Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

, 40, 50 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

AC Servo Motor Driver (MECHATROLINK-II type)

V oltage: 30 VDC Current: 5 to 50 mA DC Note: The connection example in 2.3 shows sink circuits. 15 - (2) Line Driver Output Circuit CN1 connector terminals, 17-18 (phase-A signal), 19-20 (phase-B signal), and 21-22 (phase-Z signal) are explained below. These terminals output the following signals via the line-driver output circuits.

ZL3-OM00601

/set Lead wire assembly with the connector for supply valve/ release valve SY100-30-4A-6 1) 2) 1) Power supply voltage Rated voltage Lead wire assembly with the connector for the supply valve / release valve 2) Lead wire length Nil 300 4 24 VDC 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 Supply valve/ Release valve connector socket (common for ZL3 / ZL6) SY100-30-A * Connector

1

30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3-3P(N) 40 40 88 40 16.5 24.5 3/8 29 32 77.5 35 64 52.5 71.5 28 77.5 69.5 69.5 57.5 104.5 71.5 73.5 6 XSA Series Special Option/Replacement Parts Special Option Special Electrical Entry Direction 2 1 S 5

Air Suction Filter

ZFA10 1/8 50 Large filter element surface P.276 30 Adaptable for a manifold application ZFA20 200 1/4 Cartridge type allows element replacement ZFB Unrestricted 360 piping tube mounting on the IN side 4 10 ZFB10 Universal joint type 6, 3/16" , 1/4" 20 Easy installation and removal with One-touch fittings 6, 1/4" 30 Light and compact molded resin parts ZFB20 P.279 30 8 50 Cartridge

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

ML1C25 4.90 4.90 10 3 12 20 14.7 ML1C32 9.80 9.80 16 5 19 32 29.4 ML1C40 19.6 19.6 25 8 30 50 58.8 Caution on Design ML1C/M1 Allowable moment and load Weight Maximum Allowable moment and Maximum load weight varies depending on mounting orientation, piston speed, etc. Therefore use the cylinder within the range shown in the graph corresponding to operating conditions.

IIIIIIIIII

VP-700-5 VP-700-10 VP-700-30 1 1 2 5 10 30 30 30 30 0.5 0.6 1.0 1.0 1.2 2.0 VPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (In. Hg) PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD FM = FLUSH MOUNT B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125, 150 20 to 63 Theoretical Output OUT IN 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125 80, 100 Unit: N Manufacture of Intermediate Stroke Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 Dealing with the stroke by the 1 mm interval by using an exclusive

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

MLU Standard Stroke MLGP Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) ML1C 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

During unclamping (Extension end) L type (Counterclockwise) 63 mm Clamp stroke Symbol 10 20 30 50 Clamp stroke Applicable bore size CKQ CLKQ 10 mm 12 to 63 20 mm CK CLK 30 mm 32 to 63 50 mm During clamping (Retraction end) CKQ Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.

CV/MVGQ

CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 Series CV Valve Mounted Cylinder Precautions Be sure to read before handling.

Mist Separator

Dimensions (Port size) Semi-standard specifications With element service indicator Clearance for maintenance Optional specifications With auto Standard specifications Model Bracket mount drain P A B C D E G J M N Q R S T U V B AFM20-D 1/8, 1/4 40 87.6 17.5 21 45 21 30 27 22 5.4 8.4 60 2.3 28 104.9 AFM30-D 1/4, 3/8 53 115.4 21.5 26.5 30 50 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AFM40-D 1/4,

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

Micro Mist Separator

Dimensions (Port size) Semi-standard specifications With element service indicator Clearance for maintenance Optional specifications With auto Standard specifications Model Bracket mount drain P A B C D E G J M N Q R S T U V B AFD20-D 1/8, 1/4 40 87.6 17.5 21 45 21 30 27 22 5.4 8.4 60 2.3 28 104.9 AFD30-D 1/4, 3/8 53 115.4 21.5 26.5 30 50 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AFD40-D 1/4,

Series 10-, 21- AF-A Air Filter

35 34 47 47 2.3 2.3 2.3 2.3 3.2 3.2 40 53 70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

MHS

MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380

CYP

(variations on the order of 30%) Large variations may occur depending on the surrounding environment.

CYPSeries

(variations on the order of 30%) Large variations may occur depending on the surrounding environment.