Piping: Body Ported, Stations & Port Location: 18 Stations (Type 20, 41, 42, 43), A, B Port: NPTF

Piping: Base Mounted: Side Ported, Stations & Port Location: 18 Stations (Type 20, 41, 42, 43), A, B Port: NPTF1/4 One-touch Fitting

Piping: Base Mounted: Side Ported, Stations & Port Location: 18 Stations (Type 20, 41, 42, 43), A, B Port: NPTF1/8

Piping: Body Ported, Stations & Port Location: 18 Stations (Type 21, 41 and 42), Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 18 Stations (Type 21, 41 and 42), Port Size: NPTF1/8

High Vacuum L Type Valve

Perform final torqueing of the bolts in the same numerical order (diagonally). 18 XL-OMV0003 7-4. Heater Replacement Procedure Step 1 Assembly of heater Heat transfer sheet Heater Heater Body Mounting screw Body Heater cover Mounting screw Heater cover Size 25 Size 40 or larger Put heat transfer sheet(Note1), heater, heater cover to backside of body.

Precision Regulator

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

AR20-B to AR60-B

71.3 AR40(K)-06-B 3/4 1/8 75 93.2 35.8 33.8 M42 x 1.5 33.8 3 28 34.8 27.8 45.3 42.5 71.3 42.5 71.3 AR50(K)-B 3/4, 1 1/8 90 125.2 43 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 AR60(K)-B 1 1/8 95 129.6 46 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 Optional specifications Model Bracket mount Panel mount M N Q R S T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18

Series 10-, 21- AF-A Air Filter

50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Vacuum Filter AFJ Series

35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52 26 8.5 12.5 70 2.3 35 785 AFJ Series Specific Product Precautions 1 Be sure to read this before handling the products.

Micro-Mist Separator with Prefilter Series AMH

Filtration rating . 0.3 I' m 0.01 I'm 0.3+0.01 I'm Oil misl removal rate : O.8ppm (1.0mglm3(ANR)} O .08ppm (O.1 mg/m3(ANR)) 008ppm (O.1 mglm3(ANR)) Micro-Mist Separator with Prefilter Micro-Mist Separator SeriesAMH Available Models Model AMH150 AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 Air flow rate NOle) Q/min (ANR) 200 500 1000 2000 3500 6000 12000 1/4 3/8 1/2 3/8 1/2 3/4 1/2 3/4 1 3/41

AR Series Modular Type Regulator

AG W E AV IN OUT AF Z Plate thickness AR10-A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18

AR20-B to AR60-B

71.3 AR40(K)-06-B 3/4 1/8 75 93.2 35.8 33.8 M42 x 1.5 33.8 3 28 34.8 27.8 45.3 42.5 71.3 42.5 71.3 AR50(K)-B 3/4, 1 1/8 90 125.2 43 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 AR60(K)-B 1 1/8 95 129.6 46 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 Optional specifications Model Bracket mount Panel mount M N Q R S T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18

•

. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

White 2 Body B Brass Electroless nickel plated 3 Needle Brass Electroless nickel plated 4 Seat ring Brass (1) 5 Lock nut Steel (2) 6 Handle Red painted Aluminum alloy 7 Push button Red POM 8 Cassette 9 U seal HNBR 10 Seal NBR 11 O-ring NBR 12 O-ring NBR 13 O-ring NBR 14 Valve core 15 Elbow body PBT 16 O-ring NBR AS21FE-01 only (3) 17 Accidental release prevention screw Stainless steel 18

AZ1000

(ASME B40.1 Grade A) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Stainless steel Polycarbonate 316L SS 316L SS Case Window Socket Bourdon tube Material MPA MPa 1.14 (29) 2.28 (57.8) 2 (50.7) 2.13 (54.1) 3/4 HEX 9/16-18 UNF 0.73(18.5) inch (mm) For AK/BP series (Installed before shipment / Order separately) Stainless steel / Lower mount Model Specifications

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A9 D-M9 22 (24.5) A 2.8 0.5 W B ( ): Dimensions for D-A93 Bore size (mm) D-A9 A B W 6 10 16 36 11.5 9.5 (7) D-M9 A B W 29.5 5.5 3.5 (1) 29.5 9.5 7.5 (5) 33.5 9.5 0.5 33.5 13.5 3.5 40 15.5 5.5 20 41 15 13 (10.5) 45 19 9 25 40.5 16.5 14.5 (12) 45.5 20.5 10.5 Note) The above mentioned values are indicated as a guide for auto switch

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2 25 4 x M8 x 1.25

3 Port Air Operated Valve VPA3145/3165/3185 Series

Port Solenoid Valve Precautions. 3 (EXH) 1 (IN) 3 (EXH) 1 (IN) Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 1574 3 Port Air Operated Valve VPA315 Series Flow Rate Characteristics/Weight Flow rate characteristics Weight (kg) Port size 12(INOUT) 23(OUTEXH) Valve model C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18