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If using the product to detect very small flow rates, warm up the product for 10 to 15 minutes first. There will be a drift on the analogue output of approximate 2 to 3% immediately after the power supply is turn on, within 10 minutes. Check regulators and flow adjustment valves before introducing the fluid.

If using the product to detect very small flow rates, warm up the product for 10 to 15 minutes first. There will be a drift on the analogue output of approximate 2 to 3% immediately after the power supply is turn on, within 10 minutes. Check regulators and flow adjustment valves before introducing the fluid.

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 13 Working Principle 1. When air is supplied, it passes through the switching valve and enters drive chamber B. 2.

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s Pulsation Attenuating Capacity The process pump generates pulsation because it discharges a liquid using two diaphragms.

-Supply air at appropriate pressure. 18 10. Outer dimensions PB1011A-01PB1013A-0119 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Handling Precautions . 10 5. Names and functions of parts . 10 6. How to use . 11 7. Specification and how to order . 12 8. Discharge capability . 14 9. Troubleshooting . 16 10. Outer dimensions. 18 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation

Install it above 0.6m from the floor. 9 Maintenance 10 Troubleshooting 6 Operation Continued 6 Operation Continued 9.1 Daily Check 10.1 Alarm list No. Modes Function Selectable Setting Default No.

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

Symbol Differential pressure indication Symbol Nominal filtration 0 None 4 Differential pressure indicator standard 074 74m 5 Differential pressure indication switch 105 105m 003 3m Table1-1 Port size (Rc) 005 5m Non-standard 010 10m Port size Threaded connection 020 20m Symbol 040 40m 149 149m 06 3/4 270 270m 08 1 10 1 1/4 12 1 1/2 16 2 20 2 1/2 24 3 10 / 17 FGX-OM-F001-A 2.

Refer to page 8 to 10. Please note that the graph should only be used as a guide as there is a tolerance of about 10% in the clamp cylinder body.

Cylinder specification Bore size (mm) 32 40 50 63 80 100 Action Double acting/single rod Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Min. operating pressure 0.08MPa Without auto switch-10 to 70 Ambient and fluid (No freezing) temperatures With auto switch-10 to 60 Lubricant Not required (Non-lube) Piston speed 50 to 1,000mm/s * Stroke length tolerance [mm] Up to 500st+2.0

Cylinder specification Bore size (mm) 32 40 50 63 80 100 Action Double acting/single rod Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Min. operating pressure 0.08MPa Without auto switch-10 to 70 Ambient and fluid (No freezing) temperatures With auto switch-10 to 60 Lubricant Not required (Non-lube) Piston speed 50 to 1,000mm/s * Stroke length tolerance [mm] Up to 500st+2.0

Description 1 Body A 8 Lever shaft 2 Piston assembly 9 Seal support 3 Lever 10 Rod cover 4 Guide 11 Steel ball 5 Finger 12 Rod seal 6 Roller stopper 13 Piston seal 7 Body B 14 Gasket 7 12 6 4 10 9 8 13 Replacement parts Description JMHZ2-8 JMHZ2-12 JMHZ2-16 JMHZ2-20 Main part Seal kit JMHZ8-PS JMHZ12-PS JMHZ16-PS JMHZ20-PS 12,13,14 JMHZ2JMHZ-A0802 JMHZ-A1202 JMHZ-A1602 JMHZ-A1602 4,5,6,11

Z Y Y X Z (mm) mm X Y Z -2.6 -6.5 41.23 Z X 10 - 4 (www.smcworld.com) 4-1. JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 128 3 4M40.7 8 3.4 8 2 11 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% 0.4 (W) [0.40.1] P .1367 LED 300 12 - 4-3.

(www.smcworld.com)JMHZ2 Series P .15 mm 16 MPa 0.1~0.7 (oC) -10~50 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 700 M8 8 MOLEX (51227-0800) 7 - 3-3. 2 1 F 8 - 3-4. H 9 - 3-5. JMHZ2-16D-X7400B-HC10-(*) P13P14P15 4 M6 31.5 2XM4x0.7 8 4 M6 108.8L 4 4 M4 4 M3 27 17 10 - JMHZ2-16D-X7400B-HC10DT-(*) 4 M6 32.5 8 4 M6 109.8L 4 4 M4 4 M3 27 17 11 - 3-6.

Node address setting, Communication speed setting 1) Turn on (SW mode) the switch No. 10 of the 10-digit switch mounted on the SI unit. 2) Change the instance attribute value via the network as indicated below.

Assembly and disassembly of the SI unit -28No.EX-OMN0009-G Specifications Specifications General specifications Item Specifications Ambient temperature -10 to +50 oC Ambient humidity 35 to 85%RH (No condensate) Ambient temperature for storage -20 to +60 oC Withstand voltage 500 VAC applied for 1 minute Insulation resistance 500 VDC, 10 M or more Operating atmosphere No corrosive gas Enclosure

(Tightening torque: 0.8 to 1.2 Nm) 3) Purchasing order is available in units of 10 pieces. 10 No.VQC1000V-OMM0002-B VQC1000/2000 series Specific Product Precautions 3 Be sure to read this before handling How to Mount/Remove DIN Rail Built-in Silencer Element A filter element is incorporated in the end plate on both sides of the manifold base.