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Note 1) ISO 4414: Pneumatic fluid power -Recommendations for the application of equipment to transmission and control systems Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of equipment is the responsibility of the person who designs the system or decides its specifications.

Note 1) ISO 4414: Pneumatic fluid power -Recommendations for the application of equipment to transmission and control systems Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of equipment is the responsibility of the person who designs the system or decides its specifications.

o 6 o o 0 5 -o l 50 75 100 Input signal %F S 0 2 5 5 0 7 5 Input signal %F S Relief flow characteristics suppty pressure:0 TMPa Flow rate characteristics supply pressure:0 TMPa Pressure characteristics set pressure: 0 2MPa 1 0 a $ o s b g 5 0 0 = ^ g u 5 ) 500 1000 1500 0 2 0 4 0 6 0 Flow rate /min (ANR) Supply pressure l\,4Pa Series |TV303I Hysteresis Repeatability Linearity 0 5 @ I ;9

T Body size Pilot type Valve stations Port size 1 22 2 stations P , R A Internal pilot 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 2 Common external pilot 8 2 8 stations 3 8 1 4 A B C 2 stations 1 Internal pilot 0 1 For VY140 3 8 4 2 Common external pilot 3 8 1 2 6 Dimensions 6 stations VVEXB Connection mark All types

/N 5) Mixed mounting with 5 port valve is als VQC1000 up to 50 10.5 0.30 1.0 0.25 0.25 0.72 0.18 VQC2000 up to 80 16 0.30 3.2 0.80 0.15 2.6 0.60 VQC4000 up to 140 25 0.38 7.3 2.0 0.17 6.9 1.7 Note) Values for 2-position single from the cylinder port to the exhaust. (from 2 to 3 and from 4 to 5) C(Sonic conductance) and b(critical pressure ratio) are subject to ISO 6358/JIS B 8390.

Product Description 1 1-1 Model 1 1-2 Specifications 1 1-3 Effective Torque 2 1-4 Key (Keyway) Position and Rotation Range 2 2. Internal Construction and Description of Individual Parts 3 2-1 Single Vane Type 3 2-2 Double Vane Type 4 3. Basic Circuit 5 3-1 Circuit Configuration 5 3-2 Preferred Components 5 4.

Temperature Data A or B = Series IDUS: Data A Series IDFS: Data B Air pressure Data C = 2 Calculate corrected air flow by using A or B and C. Corrected air flow = (Air flow) (Data A x Data C) Corrected air flow = (Air flow) (Data B x Data C) 3 Select a model having an air flow capacity that is higher than the corrected air flow.

How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both

*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93 A93V*2 A93 V V V V No 100 V or

Note Ground the FG terminal with a ground resistance of 100 or less. Tighten the FG terminal (M3 round head combination screw) firmly with a tightening torque of 0.3 Nm. Tighten the connector fixing screws (M2.5 slotted head screws) firmly with a tightening torque of 0.2 to 0.3 Nm. A. Dual power supplies B.

Option [Actuator cable] LE CP 1 B S Cable type Cable length Nil S Robotic cable Standard cable 1.5 m 3 m 5 m 8 m 10 m 15 m 20 m 1 3 5 8 A B C Motor option Nil B Without lock With lock Produced upon receipt of order (Robotic cable only) [I/O cable] Pin no.

-color indication) 2-wire 12 V M9BA** v v V v v G5BA** V v v With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V F59F G59F V V v v IC circuit Magnetic eld resistant (2-color indication) 2-wire (Non-polar) P3DWA V V v Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit 100 V A93 V V Reed auto switch No 100 V or less A90 V V IC circuit Yes 100 V, 200 V A54

^ 9troh6 056 ('g/s') 5 t b 3.5 lb/in 1.75 lblin 075 \%') 6.5 tb 4 lb/in 2 lb/in 106 (1%;) 7.75 tb 4 lblin 2 lblin 150 t1%') 8 r b 3.4 lb/in 1.7 lblin 2OO 12\ 1 2 t b 8 lb/in 3 lblin 250 (2%') 18.75 tb 8.25lblin 3.5 lb/in 300 (3) 23 rb 10.5 lb/in 3.75 lb/in 400 (4') 26.5 tb 8.5 lblin 3.5 lb/in Series NCQT Constru.ction Spring Retum Rubber Bumper Double Ac'ting Sgring Extend 1 4 Bumper B Urethane

^ 9troh6 056 ('g/s') 5 t b 3.5 lb/in 1.75 lblin 075 \%') 6.5 tb 4 lb/in 2 lb/in 106 (1%;) 7.75 tb 4 lblin 2 lblin 150 t1%') 8 r b 3.4 lb/in 1.7 lblin 2OO 12\ 1 2 t b 8 lb/in 3 lblin 250 (2%') 18.75 tb 8.25lblin 3.5 lb/in 300 (3) 23 rb 10.5 lb/in 3.75 lb/in 400 (4') 26.5 tb 8.5 lblin 3.5 lb/in Series NCQT Constru.ction Spring Retum Rubber Bumper Double Ac'ting Sgring Extend 1 4 Bumper B Urethane

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 Sequence 1: Servo ON instruction Sequence 2: Instruction to return to origin Sequence 3: Specify step data No. 0 to input the DRIVE

Check that this matches the controller. (2) Check Parallel I/O configuration matches (NPN or PNP) Controller Electric actuator LEFS25B-100 LEFS25B-100 NPN (1) (1) (2) 6 No.JXC-OMW1019-A 2.3 Startup Procedures (changed) Confirmation of the package content After unpacking everything, check the description on the label to identify the controller and the number of accessories.

4-7-17 2 Series VT325 Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).