PFxx-OMJ0005CN

(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7

Ejector Valve Unit Series ZYY/ZYX

Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100 -100 -100 -100 Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) -80 -80 -80 -80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure Vacuum pressure -60 -60 60 -

2/3 Port Valve

How to Read The Graph In case of a water flow of 100 l/min.

Trimmer Auto Switch

to 10 30 to 10 22.5 to 10 180 Angular style MHW2 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Air Cylinders (mm) Description/Series Bore size 10 12 16 20 25 32 40 50 63 80 100 Compact guide cylinder MGP 3.5 5.0 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6.0 Non-rotating double power cylinder MGZ 5.5 6.5 6.5 Air cylinder CA2 4.0 4.0 6.0 6.0 6.0 Sensor Unit D-F7K Air Cylinders (mm) Description/Series Bore

Multistage Ejector (N)ZL Series

] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate [l/min(ANR)] Suction Flow rate [l/min (ANR)] Time to reach vacuum Time to reach vacuum Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread Female thread 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Rod end thread tolerance JIS class 2 50 to 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 +1.0 0 Stroke length tolerance When stroke exceeds the standard range, refer to page 7-6-121.

VQ7-6/7-8

8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Control equipment Symbol Nil A AP M MP F G C E Air filter with auto drain 10 stations 10 Air filter with manual drain Note) When equipped with control unit, one or two stations are used for mounting.

Information

[C] [60 Hz] Circulating fluid temperature [C] Pump Capacity 012 018 024 A W 012 018 A W HRS -20 (Single-phase 200 to 230 VAC) HRS -10 (Single-phase 100/115 VAC) 0.30 0.30 30 30 Outlet 60 [Hz] Outlet 60 [Hz] 0.25 0.25 Outlet 50 [Hz] Outlet 50 [Hz] 0.20 0.20 20 20 0.15 0.15 0.10 0.10 10 10 0.05 0.05 Return port Return port 0 0.00 0.00 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Pressure [MPa]

KJ

-32 UNF <10-32 UNF> <10-32 UNF> Min. port size Applicable tubing O.D.

20

Blow Gun New New RoHS 20% reduction 20% reduction with the SMC Blow gun + S coupler + Coil tube in power consumption 10% reduction with the Blow gun (VMG) only New New With cover Extension nozzle Added 100 mm and 150 mm lengths Pressure loss 1% or less Amount of electricity used in a factory Actuators 10% Air 20% DOWN 20% Air leakage 20% Coolant 30% Air blow 56% Air blow 70% Others 50% SMC

Digital Flow Switch

to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated pressure range 0 to

Ejector Valve Unit Series ZYY/ZYX 1

0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Max. vacuum pressure: 84 kPa Y3 X3 ZY -10L Max. vacuum pressure: 53 kPa Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 100 100 100 100 Suction flow rate

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

EXxx-OMV0017-D

EXW1 EXW1 Up to 100 m V.1.0 / V.2.0 Available *1 EXW1 EXW1+EX600 *2 V.1.0 Not available EXW1 EX600 Up to 10 m V.1.0 Not available EX600 EXW1 Up to 10 m V.1.0 Not available Available *3 EX600 EXW1+EX600 Up to 10 m V.1.0 Not available Available *3 EX600 EX600 Up to 10 m V.1.0 Not available Available *1 Available in protocol V.2.0. *2 Up to 100 m between an EXW1-series Base and Remote, and up

Counter/Extension Cable

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

Valve Single Unit

Purchasing order is available in units of 10 pieces.

CNS

Graph (1) 30 20 10 2.