CS1

50 36 59 16 15 35 14 19 14 30 98 47 90 43 31 to 1400 Lube Non-lube Air-hydro 128 M30 X 1.5 1/2 161 75 40 160 212 112 255 M14 X 1.5 110 232 133 255 50 36 59 16 15 35 20 47 90 43 14 19 31 24 98 to 1400 0.2 X Stroke 144 M36 X 1.5 3/4 182 18.5 106 75 40 180 236 118 275 M16 X 1.5 120 252 141 273 20 19 56 53 40 90 59 43 14 17 36 26 39 to 1400 162 3/4 M40 X 1.5 204 85 45 18.5 111 200 115 265 132

VZ3000

(Valve) DXT192-13-1A1 pc. (Blanking plate assembly) VV5Z3-43-031-C41 pc. (Manifold base) VZ3140-5LZ1 pc. (Valve) VZ3240-5LZ1 pc. (Valve) DXT192-13-1A1 pc. (Blanking plate assembly) EVS VFN The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

SI unit

Wiring 12 6-1 Communication wiring 12 6-2 Terminal resistance 13 6-3 Cable for communication line 13 6-4 Wiring to power supply 13 7. Troubleshooting 14 -1No.EX-OMF0012-B 1. Safety These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

Swivels

Hex 1 Hex 2 Port 1 Port 2 A Port 2 PS49JMJM-4-4 2.99 2.59 1.29 1.89 1.20 .75 .56 9/16-18 9/16-18 76.0 mm 65.7 mm 32.5 mm 47.9 mm 30.5 mm 19.0 mm 14.3 mm UNF-2A UNF-2A DIA B PS69JMJM-6-6 3.27 2.76 1.40 2.05 1.29 .88 .69 11/16-16 11/16-16 83.0 mm 70.0 mm 35.6 mm 52.0 mm 32.8 mm 22.2 mm 17.5 mm UN-2A UN-2A Hex 1 Hex 2 C PS89JMJM-8-8 3.52 2.93 1.74 2.60 1.73 1.12 .88 13/16-16 13/16-16 89.5 mm

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

13 7 stations 7 stations (+) () () (+) 14 14 J.S.T.

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Power Valve Precision Regulator

Without thread: Internal pilot VVEXB-1 With M5 thread: Common external pilot VVEXB-2 (79) 61.5 P1 A A R 31 26 19 P 10 9 8 P=31 35 Port 1(P): 1 8 25.5 n x port 2(A): 1 8 For 6 manifold stations or more, exhaust from the both sides. 37 29 L Dimension L1 = 31n + 25, L2 = 31n + 12 n: Station 2 87 74 L1 L2 3 118 105 4 149 136 5 180 167 6 211 198 7 242 229 8 273 260 9 304 291 10 335 322 Symbol

ZMA

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series. Mounting Warning 1. Do not drop or bump. Do not drop, bump or apply excessive impact (1,000 m/s2) when handling.

Air cylinder

As the indicator LED protrudes from the switch unit, mounting the switch bracket above the LED may cause damage to it. (4) Insert the auto switch mounting screw (M3) included in accessories from the mounting hole of the auto switch mounting band, inserting the through hole of the switch bracket.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Compressed air 1.0MPa Fluid Max. operating pressure Min. operating pressure (1) 0.05MPa 1.5MPa Proof pressure Ambient and fluid temperature Filtration rating 5 to 60C 0.01m(95% particle size collection) Oil mist removal rate Max.0.1mg/m3 (ANR) (2) (At saturation of element oil, less than 0.01mg/m3(ANR){0.008ppm}) 2 years or when pressure drop reaches 0.1MPa Element life Note 1) With N.O.auto

PSE530/200

SET SET To measuring mode 16-3-13 13 Series PSE530/200 Operation 2: Pressure Setting Auto preset Channel selection MPa Measuring mode kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE CH1 CH2 CH3 CH4 SET Adsorption Verification SET High Suction Auto preset mode Vacuum Work 1 Work 2 Work n OUT1 auto preset preparation Prepare the equipment to be set in this mode. Max.

SI unit for DeviceNet ®

(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED and switch LED display to indicate the status of the SI unit 2 Switches for setting of node address and operating mode. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.

CJ2X/CUX/CQSX/CQ2X/CM2X

Note 1) Data Note 2) Note 3) 10-3-13 13 The external dimensions and the related things about auto switches are the same as standard type, double acting, single rod. For Series CM2, refer to Best Pneumatics Vol. 6.

AME

Air Flow Max. flow line Pressure drop (MPa) Max. air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) Model Selection Select the model in accordance with the following procedure taking the inlet pressure and max. air flow into consideration. (Example) Inlet pressure: 0.6 MPa Max. air flow capacity: 5 m3/min (ANR) 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Note 1) Data Note 2) Note 3) 10-3-13 13 The external dimensions and the related things about auto switches are the same as standard type, double acting, single rod. For Series CM2, refer to Best Pneumatics Vol. 6.

PFxx-OMU0002

Refer to the switch output modes list for the relationship between the set values and operation (page 31).

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

JXCx-OMT0061CN

PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

EXxx-OMN0035CN

Bit 15 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit 5 Bit