Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Without auto switch With auto switch C H OA Bore (mm) Standard stroke (mm) A 29 29 35 39 I K L D N M OB Q RA RB T E Inch Inch 5.4 5.4 7 10 Inch #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC A 34 34 45 49 B 22 22 26 29 B 27 27 36 39 Metric 6 8 7 12 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 #8-32UNC #8-32UNC #10-32UNF

Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Compact Electro-pneumatic Regulator Series ITV0000

radius 80 3.4 13 4.5 6 Series ITV0 Dimensions Single unit for manifolds 56 50 PWR ERR M8 x 1 Cable connection threads 15 15 9 84 86 3.7 Breathing hole Note) (M3 x 0.5) OUT OUT port (4, 5/32") 8 2 5 18.5 Note) When used under the conditions equivalent to IP65, use the regulator after piping a fitting/tube into a breathing hole.

Miniature Guide Rod Cylinder Series MGJ

x 0.5 depth 5 2-1.2 (Guide air release) 9 + Stroke 5 [ 6.7] 20.5 20.5 20.5 3 5 28 29 9 2 [Auto switch] 2-M3 x 0.5 (port size) 6.1 + Stroke 8.4 6 9 12 14.5 10 2-M3 x 0.5 through 2-4.3 through Counterbore 8 depth 0.5 25 + Stroke 8 5 19 + Stroke 10.5 + Stroke [ 24.5] 4-M4 x 0.7 depth 5 2-2 through (Guide air release) 6 [ 6.7] 5 32 23 11 23 33 23 3 6 [Auto switch] 2-M3 x 0.5 (Bore size) 8.6

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the known unit. Also, the flow characteristics line shown in the Graph (2).

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

x 0.5 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes. (16.3) 11.5 7.7 7.7 11.5 5 22.5 40 7.5 L dimensions n (stations) Dimensions 3 4 6 8 2 9 5 7 10 52.5 L1 70 105 140 35 157.5 87.5 122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

Compact

A LEC SS-T LEC Y Model Screw size Maximum tightening torque [Nm] A [mm] L [mm] LEMBl M5 3 5.5 24.5 LEMC25 LEMH25 M3 0.6 3.4 23.7 2. Never hit at the stroke end except during return to origin. (Except when the LECP2 controller is used.) Internal stopper can be broken.

JA/JAH/JB/JS

force (N) Allowable eccentricity U (mm) Model Applicable bore size (mm) Pneumatic cylinder: 1 MPa or less Rotating angle Operating pressure Basic style Flange style Foot style Hydraulic cylinder: 3.5 MPa or less Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 0.5 6 M3

Dedicated Controller

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 10 10 ISO Class 5 30 L/min (ANR) 1000 1000 ISO Class 4 ISO Class 4 90 L/min (ANR) 100 100 50 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Particle

VS 8-2/VS 8-4

Mounting screw (M4) Terminal block cover M3 screw Gasket 6 mm Electrical entry 2 x G 3/4 Step 3. Mounting the terminal block cover Securely tighten the screws to the torque shown below, after confirming that the gasket is installed correctly.

JA/JAH/JB/JS

force (N) Allowable eccentricity U (mm) Model Applicable bore size (mm) Pneumatic cylinder: 1 MPa or less Rotating angle Operating pressure Basic style Flange style Foot style Hydraulic cylinder: 3.5 MPa or less Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 0.5 6 M3

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

RSQ

Note Applicable auto switch (N) Bore size (mm) 12 16 20 32 40, 50 Extended Compressed D-A7/A8 D-A7H D-A73C/A80C D-F7 D-F7V, D-F7NT D-F7W/J79W D-F7WV D-F79F D-J79/J79C D-F7BAL/F7BAVL Switch mounting screw (M3 x 0.5 x 8l) Square nut 9.6 3.9 16 20 BQ-1 14.9 4.9 14.9 3.4 Switch mounting nut Switch mounting screw (M3 x 0.5 x 10l) Switch spacer 18.6 8.8 32 40 50 27.5 13.7 BQ-2 Applicable

MG

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

SI Unit

A functional earth cable must be connected to the M3 terminal. If this product is connected using power cables that are more than 30m long or go outside of a building then external protection devices should be added to protect against electrical surge damage.

PSE300.eng

M3 x 5 L OUT1 [Default setting] OUT2 Both OUT1 and OUT2 Model: ZS-28-B Power and output lead wire with connector Operator Bracket Lever LCD display All of the settings are completed, and the controller will return to measurement mode.

PFxx-OMO0004CN

B AC (83) C A B -16No.PF-OMO0004CN-E 0.450.55 Nm ,, (ZS-33-M) (ZS-33-MS) M34 (84) M3 M3 -17No.PF-OMO0004CN-E M3(2) 0.350.45 Nm (84) M3 DIN DINDIN DIN0.350.45 Nm () DIN DIN F02(G/14)DIN DIN -18No.PF-OMO0004CN-E IN8cm 2F.S.

PFMV5.eng

Bracket mounting Mount the bracket using the mounting screws (M3 x 15 L) suppllied. The required tightening torque is 0.320.02 Nm. L-type bracket (Through hole) Mounting screw (M3 x 15 L) Mounting screw (M3 x 5 L) CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.