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A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

Piping adapter assembly - old style see E*00 - New Style , Easy maintenance , Detach equipment without removing piping , Assembles to FRLs by simply tightening screws , Available with a L and T type bracket, GAITER ASSY, ACTUATOR, 80MM CA1 KIT/ACCESSORY, .27915 lb

Piping adapter assembly - old style see E*00 - New Style , Easy maintenance , Detach equipment without removing piping , Assembles to FRLs by simply tightening screws , Available with a L and T type bracket, BOOT KIT, ACTUATOR, 50MM CA1 KIT/ACCESSORY, .20576 lb

(NA) (NA) Q+Stroke MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG d Bore (mm) Standard stroke (mm) Slide Ball bushing (N) (NA) PA* PB PW Q A E F G GP H HG HN HP HT L MGC 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 00 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 MGF * PA dimension is the center sorted factor

Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 VQZ 04 06 10 12 14 20 VZ Option (32A) 1 4 1 (40A) 1 2 1 Coil rated voltage VS 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

Please contact us for the latest version.sales@ocaire.com, MFLD, NVFR2*00 SERIES, VALVE, VV*FR* MANIFOLD VFR SERIES, PM, VV*FR* BASE MT 1/4, 1.81720 lb

(2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series). Having the amplifier built into the electro-pneumatic pilot valve, only an external (24V DC) power supply and (1 to 5V DC) signal voltage need to be connected making handling simple.

Standard Stroke 25,50,75,1 00.1 25,1 50, 1 75,200,250.300,250,400,450,500 25,50,75,1 00,1 25,1 50,1 75,200,250,300,2s0,400,450,500,600 25,50,75,1 00, 1 25,1 50,175,200,250,300,250,400,450,500,600 25,50,75,1 00,125,1 50,1 75,200,250,300,250,400,450,500,600,700 25,50,75,1 00,125,1 50,1 75,200,250,300,250,400.450,500,600.700 ' See rable on p6ge 14 ior long siroke WeighVAluminum Tube (lron Tube

Features 1 Minimum size of 10 introduced to series MY1B/MY New New 27 Height 27mm 40 High precision guide type MY1H10 Basic type MY1B10 30 20 10 00 The stroke adjusting unit (H unit) does not protrude above the table height.

connector Example) 80 inch lead wire length NVJlr4-5LO-M3 vJlG2o-4A-20 ' Special Order Only. t Not voltage interchangeable Series : NVJ 7 00 Manifold Specifications P Common Common exhaust Stations 2 l o 2 0 a Please order the appropriate valves and/or blank plate ass'y with manifold base.

1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y: (only tor type 41, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00

8363C.A5 & @l w Gommd DA8 ,n e), s63 121t2) 00 {3 1/8), 0100 (a) HailTyp DA5 O D-46 o : Available, X: Nol avilad NCDRAIBW3o-O-A7 Re e d Sw ilc h Spe c ific atio ns [od6l I}472 D{72H tra?t. BATTI D Tdl sr80 , &ttdr &r51 tr56 trt6,w D-lft Rday, Seqlericer lC CircLiil Applc.ton Rlay, Sequenc6r tc Cir!

Electrical connections Aluminum diecast N,laterial of body 6.7 (3) Weight lbs (kgf) { For split ranqe specilicatiofis, consult the faciory o How To Order o e Y I lccessories (optional) C'Serration joints (For NlP610) J Allen wrench (For tightening terminal cover) ' wlth joint, po1e, hex, nul, and cross rec*sed head screw N IP6 Electro-Pneumatic Pogitionet Electrical Entry 1/2 PF (female) 00

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).