JXCx-OMT0001CN

100 120 120 [mm/s] () 5 5 5 5 5 5 [mm/s] () 8 8 8 9 9 9 -110No.JXC-OMT0001CN-C LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) mm/s 80 100 100 100 [mm/s] () 5 5 5 5 [mm/s] () 7 8 8 8 LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) mm/s 70 80 100 120 [mm/s] () 5 5 5 5 [mm/s] () 8 8 9 9 TM -111No.JXC-OMT0001CN-C

Modular F.R.L. Unit

Applicable models AWM20 to 40 AWM20 to 40 AWM30, 40 AWM20 to 40 AWM20 to 40 AWM20 to 40 Description With bracket Float type auto drain (N.C.) Float type auto drain (N.O.)

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Size 30 Size 50 to 100 Stopper screw AFor end adjustment in clockwise direction Stopper screw BFor end adjustment in counter clockwise direction Fig. (1) Rotation range of shaft keyway (size 30) Fig. (2) Rotation range of shaft keyway (size 50 to 100) 18 - Angle adjustable type (size 50 to 100) How to adjust angle When angle adjustment of an angle adjustable type is performed, loosen the

HRX-OM-Z002

. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT AND GWP VALUE . 9-7 9.3 DIMENSIONS . 9-8 9.3.1 HRLE050-A-20. 9-8 9.3.2 HRLE050-W-20. 9-9 9.3.3 HRLE090-A-20/40. 9-10 9.3.4 HRLE090-W-20/40. 9-11 9.4 FLOW DIAGRAM . 9-12 9.4.1 HRLE050-A-20-*,HRLE090-A-20/40. 9-12 9.4.2 HRLE050-W-20-*,HRLE090-W-20/40. 9-12 9.5 COOLING CAPACITY . 9-13 9.5.1 HRLE050-A-20. 9-13 9.5.2 HRLE050-W-20. 9-13 9.5.3 HRLE090

KR

(mm) (1) Q Weight (g) D L M 3-applicable tubing Model 7 6.4 4.4 Nylon Urethane KGT04-00 KGT06-00 6 4 18 20 4.5 5.3 18.5 15.2 12.8 16 10.4 25.6 17.7 17 13.4 10.6 10 KGT08-00 23 6 15 25 29 KGT16-00 34 10 25 40 10 8 18.5 KGT10-00 KGT12-00 26.5 28.5 6.8 21 7.5 40 28.4 57.4 45.4 16 12 22 26.5 20.9 100 (84) Note 1) D: Max. diameter Note 2) ( ): Values for nylon. 15-3-14 8 Stainless One-touch Fittings

LECP6_C

DRIVE ON B1 OUT0 B2 OUT1 B3 OUT2 RESET ON OFF ()OFF B4 OUT3 B5 OUT4 B6 OUT5 B7 BUSY ON () BUSY OFF BUSY 50ms ON B8 AREA 1~2ON B9 SETON SETON()ON OFF B10 INP INP ON (BUSY OFF) INP ON INP ON INP ON ()INP ON (100 80 401 () INP [ON] 100 80 1 40 SV1.00 25 - B10 INP <> SV1.00 ,INP OFF 100 80 401 () INP [OFF] INP [ON] 100 80 1 40 EMGRESET (BUSY OFF) INP ON B11 SVRE

Ejector Valve Unit Series ZYY/ZYX

Y3 X3 ZY -07L Y3 X3 ZY -07S Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100 50 -100 -100 50 -100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) -80 40 -80 -80 40 -80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum

Valve Single Unit

A: Orange B: Green SX M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-40.

Compact Vacuum Ejector Series ZA

Symbol Rated pressure range and accuracy Part no. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Rod end thread Bore size 20 25 32 40 50 63 80 100 Rod end female thread Rod end male thread Nil M 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Cylinder stroke (mm) Refer to page 2 for standard and intermediate strokes. Applicable Auto Switches/Refer to pages 16 to 21 for further information on auto switches.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

For sub-plate style, mainfold type 40, 41, 41R, 42, 42R Port size E: Push-turn locking lever type 02: 1/4 port With sub-plate 01: 1/8 port With sub-plate Nil: Without sub-plate Body option Nil: Individual pilot exhaust style (With gasket and screws) Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC M plug connector DIN

Air Catch Sensor

40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

Series KV2 Fittings

40 41 68 57 111 121 172 100/800 100/800 100/800 100/1000 100/800 100/600 100/400 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/200 100/200 50/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

OMR0032

LAT3LAT3MLAT3F600 350 700 Min. travel time [ms] Min. travel time [ms] Min. travel time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel