Process Pump

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 14 Working Principle 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3.

3 Port Solenoid Valve SYJ300/500/700 Series

Specifications Fluid Air Operating pressure range PSI (MPa) Body ported type 22~100 (0.15 to 0.7) Internal pilot Max. 122 Ambient and fluid temperature F 15 or less Response time ms 10 Max. operating frequency Hz Non-locking push type, Push-locking slotted type Manual override Individual pilot exhaust type.

ITV0000

bending radius 80 3.4 13 4.5 6 Series ITV0 Dimensions Single unit for manifolds 56 50 PWR ERR M8 x 1 Cable connection threads 15 15 9 84 86 3.7 Breathing hole Note) (M3 x 0.5) OUTx OUT port (4, 5/32") 8 2 5 18.5 Note) When used under the conditions equivalent to IP65, use the regulator after piping a fitting/tube into a breathing hole.

IP80-OM00019

) 9 4. 23 10 A * 3-1-2 3 2 IP8000 OUT2 OUT1 () * OUT2 OUT1 * 11 A * 3-2-3 DA RA DA RA 3 IP8000 OUT1 OUT2 RA DA OUT1 OUT2 * * 12 5. 5-1 2M4 M4 (1) (+)(-) (+) (-) G1/216.5mm (2.636.64 mm2) (2) 14A B( B), M4 14 5-2 (1) (+)(-) (+) (-) G1/220mm G(PF)1/2 (0.51.5mm2) M4 (2.636.64mm2 ) 15 13 6.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Multistage Ejector Series ZL112/212 1

Note Comonent Parts Replacement Parts Description Material Sound absorbing material B No. No. PVF Suction cover q o ZL112-SP01 Sound absorbing material A Without valve PVF Front cover w !0 (Set no. for 9, 10 & 11) Suction filter PE End cover e !

For post-stoppage positioning and locking

118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific Product Precautions Be sure to read this before handling the products.

S Couplers

-06H -08H -10H -12H 21 35 35 35 30 35 35 35 10 15 30 35 10 18 21 35 35 35 10 22 35 35 1.2 1.9 2.1 2.1 1.8 2.1 2.1 2.1 0.5 0.8 1.8 2.1 0.5 1.0 1.2 1.9 1.9 2.1 0.5 1.3 1.8 2.1 0.4 0.4 0.5 0.5 0.5 0.5 0.5 0.5 0.4 0.4 0.5 0.5 0.4 0.4 0.4 0.4 0.4 0.5 0.4 0.5 0.5 0.5 R1/8 R1/4 R3/8 R1/2 Rc1/8 Rc1/4 Rc3/8 Rc1/2 6 (1/4") 8 (1/4") 10 (3/8") 12 (1/2") 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 6 8 10 12 4.2

Digital Flow Switch (Integrated display type)

If using the product to detect very small flow rates, warm up the product for 10 to 15 minutes first. There will be a drift on the display or the analogue output of approximate 2 to 3% immediately after the power supply is turn on, within 10 minutes. Check regulators and flow adjustment valves before introducing the fluid.

Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

XSA Series

Note 8) Grommet value. 10 XSA-OMS0001-A Fluid property Face seal fitting / compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 C [dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Threaded ports XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 C [dm3/(sbar)] 0.54 1.14 1.14 2.23 2.37 3.5 b 0.36 0.39 0.42 0.38 0.40 0.15 3.

EXxx-OML0010CN

No.EX-OML0010CN-C / / EX600-HT1A 2 8 8 9 10 10 11 12 12 13 1. I/O monitor(I/O ) 15 2. Diagnosis Data() 24 3. Sys. Configuration() 27 4. Parameter Setting() 33 5.

SI unit (CC-Link compatible)

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

XL-OMY0001

15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

EX500-DX_e

EX500-DX B 2 x M5 Tightening torque: 3.0 Nm 0 2 4 6 8 10 Input No. 12 14 Outline with Dimensions Refer to the product catalog or SMC website (URL http://www.smcworld.com) to obtain more detailed information about outline dimensions. 60 1 3 5 7 9 11 13 15 237.5 URL http://www.smcworld.com : The mounting hole on the branch connector side is electrically connected to the ground terminal with

MWP_E

MWP*-OM0020Q-B PRODUCT NAME Air Press Cylinder MODEL/ Series/ Product Number MWP Series Contents Safety instructions 2,3 ActuatorsPrecautions 48 Air Press Cylinder Specifications Specifications 9 Operation Principle 10 Relationship between the output and stroke 10 Installation and Handling Mounting Orientation / Installation 11 Application Examples 11 Cylinder Replacement 12 References 12,13

Compact Guide Cylinder End Lock Type SeriesMGP

+ Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA GB

M-E05-1-LQ1

4 4-13 LQ1-4N13 LQ1-4B13 8 x 6 LQ1E5A-T-R8 5 5-19 LQ1-5N19 LQ1-5B19 6 x 4 LQ1E6A-T-R1 6 6-25 LQ1-6N25 LQ1-6B25 12 x 10 5-17 A Tubing Extension Union Tee Reducing LQ1T-T-R B side B side A side C side C side A side T1 type T2 type Metric size Model Size A side B side C side Insert pin/Name plate symbol Part no.