x 9 counterbore depth 7 72.5 + Stroke 45 120.5 + 2 stroke RSQB -DBZ