Safety Instructions

Tightening the threaded portion of an M3, M5 or M6 fittings 1) M3 First, tighten it by hand, then give it an additional 1/4 turn with a wrench. 2) M5 and M6 First, tighten it by hand, then give it an additional 1/6 turn with a wrench. Mounting Caution 1. Check tubing for damage before installing. Confirm model size, etc. 2.

JSY1000/3000/5000 Series (Non Plug-in)

(For details, refer to the solenoid specifications of each type of valve.) 14 No.JSY1000V-OMW0004-A JSY1000/3000/5000 series Specific Product Precautions 6 Be sure to read this before handling.

Process Pump <Fluororesin Type> Series PA3000

with depth 8 139 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT Rc, G, NPT, NPTF 3/8 140 8 110 14 6 81 84 67 30 13 26 10 FLUID IN Rc, G, NPT, NPTF 3/8 EXH (P2) Rc, G, NPT, NPTF 1/4 PAP331m(with tube inlet/outlet) P11m P13m 152 2-M5 with depth 8 4-7 139 64 10 10 120 95 Bottom view without foot SUP

Part Number Description: ADAPTOR 1/8NPT TO 10-32   Product Line: V   Product Line Description: VALVE   Family Code: 364   Family Description: SS5YJ3 MFLD SYJ3000   Class Code: 11   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Part Number Description: ELBOW 1/8NPT TO 10-32   Product Line: V   Product Line Description: VALVE   Family Code: 364   Family Description: SS5YJ3 MFLD SYJ3000   Class Code: 11   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Part Number Description: FITTING 10-32 BARB   Product Line: V   Product Line Description: VALVE   Family Code: 364   Family Description: SS5YJ3 MFLD SYJ3000   Class Code: 11   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

XL-OMV0005

Bolt and Nut size Valve size Bolt size Nut size 16 M4 M4 25 M5 M5 40 M6 M6 50 M8 M8 63 M10 80 M10 6 XL-OMV0005 2-4.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

If it is lubricated, it could lead to sticking or slipping. 0.59 M3 x 0.5 2 1.4 M4 x 0.7 2.8 M5 x 0.8 3 0.59 M3 x 0.5 545

EX500

M12 connector (for socket), 10 pcs. 4 3 Socket connector pin arrangement 11 14 Terminal no.

SYJA7000 Series

M5 M5 M5 M5 1)When using SMCs fitting, etc. After tightening by hand, give it additional 1/6 turn with a wrench. (1/4 turn for miniature fittings.) In case that two gaskets are equipped such as universal elbow or universal tee, give it additional 1/2 turn with a wrench.

AR20-B to AR60-B

Applicable Model Model AR10 Port size M5 AR 10 X406 M5 A 0.4 MPa setting w q Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.

Digital Flow Switch

New New Digital Flow Monitor 3-Screen Display Allows for the monitoring of remote lines p. 14 PFG300 Series CAT.ES100-117B PF3A7H Series 3-Color Display Digital Flow Switch for Large Flow PF3A7 H Series 3-color/ 2-screen display * 2-screen display: 2-row display of main screen and sub screen Upper Main display: At set point Upper Main display: At set point Green Red Orange Green Red Instantaneous

ZL3-OM00601

Vacuum Pressure Switch 14 6. Vaccum release flow adjusting needle 15 7. Structural Drawing and Replacement of Parts 16 8. Maintenaunce 20 9. Specifications 21 10. Pneumatic Circuit 24 11. Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2. Flow Characteristics 26 11.3.

XLGR Series

Hexagon wrench (Width across flats 4mm) 13 14 Spanner (Width across flats 13mm) Fig.1 13 Open Close Fig.2 10 XL-OMP0001 6.

Vacuum Regulator

For IRV20(A) P601020-14 Fitting type Fitting size Nil L1 Straight Elbow Symbol C6 C8 C10 N7 N9 N11 Size 6 8 10 1/4" 5/16" 3/8" Included Parts No. 1 2 3 Description Bottom bracket Square nut x 4 Phillips screw x 4 Note) No. 1 to 3 are shipped together.

Multistage Ejector Series ZL112.212

Rc1/2 G1/2(3) Nil F N T 1/2-14 NPT 1/2-14 NPTF P Note 1) W/ unit switching function is not permitted to sell for the domestic use in Japan, because the new Weight and Measure Act has been implemented since October ,99.

SJ1000/2000/3000 Series

Connection thread: M5 First, tighten by hand, then use a suitable wrench to tighten the hexagonal portion of the body an additional 1/6 to 1/4 turn. The reference value for the tightening torque is 1 to 1.5 Nm. 2. Ensure sufficient space for maintenance activities.

Pressure Sensor

kPa 101 kPa For low pressure 0 to 101 kPa 0 101 kPa -10.1 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OME0004-G Dimensions PSE53-M5 PSE53R06 R07 Model No.

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

High Vacuum L Type Valve

Period and Scope of Warranty 14 7. Parts Replacement Procedure 15 1 XL-OMV0007 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.