High-precision Digital Pressure Switch ( compatible) [January 2018] C: Contents revised in several places. [January 2018] D: Contents are added. [March 2018] E: Contents revised in several places. [June 2018] F: Contents revised in several places. [October 2018] G: Contents revised in several places. [March 2020] H: Contents revised in several places.
C, prevent water droplets from entering the inlet port. (No freezing of the fluid) * Note 2. ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3.
[July 2018] C: Contents revised in several places. [August 2019] D: Contents revised in several places.
8.2 115 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 2 60 VX3 No freezing Equivalent size VXA VN Pilot Operated Solenoid Valve Specifications LVC Pilot solenoid valve Electrical entry Coil rated voltage (V) AC (50/60/Hz) DC VO301-00T-X302 Conduit terminal 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15 to 10% of the rated voltage Class B or equivalent (130C
Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.
Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.
When the IDF100F-30 is provided with options C, R and V and specified to have the facility water piping direction on the right side, the part number will be IDF100F-30-CRVW4. NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.
Model/Standard Specifications HAA7 1000 HAA15 HAA22 HAA37 Model AT Max. flow capacity (l/min (ANR)) (1) 5700 2200 3300 70 0.7 32 40 Compressed air 5 to 100 Rated performance Operating range Electrical specifications Inlet air temperature (C) Inlet air pressure (MPa) Ambient temperature (C) Outlet air temperature (C) Fluid Inlet air temperature (C) Inlet air pressure (MPa) Ambient temperature
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
FN Number of elements Nominal filtration accuracy Note) Element size Number of elements 1 pc included (FGF1) 3 pcs included (FGF3) 5 pcs included (FGF5) Symbol 1 3 5 EB ES Element material (Polyester) Symbol Nominal filtration accuracy (m) Element size 190 x L440 190 x L770 Symbol A B 005 010 025 050 100 5 10 25 50 100 Port size Port size Rc2 100(4B)JIS10KFF 150(6B)JIS10KFF Applicable model
Ignores excess current per unit for 100 msec after inrush. Disable Does not ignore excess current. Enable Ignores excess current.
Areas where ambient humidity exceeds the operating humidity range. c. Areas where abrupt temperature changes may cause condensation. d. Areas where corrosive gas, flammable gas or other volatile flammable substances are stored. e.
(no freezing or condensation) Operating temp. range Operating: 0 to 50 C, Stored: -10 to 60 C (no freezing or condensation) Environment Operating humidity range Operating, stored 35 to 85%R.H.
Table 1 Moment of inertia Size Allowable kinetic energy (J) 10 0.00015 15 0.00025 20 0.0004 30 0.015 40 0.03 How to calculate the load energy E : Kinetic energy (J) I : Moment of inertia (kg m Speed (rad/s) : Rotation angle (rad) 1803.14 rad t : Rotation time (s) 1 E = I 2 2 2 = t Table 2 Safety operable rotation time adjustment range Size Rotation time ( s / 90) 10 0.03 to 0.5 15
Description Material PBT Brass Brass Note) Handle Needle Lock nut Needle guide Washer O-ring Silencer Silencer cover Body B Gasket q w e r t y u i o !
Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.
L-bracket Port size 3 3/8 Note) Note) The exhaust C port size is 1/4".
C, prevent water droplets from entering the inlet port. (No freezing of the fluid) * Note 2. ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3.
For low dew point air, use stainless steel or fluoropolymer piping. e. Installation of Differential Pressure Gauge Please attach by a customer.
Enable Generates an error. 1 Ignores excess current per unit for 100 msec. after inrush.