MHC2

Weight Unit: g End boss type (Symbol) Model H E M K 23 MHCA2-6 23 23 23 12-8-21 22 Angular Style Air Gripper Standard Type MHCM2-7S Size: 7 How to Order 7 MHC M 2 S Compact type Number of fingers Action 2 2 finger Single acting (Normally open) S Bore size (mm) 7 7 Specifications JIS Symbol Air 0.4 to 0.6 MPa 10 to 60C 0.02 mm 180 c.p.m.

MHC2

acting (Normally open) S Bore size (mm) 7 7 Specifications JIS Symbol Air 0.4 to 0.6 MPa 10 to 60C 0.02 mm 180 c.p.m.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

M/C M/C Flow control for each branch line Applications For the control of metal wire tension For air blow For flow control of N2 gas to prevent lead frame oxidation Detection camera N2 blow prevents the distortion of camera images due to air turbulence.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

cord O.D. 3.5 to 7 Indicator light : AC 78.5 86 02 03 M plug connecter (M): VQZ3l5(R)-lMl62(67) 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 82.5(83.5) Indicator light 95 : AC 2.10-30 3 Port Solenoid Valve VQZ100/200/300 Manifold Base Mounted Plug Lead Unit Connecter Kit How to Order Manifold VQZ100 SY SYJ VV3QZ 1 5 08 C6 C D VK Option VZ Series None DIN rail mounting (DIN rail standard

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Select the graphs for horizontal of the LEKFS40 on page 7. 3. Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Vacuum Pad: Ball Joint Type

Q Hexagon width across flats P Hexagon width across flats P M14 x 1 M14 x 1 Hexagon width across flats 19 Hexagon width across flats 19 5 5 I I 5 D C 5 D C K H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 Hexagon width across flats 12 M8 x 1.25 M8 x 1.25 ZP3 Hexagon width across flats 12 Hexagon width across flats 3 ZP3E 3 ZP2 Y 2.5 2 ZP2V A B A B ZP Stroke

NAR Series

C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A t e n n o B C D A r e b m a h C F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A e d i u g e v l a V F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A F A 2 C A F A 2 C A F A 2 C A ) f g k (

IDX-OM-Z004

G MADE IN IDF100150F-W i.2 i-6 IDX-OM-Z004 i i.3 HFC IDF100150F-W i.3 i-7 IDX-OM-Z004 i i.4 / 1 1.5 () IDF100150F-W i.4 / i-8 IDX-OM-Z004 1 1 1.1 i.2.9 1 2 IDF100F-30-W C,RV IDF100F-30-CRVW4 IDF 100 F 30 W 4 C 5 G ) K 100kW 100 P 125kW 125 150kW 150 R ) V AC200V(50Hz) AC200/220V(60Hz) 30 1 4 5 C G K P R V 1.1 IDF100150F-W 1 1 IDX-OM-Z004 1 1.2 1.2.1 (C) 1.2.2 G 1.2.3

EX500-GPR1A.eng

Application 8 7 6 5 4 3 2 Communication connector 1 9 Ground terminal Used for grounding EX500 Part Names Station number switch protective cover Set address and bus terminator by using the switches under this cover. ( Note2 ) Display Communication port D ( COM D ) Communication port C ( COM C ) Communication port B ( COM B ) Communication port A ( COM A ) Power supply connector Display the

Tie-rod Type Hydraulic Cylinder

H B Material: Carbon steel Knuckle pin Tolerance C (f8) Order no.

Secondary Batteries

(A) 4 (B) 2 C *Specifications and dimensions for the 90-series are the same as standard products.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

1 Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) VK VZ VF VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS VS4 VQ7 EVS Large capacity EVS7-6 (Size 1) 1200 l/min (ANR) EVS7-8 (Size 2)

CE2

7 !8 !

IDX-OM-M050

IDF100150F 6-6 Consumable parts and regular maintenance parts 6 9 IDX-OM-M050 Air Dryer 7 Service Record Service Record 7-1 Service Record It is recommended to keep a maintenance/service record. Parts No.

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20

Magnetically Coupled

7 r !9 w !4 NCY3B6 NCY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) NCY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 NCY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !

Series M Miniature Fittings M3, R(PT) 1/8, M5

A C B ) M-01AN-4 M-01AN-6 M-01AU-4 M-01AU-6 5 7 5 7 16 18 16 18 2.1 4.0 2.1 4.0 1.8 2.5 1.8 2.5 Nylon tube Soft tube Hose nipple: M-01H-4, -6 Effective orifice(mm2 Weight (g) ) Part No.

KP/KPQ/KPG

Tubing Series10-TU Series 20m bundle Tubing size Metric size (series TU) 20 TU0425 10 BU 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TU0425 O.D. mm Designation 8 10 5 6.5 12 8 2.5 6 4 4 I.D. mm Color Clean series B Black Black White (W) Red (R) Blue (BU) Yellow (Y) Green (G) Clear (C) Orange (YR) W White R Red BU Blue Tubing designation Y Yellow G Green C Clear YR Orange Specifications

70pvpump

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.7 25 25 25 1 l/min(ANR) Inlet air temperature (C) VX3 Inlet air saturation temperature (C) Ambient temperature (C) VXA Dew point indicator purge air flow rate Port size (Nominal size B) 1/4, 3/8 1/8, 1/4 VN Weight (kg) (with bracket) 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90)