Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

EXxx-OMN0029CN

EX600-DYB EX600-DYE/F EX600-DME/F EX600-AXA EX600-AYA EX600-AMB -54No.EX-OMN0029CN-D TM RSNetWorx for DeviceNet EX600 Rockwell Automation DeviceNet RSNetWorx for DeviceNet TM TM version 5.00.00 RSNetWorx for DeviceNet EDS TM (1)RSNetWorx for DeviceNet (2)[Tools][EDS Wizard] (3)EDS (2) TM\Vendor\SMC Corporation\Communication Adapter (4)[Hardware ]DeviceNet EX600-SDN DeviceNet TM\Category

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

Parallel Type Air Gripper Series MHZ

Note) Contact P/A when replacing seals.

Precision Regulator

output PNP open collector 1 output NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output Symbol A B C D ARM ARP Accessory (Pressure gauge) Pressure Switch Specifications Nil None IR1000 series: G33--01 IR2000 series: G43--01 IR-A Set pressure range (MPa) 0.1 to 1 G Resolution of setting and display (MPa) 0.001 IR IR 12 to 24 VDC10%, Ripple (p-p

Suction Filter with Case FH99 Series

View port View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 504 A Suction Filter with Case FH99 Series Dimensions Differential pressure indication switch Blanking cap Differential pressure indicator 8 x T 16 (65) N I (34) E F U OUT X H O 62 B U U R S 4 x K OUT OUT Q P IN Differential pressure indicator Differential pressure indication switch G

Auto Drain Valve Longer life & Higher resistance to foreign matter

3 Chemical resistance of the bowl See P.7 Auto drain type 4 For port size 1/4, the valve already mounted. 5 Only NPT can be selected.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

High Pressure Coolant Valve

O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Fieldbus system Ethernet POWERLINK compatible SI unit

P tight screw (4 x 14) , 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tight screw (4 x 14) , 2 pcs. (3) Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5) , 2 pcs.

Air Gripper for collaborative robots.

Gripping Force F (N) Gripping Point L (mm) Gripping Force F (N) Gripping Point L (mm) 7 3-3.

Step Motor Driver （ Pulse input type ）

P PNP type BC Blank controller *1) *1)Specified software (LEC-BCW) is required. I/O cable length Nil None Option 1 1.5m Nil Screw mounting 3 3m*2) D DIN rail mounting 5 5m*2) *2) Available only with the differential pulse input type. Only 1.5 m cable is available for the open collector type.

IDX-OM-W094

C P J M N H K O L mm A B C D E F G H J K L M N O P IDFA60 R1 307 745 605 161 405 681 94 71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFA90 13 IDFA80 IDFA90 mm IDFA60 745 957 () () 704 916 () () 355 330 485 463 IDFA70 890 () 849 () 390 365 IDFA60/70/80/90 Series 7-3 IDX-OM-W094 7.4

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Controller Item Quantity Power supply plug Controller JXC51##-# JXC61##-# 1 unit Power supply plug JXC-CPW 1 piece P*1) 1 piece I/O cable (LEC-CN5-#) *1) Included in the package only when the I/O I/O cable cable length is specified.

ARJ1020F

(Refer to p.2.0-0 of fittings and tubing.) Accessory (Option) Part No. Part No. Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.

CC

The speed will be approximately 1.4 times the date given on p.4.12-3.

ZSE30/ISE30

Blue DC() -26 Analog output type 1 to 5V (2.5% F .S.) Output impedance: 1k Bring the pressure back to atmospheric pressure and try using the zero out function. Residual pressure error Brown DC(+) Black OUT (Analog output) + 12 to 24VDC Load Blue DC() Supply pressure exceeds the maximum regulating pressure. -28 Analog output type 4 to 20mA (2.5% F .S.)

ZMA

Thread type Common EXH port size 04 1/2 Nil T F Rc NPTF G 06 3/4 S Silencer dedicated for ZZMA (ZZM-SA) Indicate the ejector model no. below the manifold base no. Example) Manifold model no.: ZZMA04-SR (1 pc.)