OMR0031

Controller Specifications . 15 3.1 Basic specifications . 15 3.2 2 Parts description . 16 3.3 External dimensions . 17 (1) Direct mounting (LATCA-) . 17 (2) DIN rail mounting (LATCA-D). 17 3.4 Mounting . 18 (1) Mounting. 18 (2) Connection to ground . 18 (3) Mounting location. 19 4.

Slider Type/Ball Bushing Bearing

2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

LECA6_C

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

LECP6_C

LEC-OM08002 DC24V / / LECP6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 1. 9 2. 9 3. 9 4ON .10 5().10 6.10 3. .11 3.1. .11 3.2.12 3.3. .13 1 LECP6.13 2 DIN LECP6D.13 3.4.14 1.14 2.14 3.15 4. .16 4.1 CN1.16 4.2 CN2CN3:.16 4.3 CN4I/O .16 1.16 2.17 4.4 CN5I/O .17 5. CN1:.18 5.1 .18 5.2 .18 5.3 .19 (1) .19 1 - (2) .19 (3) .19 5.4 .20 1.20 2.21 3().22 6.

Air Slide Table Series MXW

Series MXW Air Slide Table 8, 12, 16, 20, 25 Linear guide table provides long stroke. Table rigidity is constant throughout entire stroke. MXH MXU Long stroke (Max. 300 mm) Dual piston rod Slim design provides 2 times the force of standard cylinder. MXW8: 8 x 2 MXW12: 12 x 2 MXW16: 16 x 2 MXS Linear guide provides long stroke, and it obtains smooth operation without vibration.

MXW Series Long Stroke Slide Table

Dual rod Stroke (mm) 25 50 75 100 125 150 175 200 225 250 275 300 MXW 8 MXW12 MXW16 MXW20 MXW25 Dual rod construction Slim design provides 2 times the force of standard cylinder. MXW20: 20 x 2 MXW25: 25 x 2 MXW 8: 8 x 2 MXW12: 12 x 2 MXW16: 16 x 2 Body mounting Locating pin hole Work mounting Locating pin holes Repeatable mounting and removing of work.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 High temperature XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 Temperature Valve size specifications 63 80 General use XLG63-30-1-2 XLG80-30-1-2 High temperature XLG63-30-1H-2 XLG80-30-1H-2 Note 1) Add the seal material symbol

Modular Design with Uniform Body Style

With bowl guard AD38m-6-A AD48m-6-A Automatic*1 Manual With drain cock C2SF-2-A C3SF-2-A C4SF-2-A With level gauge C3LF-8-A C4LF-8-A With drain guide (without valve function) C2SFm-2J-A C3SFm-2J-A C4SFm-2J-A With level gauge C3LFm-8J-A C4LFm-8J-A Metal Normally closed (N.C.) AD27-2-A AD37m-2-A AD47m-2-A With level gauge AD37m-8-A AD47m-8-A Automatic*1 Normally open (N.O.)

Remodeled

Table.1 (mm) Snap ring size Plate set bolt tightening torque Bore size (Nm) 12 RTW13 1.4 16 RTW18 3.3 20 RTW22 5.1 25 RTW26 8.6 32 RTW34 21.6 40 RTW42 21.6 50 RTW52 43.1 63 RTW65 43.1 80 RTW82 121.5 100 RTW102 196 16-2.How to remove seals 1) Rod seal ToolsPrecision screw driver etc. Insert the fine driver to the collar front to pull out the seal like Fig.1. 1. 2.

HRX-OM-Q026

16.

High Vacuum L Type Valve

52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-Y098

*12 130 16 *12 180 16 *12 Maximum lifting height m 50 49 55 49 68 49 0.10 0.10 0.10 0.10 0.10 0.10 Settable pressure range 5 MPa to to to to to to 0.50 0.49 0.55 0.49 0.68 0.49 Circulating fluid system Minimum operating flow rate 6 L/min 20 2 25 2 40 2 Tank capacity L 42 7 42 7 60 7 By-pass (With valve) built-in Electric conductivity setting range S/ cm 0.5 to 45 9 0.5 to 45 0.5 to 45 9

VM

F.O.F. 3.5 mm 1.5 mm 2.0 mm 23 N 2-4.6 mounting hole 5-6-17 16 Series VM100 Series VM100/Bottom Ported Cross roller plunger VM122-M5-07 VM132-M5-07 VM122-M5-07S VM132-M5-07S JIS Symbol 2 port Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port R port (3 port only) 0.5 MPa supply 2-M5 x 0.8 depth 4 2 mm P.T. 23 N F.O.F. 2-4.6 mounting hole 1.5

Table of Contents - Tubing

Tube Reel Tube Stand: TB-2 TB-3VS Vertical Stand Applicable tube size mm Model 4, 6 8 10 12 TBR-1 TBR-2 TBR-3 TBR-4 TB-3VS Vertical Stand Dimension: 37 1/4" W x 27 9/16" D x 68 11/16" H Designed for high capacity and reel size flexibility. This stand comes with two cross bars.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

HRX-OM-Y120

and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14

Low Profile Slide Table Series MXF

to use as operating port 2 x M5 x 0.8 Note) 25 4 N x M3 x 0.5 thread depth 5.5 3H9 +0.025 0 depth 3 (Insert) 8.5 6.5 A 58 6 10.5 45 16 23 16 35 24.5 20 3H9 depth 3 +0.025 0 68 20 10 4 x 3.2 4 x 6.5 5.5 6.5 2 x M3 x 0.5 thread depth 6 25 H 9.8 4 x M4 x 0.7 A Section AA M 10 Operating port 2 x M5 x 0.8 (Table length) 23 0.3 17 N 2 ( 1): The number of pitches 18.5 5.5 J I Z 3 ZZ Max. 10.5

Process Pump

Class Symbol PAF341S 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 PAF541S PAF341S PAF541S tubing size (mm) tubing size (inch ) SMC SMC SMC 4 4 5 5 6 6 1 2 1 2 1 2 4 4 5 5 6 6 A B A B A B 1/2" x 3/8" 3/8" x 1/4" Panel mount union U P 3/4" x 5/8" Union 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC Note) Select the fitting after confirming the IN / OUT side fitting size and fitting type.

VCC

Cleaning unit Note 2) Unit Standard unit (with gate valve) Part number (Mountable valve number) G06 G04 G02 02 04 06 08 10 12 14 16 18 20 40 U side (OUT port side) Stations Note 1) 4 5 2 3 1 Gate 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 39 40 Description/Model 2 port valve 2 port valve (Sliding type) VCC12-00 D side Valve options 2 port valve (Diaphragm type) VCC12D-00 Blanking