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Pollution degree D Side (SI unit side) NOTE Output No. 1 9 Solenoid on B side 3 5 7 17 29 31 (Note): Y connectors for external power supply are available as accessories. Refer to the product catalog or SMC website (URL http://www.smcworld.com) to obtain more detailed information about product.

No.EX-OMN0035CN-A / Series EX600-DX## EX600-DY## EX600-DM## SMC 3 9 10 12 12 14 17 17 20 20 LED 25 28 28 31 34 34 36 36 LED 40 42 42 44 46 46 48 48 LED 52 54 54 56 -1No.EX-OMN0035CN-A 57 58 58 58 58 58 59 -2No.EX-OMN0035CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

(Clr Counter Value) ON/OFF 31 5. (Parameter Default) 32 6. (Clear Error Log) 32 -27No.EX-OML0010CN-C 1. 1. Tag Input (23 ) -28No.EX-OML0010CN-C 2. EX600 (SI SW ) SI SW Re Register 2. Re Register PROFIBUS DPSI -29No.EX-OML0010CN-C 3. Hold/Clear Hold/Clear SI PLC Hold/Clear 3. Hold/Clear HandheldSwitch HandheldPLCHold/Clear SwitchSI Hold/Clear -30No.EX-OML0010CN-C 4. 4.

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

Installation 15 Piping 16 Wiring 17 Outline of setting 19 List of outputs 20 Initialize mode 21 Setting procedure of initialize mode 22 Function selection mode 25 F_1 Input procedure of the Set value of instantaneous output 26 F_2 Input procedure of the Set value of instantaneous output (Auto-preset) 27 F_3 Input procedure of the Set value of accumulated output 28 Key-lock function 30 Maintenance 31

No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (

Input of set values Setting of P1L/n1L Setting of P_1/n_1 P1AH/n1AH P1dH/n1dH P1AL/n1AL P1dL/n1dL P1H/n1H H_1 H1 (Page 29) (Page 29) (Page 31) 4. Selection of display colour SoG/SoR/REd/GRN (Page 32) 5. Completed [F 1] Setting of OUT1 is completed. -27No.PF-OMN0012-H 1.

IZN10IZN10-P (NPN ) (PNP ) AC 1) 2500V 2) 10V 3) 0.03ppm0.05ppm () 4) 0.05MPa0.7MPa 61/4 DC24V10 80mA() GND +24V (ON 0.6V ) (ON +19V ) 5mA 5mA 40mA 1V (40mA ) 40mA 1V (40mA ) DC28V 20mm500mm 055 3565%RH :ABS, 50Hz 1mm XYZ 2 10G 120g / CE(EMC 89/336/EEC 92/31/EEC 93/68/EEC 2004/108/EC 73/23/EEC93/68/EEC) 1) 1,000M5pF 2) 100mm0.3MPa 3) 300mm, 4) -5- 3. 3. 3.

ABS Vibration resistance Resisting 50Hz Fluctuation 1mm XYZ 2hours for each Impact resistance 100m/s2 Weight 185g (Including cable weight) Protection Class:Class III equipment(according to EN60950-1) Environment:Pollution degree 3 Ce marking:Low Voltage Directive:73/23/EEC,93/68/EEC Only connect to SELV-type external circuits EN Standard Applicable Conditions EMC Directive 89/336/EEC,92/31

Doc.IZ*-OMU0031 / Series IZE11 2 7 8 10 10 11 14 15 18 18 F0 19 F1 OUT1 20 F2 OUT2 22 F3 22 F4 23 F5 24 F6 25 F98 26 F99 27 28 31 32 32 34 -1No.IZ*-OMU0031 1) (ISO/IEC)(JIS) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

Description PAX112 Diaphragm kit KT-PAX1-31 Check valve kit KT-PAX1-36 Switching valve parts kit KT-PAX1-37#1 Pilot valve kit KT-PA5-38 Pulsation attenuator control valve kit KT-PAX1-39 Piping and Operation Caution Mount the pump so that the reset button faces upward. Air to be supplied to the air supply port should be cleaned and filtered through AF filter, etc.

(Guideline 1m) -9 - Relation between the adjustment needle scale and operation frequency AXTS040*-2(B)-X2 Internal pilot type AXTS040*-2B-X2 Internal pilot valve Ratio of operating frequency and ON time AXTS040*-2(B)-X2 ON OFF adjustment OFF[] 10 needle [rotation] Frequency [Hz] 1 3 5 7 7 5 3 1 8 2.1 Hz 2.6 Hz 3.1 Hz 3.8 Hz 1 [Hz] 31% 64% 74% 73% 6 2.6 Hz 3.0 Hz 3.4 Hz 4.2 Hz ON adjustme

LQ1T5A-TT1-R2 5 5-19 LQ1-5N19 LQ1-5B19 Tubing extensions 3/8" x 1/4" 5-19 LQ1-5N19 LQ1-5B19 LQ1T5A-TT1-R3 5 2-07 LQ1-2N07 LQ1-2B07 Tubing extensions 3/4" x 5/8" 5-19 LQ1-5N19 LQ1-5B19 LQ1T5A-TT1-R5 5 5-13 LQ1-5N13 LQ1-5B13 5-19 LQ1-5N19 LQ1-5B19 LQ1T5A-TT1-R7 5 4-13 LQ1-4N13 LQ1-4B13 Tubing extensions 1/2" x 3/8" 5-19 LQ1-5N19 LQ1-5B19 LQ1T5A-TT2-R4 5 Tubing extensions 3/4" x 5/8" 2-07 LQ1-2N07 31

0x00,0x03 Quantity of byte to read 0x06 0,6 0x06 Information written to 0040h (CH1 Circulating fluid set temperature) 0x00EB 0,0,E,B 0x00,0xEB Information written to 0041h (CH2 Circulating fluid set temperature) 0x0031 0,0,3,1 0x00,0x31 Information written to 0042h (Operation stop flag) 0x0001 0,0,0,1 0x00,0x01 Checksum ASCII:LRC RTU:CRC 8,9 0x50,0x4C Trailer CR/LF None Total quantity of byte 31

External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 for 0.5MPa 31

Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31

Sequence Yes Grommet 40mA mounting controller IC circuit Yes DC4.528V , Relay Tie-rod (2-colour display) Grommet D-M9NW(V) -900 Max.40mA Sequence mounting controller IC circuit Yes DC4.528V , Relay Tie-rod (2-colour display) Grommet D-M9PW(V) -900 Max.40mA Sequence mounting controller Relay Yes DC1028V , 2.5 Tie-rod Sequence (2-colour Grommet D-M9BW(V) -900 40mA mounting controller display) 31

CG5A 11~2 2 31 4 5 6 7 13 2-6-3. P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.