HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Grommet type (G) DIN terminal type (D) Symbol Without indicator light With indicator light Without indicator light With indicator light Without indicator light With indicator light Varistor Varistor S Non-locking push type (Tool required) Coil Coil 5 AC Varistor Neon bulb None Z Coil Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

Ejector Valve Unit, Series ZYY/ZYX

Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

VNB

cable O.D. 6 to 8 (D, DL) Pilot port B (Air operated) L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) I (Grommet: G) J (Conduit: C) 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H I J K L M Model VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5

HRX-OM-Z015

Communication example Device Address : No.1 Read 16 pieces data from register 0030h.

Compressed Air Preparation Filter

D-G

KB

D L A2 A1 M Part No.

EX510-GMJ1.eng

Ensure input branch current does not exceed the specification range. 3 Mode No.4 Number of branch Valid port A OFF 16 points per port COM A and B B ON 8 points per port COM A to D Check the connection of UNLIT COM port branch to input unit. 4 COM A-D is not LIT 23 22 Troubleshooting (continued) CC-Link compatible communication No.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Auto Switch Proper Mounting Position (mm) (mm) Auto Switch Mounting Height D-M9 D-M9W D-M9 D-M9W D-A9 Auto switch model Auto switch model D-A9 B A B A Bore size Bore size 20 25 32 40 Hs 30.5 59.5 34 55.5 20 25 32 40 Note) The above values are a guide in the stroke end detection of the mounting positions of the auto switch.

VCL

W (44) T R (Y) Z VC T 25 VDW IN port 2-3/8 : Thread type l=280 l=300 VQ VX2 (X) (V) S Q 2.5 (N) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C E A (U) VX3 D G C B VXA L1 L2 L3 16 VN LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 16 OUT port n-

MGF

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

Nozzle Diameter: ø2.0, Body Style: Body Ported, Vacuum Pressure: -48KPa{-360mmHg}, SUP: One-touch Fitting Ø12, VAC: One-touch Fitting Ø16, EXH: One-touch Fitting Ø16

Nozzle Diameter: ø2.0, Body Style: Body Ported, Vacuum Pressure: -660mmHg, SUP: One-touch Fitting Ø12, VAC: One-touch Fitting Ø16, EXH: One-touch Fitting Ø16

AKH/AKB Series Check Valve with One-touch Fitting

Model D L M M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 3 6 10 17 24 2.8 6.5 14 24 34 5/32 1/4 5/16 3/8 1/2 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Male Connector Type: AKH Millimeter Size Connection thread R Applicable tube O.D.

AC Servo Motor Driver (MECHATROLINK-II type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1. The maximum operating pressure for the vacuum rodless cylinder is 0.3 MPa.

,

override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3, 5 port 1/8 1 port 5 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Industrijska Avtomatika d.o.o.

Electro-Pneumatic Positioner Series IP8000/8100

D. 7 to 9:P368010-26 Applicable cable O.