Slide Unit Series CX2/CXWM/CXWL

A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Slide Unit Series CX2/CXWM/CXWL

A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

25, 32, 40, 50, 63 Sine Rodless Cylinder Series 12-REA How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 R E A 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Lubrication Standard stroke (mm) 12-REA25 12-REA32 25 32 40 Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 200, 250, 300

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

NCQ8

Solid state switch Reed switch Yes 5 V A96V A96 Grommet A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V IC circuit Relay, PLC No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V 2-wire

VXD21/22/23

40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

LEYx-OMZ0015

70 80 200 Work load [kg] Vertical 8 16 30 9 19 37 12 24 46 19 38 72 115 Force [N] Note2) (Set value LEY25S/32S15 to 30%) (Set value LEY63S 15 to 50%) (Set value LEY25T/32T12 to 24%) (Set value LEY63T 12 to 40%) 1003 65 127 242 79 154 294 98 192 385 368 156 304 573 131 255 485 157 308 588 197 736 521 1012 1910 3343 Actuator specifications to 300 900 450 225 1200 600 300 1000 500 250 1000

Manifold Specifications

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

New

Electrical option Piping option Port thread Special voltage Electrical entry/Electrical option Symbol Port thread Specifications Symbol Electrical entry 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC

Series 12-REA Sine rodless cylinder

Series 12-REA Sine rodless cylinder 25, 32, 40, 50, 63 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 REA 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Standard stroke (mm) Lubrication Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-REA25 12-REA32 25 32 40 200, 250, 300

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

Piping direction Bore size Standard piping type Axial piping type Nil P 8 8 mm 8 M9BW MTS 8 20 M9BW MTS 20 100 12 to 40 Bore size Number of auto switches 2 pcs. 1 pc. n pcs. 12 16 20 25 32 40 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm Nil S n Auto switch Nil Without auto switch (Built-in magnet) Port thread type For the applicable auto switch model, refer to the table below. 8 to 25 M thread Rc

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS1001F AS2001F AS3001F AS2051F AS4001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D.

70pvpump

40 Total lifting range (m) Total lifting range (m) SUP = 0.5 MPa 30 30 SUP = 0.3 MPa 20 20 SUP = 0.3 MPa SUP = 0.2 MPa SUP = 0.2 MPa 10 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 2 4 6 8 10 12 4 12 16 20 8 24 Discharge rate (l/min) Discharge rate (l/min

5 Port Air Operated Valve

How to Order Manifold Assembly Example (VV5FA3-40) Closed center VFA3340 (1 set) Double solenoid VFA3240 (1 set) Single solenoid VFA3140 (3 sets) Manifold base (5 stations) VV5FA3-40-052-02 D side U side Stations 1 3 2 VV5FA3-40-052-021 set (Type 40, 5-station manifold base part no.) VFA31403 sets (Single part no.) VFA32401 set (Double part no.) VFA33401 set (Closed center part no.)

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

40 100 75 50 30 0.06 63 63 40 3 4 5 7 0.3 or less 0.05 100 100 63 10 12 16 22 Note) The value given for the non-rotating accuracy is applicable below the allowable rotational torque.

SZ3000

For DIN rail weight, refer to page 1-3-12.

SZ3000

For DIN rail weight, refer to page 1-3-12.

Step Motor Controller (Servo / 24 VDC)

Setting Data Entry . 35 7.1 Step data . 35 7.2 Basic parameter . 38 7.3 Return to origin parameter . 40 8.

Vacuum Unit Ejector / Vacuum Pump System

selection function Note 12) NPN 2 outputs F SI unit only Note 13) -100 to 100 H PNP Unit selection function Note 12) 2 outputs J SI unit only Note 13) K Unit selection function Note 12) NPN Pressure switch for 1 output Q SI unit only Note 13) -100 to 100 vacuum with energy R PNP Unit selection function Note 12) saving function Note 11) 1 output S SI unit only Note 13) N Without pressure

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

12 12 12 12 12 How To Order Series SYJ3000 Preferred Option Program How To Order: Manifold (Common SUP/Common EXH) Type 20(5 Port / Body ported type) Applicable solenoid valve: SYJ3 20-M3 SYJ3 23-M3 SS5YJ3--20-05 AB Port M3 0.5 Applicable blank plate ass'y: SYJ3000-21-1A Valve stations 02 2 stations : : P Port M5 0.8 R Port M5 0.8 20 20 stations Type 31(4 Port / Base mounted type) Type