Precision Cylinder Series MTS

threads 0 0.018 16h7 Width across flats 14 M10 x 1.25 M10 x 1.25 15.8 19.6 6 17 15 7.5 17.5 49 Stud bolt part number: MT-S32 Rod end nut part number: NT-03 13 Width across flats 14 With end lock 2 153.5 + Stroke 177.5 + Stroke Basic type With end lock Accessories SMTS32, #1 (#1 + #4) SMTS32, #2 (#2 + #4) SMTS32, #3 9 Precision Cylinder Series MTS Dimensions/40 MTS40 86 16.5 12.5 81 Basic

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

Series HAW Water Cooled Aftercooler 1

JIS Symbol 14-15-5 2 Series HAW How to Order Precautions HAW 22 14 D Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for precautions on every series.

Mini Free Mount Cylinder

l M5 x 65 l M5 x 70 l M5 x 75 l C D CUJS12-5 -10 -15 -20 -25 -30 CUJS16-5 -10 -15 -20 -25 -30 CUJS20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CUJB12-5 -10 -15 -20 -25 -30 CUJB16-5 -10 -15 -20 -25 -30 CUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 25 30 35 40 45 50 25 30 35 40 45 50 30 35 40 45 50 55 60 65 70 75 20 8.5 8.5 M4 x 20 l 7.5 9.5 25 M4 x 25 l 10.5 7.5 25 M5 x 25 l With Auto Switch (Built-in

MXH Series Compact Slide

58 20 10 4 15 68 30 20 4 20 68 30 4 20 25 78 40 4 30 30 78 40 30 4 40 88 50 20 20 6 50 98 60 25 6 25 60 108 60 6 30 30 35 MXH Series Compact Slide Dimensions 20 LT (mm) 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 3-M6 x 1.0 through Bottom hole dia. 5.1 6-9.3 counter bore depth 8 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail

Low Profile Air Gripper Series MHF2

L L H Holding point Holding point H MHF2-12D MHF2-8D 80 50 Pressure 0.2MPa 40 60 0.5MPa 0.5MPa Pressure 0.2MPa 0.6MPa 0.6MPa Overhang Hmm Overhang Hmm 0.7MPa 30 0.7MPa 0.3MPa 0.3MPa 40 0.4MPa 0.4MPa 20 20 10 0 0 40 20 50 30 10 80 60 40 20 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang

Free Mount Cylinder for Vacuum Series ZCUK

40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 21.5 22 22.5 M5 x 0.8 1/8 1/8 8 5 to 50 11.5 5 to 50 H HA J L P Q QA R S SA T W Y Z Model ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 7.5 26 5 14 5 4.5 4 2 12 30 (40) 7.6 depth 6.5 3.5 15.5 68.5 (78.5) 29 33 42 5 5 5 16 20 24 6 8 10 5.5 5.5 6.6 9 9 13.5 4.5 4.5 4.5 16 20 24 36 (46) 40 (50) 42 (52) 9 9 10 9.3

Title not found

135 2 x 6 Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Stainless Steel 316

Model T (M) Weight (g) H T 2 x Applicable tubing (mm) 4 6 8 10 12 KQGE04-00 KQGE06-00 KQGE08-00 KQGE10-00 KQGE12-00 M12X1 14 37 13 18 21 5.6 M14X1 17 38 15 18.5 29 10.4 M16X1 19 42.8 17 20.9 40 26.1 M M M20X1 24 47 21 23 71 41.5 L M22X1 27 50.6 23 24.8 95 58.3 Note) Figures shown when using FEP tubing 3 Applicable tubing: Inch size/Connection thread: UNF, NPT Union Elbow Male Connector Union

KR

Applicable tubing 40 49 14 21 27 20.3 31 18.5 20.6 10 Connection thread (With seal) 63 22 39 30.8 34 25.2 17 1 2 KRV12-04S 20.9 33.5 80 12 Reference dimensions after R thread installation.

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

ITV

VBA VBAT AP100 841 Series ITV009 Dimensions Manifold 27.5 40 40 27.5 4 x M3 x 0.5 thread depth 3.5 Mounting hole 11 11 25 L1 L2 Port Location z x c 8 No.

ZP

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 Vacuum Pad Series ZP Replacement Parts: Pad Unit (With lock ring/

Rotary Gripper Series MRHQ

0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure 0.7MPa 60 100 Pressure 0.7MPa 0.6MPa Gripping force N Gripping force N 50 0.6MPa 80 0.5MPa 0.5MPa 40 60 0.4MPa 0.4MPa 0.3MPa 30 0.3MPa 40 20 0.2MPa 0.2MPa 20 10 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

6.5 8 15.5 20 23.5 Rc1/16 Rc1/16 Rc1/8 13 13 23 11 12 14 Model QQ SS UU XX 16 16 24 MY1H25 MY1H32 MY1H40 26.5 40 47 6 11 12 18 32 35 WXX WX V V R D Hole Size for Centralized Piping on the Bottom (Machine the mounting side to the dimensions below.)

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight IDF-TR7000-8 IDF100F 7 kVA Three360 540 400 260 300 11 30 94 kg IDF-TR9000-8 IDF125F, 150F 9 kVA 400 650 450 300 350 13 40 109 kg IDF-TR14000-8 IDF190D, 240D 14 kVA 400 650 450 300 350 13 40 152 kg IDF-TR18000-8 IDF370D 18 kVA 400 650 450 300 350 13 40 179 kg 220, 240, 380, 400, 415, 440 V (50/60 Hz) phase

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100

Series CQ2

: 10 to 60C (14 to 140F) (with no freezing) Non-lube Lubrication Rubber bumper Cushion Female threads Rod end threads JIS class 2 Thread tolerance +1.4 0mm (+0.06in) 0 Stroke length tolerance Basic type Mounting brackets Through hole/Double end tapped Mounting Symbol Standard Strokes Double acting: Single rod 1in = 25.4mm Standard strokes (mm) Bore size (mm) 10, 20, 30, 40, 50, 75, 100, 125

Fieldbus system Digital unit

Input signal assignment (EX600-DX E ) Configuration Pin number 1 2 3 4 5 6 7 8 Signal name Input 0 Input 2 Input 4 Input 6 Input 8 Input 10 Input 12 Input 14 Input signal Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Pin number 14 15 16 17 18 19 20 21 Signal name Input 1 Input 3 Input 5 Input 7 Input 9 Input 11 Input 13 Input 15 Input signal Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit