MHZ

S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

MHZ

S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

V

M km, 20C 5m VVZS3000-21A-3 x 24AWG * For other commercial connectors, use a 25-pole female connector made in conformity with MIL-C-24308.

C85

D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs Hs Hs Hs Hs Hs Hs Hs 20 25 8 10 12 6 7.5 1 1 2 16 18.5 19 25 19 21.5 23.5 8 18 17 19.5 19 25 20 21.5 23.5 10 18 12 18.5 21 20.5 26.5 21 22 23 25 19.5 16 20.5 23 20.5 26.5 23 22 23 25 19.5 D-A79W 2 16 20 22.5 25 23.5 29.5 25 25 26 29 22.5 25 20 25 25 27.5 26.5 32.5 27.5 28 29 32 25.5 5 6.5 Aim at this

7

DC Specification DC Specification Class B Class B Temperature rise (C) Note 2) Temperature rise (C) Note 2) Model Model Power consumption (W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 4.5 50 7.5 60 7 55 8.5 70 10.5 65 12.5 70 Class H Class H Temperature rise (C) Note 2) Temperature rise (C) Note 2) Model Model Power consumption (

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

IDG

(1) IDG60L 5 to 50 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) Inlet air flowrate (l/min(ANR))(2) Standard performance JIS Symbol 40 100 150 227 320 400 Outlet air flowrate (l/min(ANR)) Purge air flowrate (l/min(ANR))(3) 75 110 170 240 300 25 40 57 80 100 Inlet air pressure (MPa) 0.7 Inlet air temperature (C) 25 25 25 1 l/min (ANR) {In the case of Inlet air pressure

Table of Contents

All data given in a technical specification sheet is based on 25[C]. The temperature range is dependent on the product series. Normally SMC products are rated from 0 to 50[C] or 0 to 60[C].

Table of Contents

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

LEC-OM02704CN

a b c (1) ON/OFF (ab) ONOFF (2) DO (c) DO (3) CC-Link CC-Link 7 21 7MR Configurator 7.7.5 1 (EMG)(LSP)(LSN)OFF ON DOCOM(7.6) 1 1 OK1 ON 7 22 7MR Configurator OK a b c d e f g (1) (a) Enter (2) (b) (3) (c) (4) (c) (5) (d) (6) (e) (7) (f) , (8) 1 (g) 1 (9) CC-Link CC-Link 7 23 7MR Configurator 7.8 7.8.1 1(16) b a 7 24 7MR Configurator (1) 1(16) (2) (a) (3) (b) 7.8.2 7 25

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

SY

Series For SY9000 (12) Model AN300-KM12 Effective area 41mm A 25 B 70 C 98 SY9000 DIN rail dimensions and weights 4 11 VZ1000 Type 45 3 port valve Air operated Refer to the table below for dimension L.

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

CHKD/CHKG

CHKGL--XC64 A C C B 293

Thermo-chiller

Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] HRLE050-W-20 HRLE050-W-20 [50 Hz] [60 Hz] 2 2 Heating capacity [kW] Heating capacity [kW] 1.5 1.5 Facility water temperature 25C, 32C, 40C Facility water temperature 25C, 32C, 40C 1 1 0.5 0.5 0 0 15 20 25 Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] 13-1 A HRLE Series Compact Dual

CQS

Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The

15

Note) When the motor mounting is the right or left side parallel type, the head side foot should be mounted outward. 862 Electric Actuator/Rod Type LEY Series Motorless Type 25, 32, 63 Size Dimensions A B C Head flange: LEY25ll -lllG A B C Rod flange: LEY ll -lllF 25 32 63 LEF LEJ * Head flange is not applicable to the in-line type and the LEY32/63.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)