1 digit (at 25C ?3C ambient temperature)Lights up when output is turned ON. OUT1: Green OUT2: RedIP40Operating: ?5 to 50C, Stored: ?

Vacuum Gripper

(Based on 25C) Applicable suction cups Refer to 3.4. How to order Standard CE/UKCA MARKED Note 1) The weight changes by the selected suction cup. Refer to 3.4 How to order. Note 2) May be restricted depending on the cup diameter, mounting orientation, or workpiece. Please use within the max. work load.

Vacuum Gripper

(Standard on 25C) Applicable suction cups Refer to 3.4. How to order Standard CE/UKCA MARKED Note 1) The weight changes by the selected suction cup. Refer to 3.4 How to order. Note 2) May be restricted depending on the cup diameter, mounting orientation, or workpiece. Please use within the max. work load.

Vacuum Gripper

3C) Repeatability [%] 0.2 F.S. 1 digit Temperature characteristics [%] 2 F.S. (25C conversion) Applicable suction cups Refer to 3.4.

Vacuum Gripper

(Based on 25C) Applicable suction cups Refer to 3.4. How to order Standard CE/UKCA MARKED Note 1) The weight changes by the selected suction cup. Refer to 3.4 How to order. Note 2) May be restricted depending on the cup diameter, mounting orientation, or workpiece. Please use within the max. work load.

Vacuum Gripper

(Based on 25C) Applicable suction cups Refer to 3.4. How to order Standard CE/UKCA MARKED Note 1) The weight changes by the selected suction cup. Refer to 3.4 How to order. Note 2) May be restricted depending on the cup diameter, mounting orientation, or workpiece. Please use within the max. work load.

Vacuum gripper

3C) Repeatability [%] 0.2 F.S. 1 digit Temperature characteristics [%] 2 F.S. (25C conversion) Applicable suction cups Refer to 3.4.

ATX-OM-F003E

Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8

IDX-OM-M051

Checks and Inspection Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less

IDX-OM-P023E

Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8

IDX-OM-P026E

Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8

3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)170 mA or less290 g1/2Heater type3-digit, 7-segment LED?

2% F.S. or less (15 to 35C based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?

2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?

2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?

2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?

2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?

2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?