Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

EXH system Common SUP system Common, Individual Vacuum Ejector Specifications Fluid Air 0.7 MPa 84 kPa 0.2 to 0.55 MPa 0.25 to 0.55 MPa 5 to 60 C 5 to 50 C Main valve Pilot valve Poppet VJ114, VJ324M Maximum operating pressure Maximum vacuum pressure Without valve With valve Without valve With valve Supply pressure range Operating temperature range Maximum air suction volume increased

3 Way Direct Acting NVKF 300 Series

T \ l Main Parts $mim llUlff 300 3-Pofl/nhscl 0mmud $olenoid Urlrs Series NVKF300 Manifold Soecifications Valve stations 2-20 stations (max.)

Clean Air Module

or less (12 VDC), 600 or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set and to operate.

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Spring extend or spring return, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 250mm, Mounts: basic, foot, flange

Magnetic Separator FHM Series

400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

Clean Regulator

100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20

Low torque Metal seal type Rotary joint Series MQR

(cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/4, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 300, Outlet Open Air Pressure Dew-Point(°C): -20, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread