Vacuum Pad: Ball Joint Type

Pad diameter 10 10 Vacuum entry port (Refer to Table (1) for applications.) 13 13 16 16 20 20 25 25 Table (1) Vacuum Entry/Mounting 32 32 Mounting 40 40 10 to 16 20 to 50 Pad dia. 50 50 M10 x 1 M14 x 1 Thread dia./ Port size Connection Symbol A10 A14 04 4 tube Vacuum entry Pad type One-touch fitting 06 6 tube F Ball joint type 08 8 tube Tightening torque Material Torque Mounting thread

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Pad diameter (mm) 10 10 Vacuum entry (Refer to Table 1 for applications.) 13 13 16 16 20 20 Table 1 Vacuum entry/Mounting thread diameter 25 25 Mounting thread diameter (male thread) 32 32 Pad diameter (mm) 10 to 16 20 to 50 40 40 M10 x 1 M14 x 1 Thread diameter, Piping diameter Connection 50 50 A10 A14 Symbol Vacuum entry 4 tube 04 Pad type 06 One-Touch fitting 6 tube F Ball joint 08

30

" L2 M1 1/4" 5/32" O 1/4" 5/16" L1 N 3/8" 5/16" M2 3/8" 1/2" Note 1) D is maximum diameter.

NCM

, 1, 1-1/2, 2, 3, 4, 5, 6, 8, 10, 12, 32 How to Order NCM Mounting Bore Stroke Option XB6 Ex.)

VXP21/22/23

LVA Connection LVH 3 8 1 2 3 4 03 04 06 10 12 14 20 LVD Refer to the table (2) given below for availability. Thread 1 1 1 2 LVQ 1 4 1 2 Refer to page 17-3-16 for ordering coil only. LQ Thread type Nil T F N For 32A For 40A For 50A 32 40 50 Rc NPTF G NPT Flange LVN Refer to the table (1) given below for availability.

AW

AW10 AW20(K) AW30(K) AW40(K) AW60(K) AR40(K)-06 No.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

ZFC Series

ZFC200-06 Replacement parts Description Part No.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

ZFC200-06 Replacement parts Description Part No.

Modular Type Air Filters Series AF

AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

Check Valve Series AK

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

AZ1000

slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Connections (Inletq, Outletw) Bonnet option 01 02 06

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

New

Series VXF2 Dimensions: Flange body I type VXF26C<<< Conduit terminal Conduit 247 247 S S J J Qp2 Tp2 K 24.4 Q z280 I R 24.4 I R 1/2 Exhaust port K 1/2 Exhaust port U (32) G1/2 G1/2 E (32) U 24 97.5 E 97.5 6 x M10 x 1.5 x 30 24 6 x M10 x 1.5 x 30 (32) (17) 106 (17) 106 Faston terminal 247 S J 24.4 I R 1/2 Exhaust port K Q 11 (17) 97.5 E U 24 6 x M10 x 1.5 x 30 (32) Note) Refer to page 24

Title not found

I I B Black ' For 5/32 andtl6 size tub ng, please rerer to 4mm (T0425) and &nm (T080l "Howlo Ordei niorniat on al nght.

Series KG Stainless Steel One-touch Fittings

Nylon Urethane L1 L2 Q1 Q2 M D 4 6 8 10 KGLU04-00 10.4 12.8 15.2 18.5 20.9 16 17 18.5 21 22 18.5 21 24 27 29 24 27.5 32 36.5 40 18.5 20.5 24.5 28 30 10 12 14 16 18 10.4 6.0 6.0 7 KGLU06-00 12.8 13.9 13.9 9 KGLU08-00 15.2 26.3 18.2 16 KGLU10-00 18.5 40.8 29.0 25 KGLU12-00 20.9 57.2 45.2 32 12 Plug-in elbow: KGL Applicable fitting size d Effective orifice(mm 2) Applicable tube O.D.

Modular Type Regulators Series AR

Description Material Model Color Zinc die-cast AR10, AR20(K) AR Platinum silver 1 Body Aluminum die-cast AR25(K) to AR60(K) Polyacetal AR10, AR20(K) to AR40(K)-06 AL Black 2 Bonnet Aluminum die-cast AR50(K), AR60(K) AW Replacement Parts Part no. AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR40(K)-06 AR60(K) AG No.