2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

High-precision Digital Pressure Switch

For precise pressure detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. Unit s selection function is not available for fixed to SI units type.

AR20-B to AR60-B

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

BP1000

(2.1 MPa) 600 psig (4.1 MPa) 450 psig (3.15 MPa) 900 psig (6.2 MPa) 14 to 160F (10 to 71C) (No freezing) 1) 0.3 1 x 10-10 Pam3/sec NPT female, Compression Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.65 lbs (1.2 kg) 2) 1) 22 to 160F (30 to 71C) for Teflon seat.

Steam Valve

Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 638 A VND Series

SI unit for EtherNet/IP TM

Assembly and disassembly of the SI unit -35No.EX-OMP0013-E Specifications Specifications General specifications Item Specifications Ambient temperature -10 to +50 oC Ambient humidity 35 to 85%RH (No condensate) Ambient temperature for storage -20 to +60 oC Withstand voltage 500 VAC applied for 1 minute Insulation resistance 500 VDC, 10 M or more Operating atmosphere No corrosive gas Pollution

Toggle Type Air Gripper

attachment MHT2-63DZ 2 x M12 x 1.75 thread depth 10 Mounting thread 25 60 104 90 4 x M10 x 1.5 thread depth 18 Mounting thread 24 45 60 11 4 x M12 x 1.75 thread depth 17 Mounting thread (Both sides) 10 10 Open 23 Closed 2 132 116 77 60 0.2 36 7 80 60 0.2 40 3.2 10 17 (169.2) 66 53.2 35 Rc (G , NPT ) 1 4 1 4 1 4 2 x M12 x 1.75 thread depth 10 Mounting thread Finger closing port Rc (G ,

Series SY100 3 Port Solenoid Valve Rubber Seal

SY SY100-77-1A 10 stations 10 P R P port SYJ M5 X 0.8 Note 1) Piping to exhaust port not possible. VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ...

S

Part No Bore Size A 0.11 0.36 5-40UNC JM-005 6 (1/4) 0.31 0.43 0.13 10-32UNF JM-02 10 (3/8) 0.38 0.43 0.13 10-32UNF JM-02 15 (5/8) 0.38 F ND E B D C Part No Bore Size G H .125 .125 0.38 No5-40UNC 0.56 0.44 NY-P006 6 (1/4) 0.32 0.44 .188 .188 0.56 No10-32UNF 0.94 0.75 NY-J015 10 (3/8) 0.39 0.54 .188 .188 0.56 No10-32UNF 0.94 0.75 NY-J015 15 (5/8) 0.39 0.54 D I M E N S I O N S C L E V I S A

Metering Valve with Silencer Series ASN2

Dimensions (Hexagon width across flats) Dimensions Min L1 H Screw D D Model Max 20.5 20.5 30 34.2 37 49 ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 8 8 12(12.7) 17(17.5) 19 24(23.8) 23.3 23.3 35 39.2 42 54 10 10 15 20 25 30 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Screw D Note) (in parentheses) are the dimensions of NPT screw specifications. Caution Be sure to read before handling.

9.8

10 to 150 Hz, at the smaller of amplitude 1.5 mm or 20 m/s2 in X, Y, Z directions for 2 hours each (De-energized) Vibration resistance 100 m/s2 in X, Y, Z directions 3 times each (De-energized) Impact resistance 2% F.S.

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

VT307

Max. 10 VZ VS VFN Mounting bracket (A port) P = 26 L Dimension n: Stations n L L1 L2 Formula L1 = 26 x n + 36 L2 = 26 x n + 10 2 88 62 3 114 88 4 140 114 5 166 140 6 192 166 7 218 192 8 244 218 9 270 244 10 296 270 [ ]: With light/surge voltage suppressor 4-7-7 8 Series VT307 Dimensions: Individual Exhaust (Interchangeable with VT301 for mounting) VV307-01-3--F P = 26 (Applicable cable O.D

VP4

Note) A/B port piping: Rc 3/8 or Rc 1/2 Option VFS 9 Other Base specifications Individual EXH VS4 1 2 Individual EXH Common EXH Valve stations 02 2 stations VQ7 10 10 stations EVS How to Order Manifold Assembly VFN Specify the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

PSE540/560

to 24 VDC + (Analog output) Load Blue DC () Dimensions PSE5R04 R06 PSE54M3 M5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20

PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

None High temperature Note 10, 11) Nil XB6 XB7 XB9 XC4 XC6 X103US X114US Mounting Front nose mount Rear pivot mount Double end mount Block mount Note 2, 10, 11) B C E R W Low temperature Note 10, 11) Low speed Note 10, 11) Heavy duty wiper Note 10) Bore size Stainless steel rod Note 9) Double rod Note 3, 10) Rotated ports Note 7, 10) 7/16" 9/16" 3/4" 7/8" 1-1/16" 1-1/4" 1-1/2" 2" Note 3,

BP1000

Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Select compatible materials of construction for the gas 15 psig (0.105 MPa) 30 psig (0.2 MPa) 45 psig (0.3 MPa) 90 psig (0.6 MPa) 150 psig (1.05 MPa) 300 psig (2.1 MPa) 300 psig (2.1 MPa) 600 psig (4.1 MPa) 450 psig (3.15 MPa) 900 psig (6.2 MPa) 14 to 160F (40 to 71C) (No freezing) 1) 0.3 2 x 10-11 Pam3/sec 2 x 10

EX600-DX_DY_DM_eng

The power supply for control and input, or the input device, is Off. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 DX E/DX F DY B/DY E/DY F Content Content Content DM E/DM F ST: STatus display LED ST: STatus display LED ST: STatus display LED

0.01

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings