LEF-OM007xx

6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 Slide table type Series LXS 200 4.5 Slide screw 0.05 100 6 Without motor brake 100 9 30 10 Ball screw 0.03

Single Axis Electric Actuator Series LJ1

motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC

PFA/PFW

42 6 17 1.6 48.2 34 54 44 2-Piping port size 4-4.5 40 50 (43.5) 2 1 42 4 3 4 Connector pin numbers Pin name Pin No. 2-3.4 43 DC (+) 1 NC 2 DC () 3 Flow direction OUT 4 Dimension L Model 100 PFW504 106 PFW520 16 Digital Flow Switch for Water Series PFW Dimensions (mm)/ Separate Type For Water 1in = 25.4mm Scale: 65% PFW540-m (N) 62 120 23 78.2 1.6 60 50 34 2-Piping port size 4-4.5 34 40

ZMA

65 100 65 Air consumption Air consumption Air consumption Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure 80 80 53 53 53 53 60 40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l

Motor฀Operated฀Auto฀Drain ADM200 Series

HowtoOrder 03 ADM200 1 Threadtype Operatingtime/Applicablecompressor Nil N F Rc NPT G Nil 2 sec/min (1 time/min) /3.7 to 37 kW 4 sec/min (2 times/min) /37 to 75 kW 6 sec/min (3 times/min) /75 to 110 kW 8 sec/min (4 times/min) /220 to 370 kW 4 6 8 Portsize Voltage OUT IN Symbol 04 03 3 8 3 8 100 VAC Hz 1 50 60 200 VAC Hz 50 60 240 VAC Hz 50 60 110 VAC Hz 50 60 220 VAC Hz 50 60 24 VDC 12 VDC

CVJ3

DC specifications AC specifications (50/60 Hz) Magnet installed even without auto switch 1 2 3 4 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Auto switch mounting Rail mounting style Band mounting style Symbol A B Example Rail mounting style Band mounting style CDVJ5B15-60-A CDVJ5B10-45-B For the applicable auto switch model, refer to the

SJ3A6

Inlet pressure: 0.7 MPa Flow rate [l/min (ANR)] 80 Inlet pressure: 0.5 MPa Valve model Weight (g) SJ3A6-ll-P 79 60 Inlet pressure: 0.3 MPa 40 Inlet pressure: 0.15 MPa 20 5 4 3 2 1 0 Number of restrictor rotations 68 Vacuum Release Valve with Restrictor Series SJ3A6 Construction PS port Symbol: F1 Release pressure side filter y t r q e u w !

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150

Fieldbus system EtherNet/IP TM compatible SI Unit

0x02 0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

End Lock Cylinder Series CBG1

+ l 100 260 336.5 Dimensions inside ( ) are for long strokes. 7

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

PROFINET Compatible Fieldbus System

(It is recommended to ground with resistance of 100 ohms or less) Accessories Seal cap: 5 pcs.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 122.2 <124.2> 142.2 <144.2> 22.6 100 120 80 25 75 n 6 4 2 3 Gate valve

CEx-OMP0016

Load factor 50 100 mm Operating pressure 0.5MPa The length of Brake releasing pressure 0.3MPa 50 No load overrun Mounting position Horizontal 0.5 1.0 Piston speed just before stop ms 11-2 Dispersion of stopping position When cylinder is stopped intermediately, the stopping position is not fixed.

VCC

22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 VNA 122.2 <124.2> 142.2 <144.2> VNB 22.6 100 120 80 25 75 SGC SGH VNC

AZ1000

V3 V3 MPA MPA qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1 Specifications AZ1001 AZ1002 AZ1006 AZ1015 AZ1010 Operating Parameters 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 1 to 10 psig (0.007 to 0.07 MPa) Delivery pressure Select compatible materials of construction for the gas Gas Vacuum to 300

AMX-OM-Q015E

200 300 500 25 50 100 200 300 500 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type V) Relief type Port size 1

AMX-OM-Q018E

200 300 500 25 50 100 200 300 500 Outlet air flow rate L/min(ANR) 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about